12/5/2011	12:30:48 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/5/2011	12:30:48 AM	Recipe started at 12:30 AM
12/5/2011	12:30:48 AM	Helium valve closed
12/5/2011	12:30:48 AM	H2 valve closed
12/5/2011	12:30:48 AM	BCl3 valve closed
12/5/2011	12:30:48 AM	PH3 valve closed
12/5/2011	12:30:48 AM	SiCl4 pre valve closed
12/5/2011	12:30:48 AM	SiCl4 post valve closed
12/5/2011	12:30:48 AM	Main Vac valve closed
12/5/2011	12:30:49 AM	Bypass valve closed
12/5/2011	12:30:49 AM	Bubbler valve closed
12/5/2011	12:30:49 AM	Helium MFC set to  0.000000
12/5/2011	12:30:49 AM	H2 MFC set to  0.000000
12/5/2011	12:30:49 AM	BCl3 MFC set to  0.000000
12/5/2011	12:30:49 AM	PHl3 MFC set to  0.000000
12/5/2011	12:30:49 AM	SiCl4 MFC set to  0.000000
12/5/2011	12:30:49 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	12:30:49 AM	Tube furnace set to 0
12/5/2011	12:30:52 AM	H2 valve closed
12/5/2011	12:30:52 AM	BCl3 valve closed
12/5/2011	12:30:52 AM	PH3 valve closed
12/5/2011	12:30:52 AM	SiCl4 pre valve closed
12/5/2011	12:30:52 AM	SiCl4 post valve closed
12/5/2011	12:30:52 AM	Main Vac valve closed
12/5/2011	12:30:52 AM	Bypass valve closed
12/5/2011	12:30:52 AM	Bubbler valve closed
12/5/2011	12:30:52 AM	Helium valve opened
12/5/2011	12:30:52 AM	Helium MFC set to  500.000000
12/5/2011	12:30:52 AM	H2 MFC set to  0.000000
12/5/2011	12:30:52 AM	BCl3 MFC set to  0.000000
12/5/2011	12:30:52 AM	PHl3 MFC set to  0.000000
12/5/2011	12:30:52 AM	SiCl4 MFC set to  0.000000
12/5/2011	12:30:52 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	12:30:52 AM	Tube furnace set to 0
12/5/2011	12:31:55 AM	Helium valve closed
12/5/2011	12:31:55 AM	H2 valve closed
12/5/2011	12:31:55 AM	BCl3 valve closed
12/5/2011	12:31:55 AM	PH3 valve closed
12/5/2011	12:31:55 AM	SiCl4 pre valve closed
12/5/2011	12:31:55 AM	SiCl4 post valve closed
12/5/2011	12:31:55 AM	Main Vac valve closed
12/5/2011	12:31:55 AM	Bypass valve closed
12/5/2011	12:31:55 AM	Bubbler valve closed
12/5/2011	12:31:55 AM	Helium MFC set to  0.000000
12/5/2011	12:31:55 AM	H2 MFC set to  0.000000
12/5/2011	12:31:55 AM	BCl3 MFC set to  0.000000
12/5/2011	12:31:55 AM	PHl3 MFC set to  0.000000
12/5/2011	12:31:55 AM	SiCl4 MFC set to  0.000000
12/5/2011	12:31:55 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	12:31:55 AM	Tube furnace set to 0
12/5/2011	12:31:56 AM	Run finished at 12:31 AM
12/5/2011	12:31:56 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/5/2011	12:46:08 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/5/2011	12:46:09 AM	Recipe started at 12:46 AM
12/5/2011	12:46:09 AM	Helium valve closed
12/5/2011	12:46:09 AM	H2 valve closed
12/5/2011	12:46:09 AM	BCl3 valve closed
12/5/2011	12:46:09 AM	PH3 valve closed
12/5/2011	12:46:09 AM	SiCl4 pre valve closed
12/5/2011	12:46:09 AM	SiCl4 post valve closed
12/5/2011	12:46:09 AM	Main Vac valve closed
12/5/2011	12:46:09 AM	Bubbler valve closed
12/5/2011	12:46:09 AM	Bypass valve opened
12/5/2011	12:46:09 AM	Helium MFC set to  0.000000
12/5/2011	12:46:09 AM	H2 MFC set to  0.000000
12/5/2011	12:46:09 AM	BCl3 MFC set to  0.000000
12/5/2011	12:46:09 AM	PHl3 MFC set to  0.000000
12/5/2011	12:46:09 AM	SiCl4 MFC set to  0.000000
12/5/2011	12:46:09 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	12:46:09 AM	Tube furnace set to 0
12/5/2011	12:48:06 AM	Helium valve closed
12/5/2011	12:48:06 AM	H2 valve closed
12/5/2011	12:48:06 AM	BCl3 valve closed
12/5/2011	12:48:06 AM	PH3 valve closed
12/5/2011	12:48:06 AM	SiCl4 pre valve closed
12/5/2011	12:48:06 AM	SiCl4 post valve closed
12/5/2011	12:48:06 AM	Main Vac valve closed
12/5/2011	12:48:06 AM	Bubbler valve closed
12/5/2011	12:48:06 AM	Bypass valve opened
12/5/2011	12:48:06 AM	Helium MFC set to  0.000000
12/5/2011	12:48:06 AM	H2 MFC set to  0.000000
12/5/2011	12:48:06 AM	BCl3 MFC set to  0.000000
12/5/2011	12:48:06 AM	PHl3 MFC set to  0.000000
12/5/2011	12:48:06 AM	SiCl4 MFC set to  0.000000
12/5/2011	12:48:06 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	12:48:06 AM	Tube furnace set to 0
12/5/2011	12:49:06 AM	Helium valve closed
12/5/2011	12:49:06 AM	H2 valve closed
12/5/2011	12:49:06 AM	BCl3 valve closed
12/5/2011	12:49:06 AM	PH3 valve closed
12/5/2011	12:49:06 AM	SiCl4 pre valve closed
12/5/2011	12:49:06 AM	SiCl4 post valve closed
12/5/2011	12:49:06 AM	Bypass valve closed
12/5/2011	12:49:06 AM	Bubbler valve closed
12/5/2011	12:49:06 AM	Main Vac valve opened
12/5/2011	12:49:06 AM	Helium MFC set to  0.000000
12/5/2011	12:49:06 AM	H2 MFC set to  0.000000
12/5/2011	12:49:06 AM	BCl3 MFC set to  0.000000
12/5/2011	12:49:06 AM	PHl3 MFC set to  0.000000
12/5/2011	12:49:06 AM	SiCl4 MFC set to  0.000000
12/5/2011	12:49:06 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	12:49:06 AM	Tube furnace set to 0
12/5/2011	12:49:07 AM	Run finished at 12:49 AM
12/5/2011	12:49:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/5/2011	12:50:37 AM	Recipe started at 12:50 AM
12/5/2011	12:50:37 AM	Helium valve closed
12/5/2011	12:50:37 AM	H2 valve closed
12/5/2011	12:50:37 AM	BCl3 valve closed
12/5/2011	12:50:37 AM	PH3 valve closed
12/5/2011	12:50:37 AM	SiCl4 pre valve closed
12/5/2011	12:50:37 AM	SiCl4 post valve closed
12/5/2011	12:50:37 AM	Bypass valve closed
12/5/2011	12:50:37 AM	Bubbler valve closed
12/5/2011	12:50:37 AM	Main Vac valve opened
12/5/2011	12:50:37 AM	Helium MFC set to  0.000000
12/5/2011	12:50:37 AM	H2 MFC set to  0.000000
12/5/2011	12:50:37 AM	BCl3 MFC set to  0.000000
12/5/2011	12:50:37 AM	PHl3 MFC set to  0.000000
12/5/2011	12:50:37 AM	SiCl4 MFC set to  0.000000
12/5/2011	12:50:37 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	12:50:37 AM	Tube furnace set to 0
12/5/2011	2:50:37 AM	Helium valve closed
12/5/2011	2:50:37 AM	H2 valve closed
12/5/2011	2:50:37 AM	BCl3 valve closed
12/5/2011	2:50:37 AM	PH3 valve closed
12/5/2011	2:50:37 AM	SiCl4 pre valve closed
12/5/2011	2:50:37 AM	SiCl4 post valve closed
12/5/2011	2:50:37 AM	Main Vac valve closed
12/5/2011	2:50:37 AM	Bypass valve closed
12/5/2011	2:50:37 AM	Bubbler valve closed
12/5/2011	2:50:37 AM	Helium MFC set to  0.000000
12/5/2011	2:50:37 AM	H2 MFC set to  0.000000
12/5/2011	2:50:37 AM	BCl3 MFC set to  0.000000
12/5/2011	2:50:37 AM	PHl3 MFC set to  0.000000
12/5/2011	2:50:37 AM	SiCl4 MFC set to  0.000000
12/5/2011	2:50:37 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	2:50:37 AM	Tube furnace set to 0
12/5/2011	2:50:40 AM	Helium valve closed
12/5/2011	2:50:40 AM	BCl3 valve closed
12/5/2011	2:50:40 AM	PH3 valve closed
12/5/2011	2:50:40 AM	SiCl4 pre valve closed
12/5/2011	2:50:40 AM	SiCl4 post valve closed
12/5/2011	2:50:40 AM	Main Vac valve closed
12/5/2011	2:50:40 AM	Bypass valve closed
12/5/2011	2:50:40 AM	Bubbler valve closed
12/5/2011	2:50:40 AM	H2 valve opened
12/5/2011	2:50:40 AM	Helium MFC set to  0.000000
12/5/2011	2:50:40 AM	H2 MFC set to  500.000000
12/5/2011	2:50:40 AM	BCl3 MFC set to  0.000000
12/5/2011	2:50:40 AM	PHl3 MFC set to  0.000000
12/5/2011	2:50:40 AM	SiCl4 MFC set to  0.000000
12/5/2011	2:50:40 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	2:50:40 AM	Tube furnace set to 0
12/5/2011	2:51:48 AM	Helium valve closed
12/5/2011	2:51:48 AM	BCl3 valve closed
12/5/2011	2:51:48 AM	PH3 valve closed
12/5/2011	2:51:48 AM	SiCl4 pre valve closed
12/5/2011	2:51:48 AM	SiCl4 post valve closed
12/5/2011	2:51:48 AM	Main Vac valve closed
12/5/2011	2:51:48 AM	Bypass valve closed
12/5/2011	2:51:48 AM	H2 valve opened
12/5/2011	2:51:48 AM	Bubbler valve opened
12/5/2011	2:51:48 AM	Helium MFC set to  0.000000
12/5/2011	2:51:48 AM	H2 MFC set to  500.000000
12/5/2011	2:51:48 AM	BCl3 MFC set to  0.000000
12/5/2011	2:51:48 AM	PHl3 MFC set to  0.000000
12/5/2011	2:51:48 AM	SiCl4 MFC set to  0.000000
12/5/2011	2:51:48 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	2:51:49 AM	Tube furnace set to 0
12/5/2011	2:51:50 AM	Helium valve closed
12/5/2011	2:51:50 AM	BCl3 valve closed
12/5/2011	2:51:50 AM	PH3 valve closed
12/5/2011	2:51:50 AM	SiCl4 pre valve closed
12/5/2011	2:51:50 AM	SiCl4 post valve closed
12/5/2011	2:51:50 AM	Main Vac valve closed
12/5/2011	2:51:50 AM	Bypass valve closed
12/5/2011	2:51:50 AM	H2 valve opened
12/5/2011	2:51:50 AM	Bubbler valve opened
12/5/2011	2:51:50 AM	Helium MFC set to  0.000000
12/5/2011	2:51:50 AM	H2 MFC set to  500.000000
12/5/2011	2:51:50 AM	BCl3 MFC set to  0.000000
12/5/2011	2:51:50 AM	PHl3 MFC set to  0.000000
12/5/2011	2:51:50 AM	SiCl4 MFC set to  0.000000
12/5/2011	2:51:50 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	2:51:50 AM	Tube furnace set to 1000
12/5/2011	3:16:50 AM	Helium valve closed
12/5/2011	3:16:50 AM	PH3 valve closed
12/5/2011	3:16:50 AM	Main Vac valve closed
12/5/2011	3:16:50 AM	Bypass valve closed
12/5/2011	3:16:50 AM	H2 valve opened
12/5/2011	3:16:50 AM	BCl3 valve opened
12/5/2011	3:16:50 AM	SiCl4 pre valve opened
12/5/2011	3:16:50 AM	SiCl4 post valve opened
12/5/2011	3:16:50 AM	Bubbler valve opened
12/5/2011	3:16:50 AM	Helium MFC set to  0.000000
12/5/2011	3:16:50 AM	H2 MFC set to  450.000000
12/5/2011	3:16:50 AM	BCl3 MFC set to  2.000000
12/5/2011	3:16:50 AM	PHl3 MFC set to  0.000000
12/5/2011	3:16:50 AM	SiCl4 MFC set to  50.000000
12/5/2011	3:16:50 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	3:16:50 AM	Tube furnace set to 1000
12/5/2011	4:06:50 AM	Helium valve closed
12/5/2011	4:06:50 AM	BCl3 valve closed
12/5/2011	4:06:50 AM	PH3 valve closed
12/5/2011	4:06:50 AM	SiCl4 pre valve closed
12/5/2011	4:06:50 AM	SiCl4 post valve closed
12/5/2011	4:06:50 AM	Main Vac valve closed
12/5/2011	4:06:50 AM	Bypass valve closed
12/5/2011	4:06:50 AM	H2 valve opened
12/5/2011	4:06:50 AM	Bubbler valve opened
12/5/2011	4:06:50 AM	Helium MFC set to  0.000000
12/5/2011	4:06:50 AM	H2 MFC set to  500.000000
12/5/2011	4:06:50 AM	BCl3 MFC set to  0.000000
12/5/2011	4:06:50 AM	PHl3 MFC set to  0.000000
12/5/2011	4:06:50 AM	SiCl4 MFC set to  0.000000
12/5/2011	4:06:50 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	4:06:50 AM	Tube furnace set to 750
12/5/2011	4:21:50 AM	H2 valve closed
12/5/2011	4:21:50 AM	BCl3 valve closed
12/5/2011	4:21:50 AM	PH3 valve closed
12/5/2011	4:21:50 AM	SiCl4 pre valve closed
12/5/2011	4:21:50 AM	SiCl4 post valve closed
12/5/2011	4:21:50 AM	Main Vac valve closed
12/5/2011	4:21:50 AM	Bypass valve closed
12/5/2011	4:21:50 AM	Helium valve opened
12/5/2011	4:21:50 AM	Bubbler valve opened
12/5/2011	4:21:50 AM	Helium MFC set to  500.000000
12/5/2011	4:21:50 AM	H2 MFC set to  0.000000
12/5/2011	4:21:50 AM	BCl3 MFC set to  0.000000
12/5/2011	4:21:50 AM	PHl3 MFC set to  0.000000
12/5/2011	4:21:50 AM	SiCl4 MFC set to  0.000000
12/5/2011	4:21:50 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	4:21:50 AM	Tube furnace set to 0
12/5/2011	4:41:50 AM	Helium valve closed
12/5/2011	4:41:50 AM	H2 valve closed
12/5/2011	4:41:50 AM	BCl3 valve closed
12/5/2011	4:41:50 AM	PH3 valve closed
12/5/2011	4:41:50 AM	SiCl4 pre valve closed
12/5/2011	4:41:50 AM	SiCl4 post valve closed
12/5/2011	4:41:50 AM	Main Vac valve closed
12/5/2011	4:41:50 AM	Bypass valve closed
12/5/2011	4:41:50 AM	Bubbler valve closed
12/5/2011	4:41:50 AM	Helium MFC set to  0.000000
12/5/2011	4:41:50 AM	H2 MFC set to  0.000000
12/5/2011	4:41:50 AM	BCl3 MFC set to  0.000000
12/5/2011	4:41:50 AM	PHl3 MFC set to  0.000000
12/5/2011	4:41:50 AM	SiCl4 MFC set to  0.000000
12/5/2011	4:41:50 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	4:41:51 AM	Tube furnace set to 0
12/5/2011	5:01:51 AM	Helium valve closed
12/5/2011	5:01:51 AM	H2 valve closed
12/5/2011	5:01:51 AM	BCl3 valve closed
12/5/2011	5:01:51 AM	PH3 valve closed
12/5/2011	5:01:51 AM	SiCl4 pre valve closed
12/5/2011	5:01:51 AM	SiCl4 post valve closed
12/5/2011	5:01:51 AM	Main Vac valve closed
12/5/2011	5:01:51 AM	Bubbler valve closed
12/5/2011	5:01:51 AM	Bypass valve opened
12/5/2011	5:01:51 AM	Helium MFC set to  0.000000
12/5/2011	5:01:51 AM	H2 MFC set to  0.000000
12/5/2011	5:01:51 AM	BCl3 MFC set to  0.000000
12/5/2011	5:01:51 AM	PHl3 MFC set to  0.000000
12/5/2011	5:01:51 AM	SiCl4 MFC set to  0.000000
12/5/2011	5:01:51 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	5:01:51 AM	Tube furnace set to 0
12/5/2011	5:03:40 AM	Helium valve closed
12/5/2011	5:03:40 AM	H2 valve closed
12/5/2011	5:03:40 AM	BCl3 valve closed
12/5/2011	5:03:40 AM	PH3 valve closed
12/5/2011	5:03:40 AM	SiCl4 pre valve closed
12/5/2011	5:03:40 AM	SiCl4 post valve closed
12/5/2011	5:03:40 AM	Main Vac valve closed
12/5/2011	5:03:40 AM	Bubbler valve closed
12/5/2011	5:03:40 AM	Bypass valve opened
12/5/2011	5:03:40 AM	Helium MFC set to  0.000000
12/5/2011	5:03:40 AM	H2 MFC set to  0.000000
12/5/2011	5:03:40 AM	BCl3 MFC set to  0.000000
12/5/2011	5:03:40 AM	PHl3 MFC set to  0.000000
12/5/2011	5:03:40 AM	SiCl4 MFC set to  0.000000
12/5/2011	5:03:40 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	5:03:40 AM	Tube furnace set to 0
12/5/2011	5:04:40 AM	Helium valve closed
12/5/2011	5:04:40 AM	H2 valve closed
12/5/2011	5:04:40 AM	BCl3 valve closed
12/5/2011	5:04:40 AM	PH3 valve closed
12/5/2011	5:04:40 AM	SiCl4 pre valve closed
12/5/2011	5:04:40 AM	SiCl4 post valve closed
12/5/2011	5:04:40 AM	Bypass valve closed
12/5/2011	5:04:40 AM	Bubbler valve closed
12/5/2011	5:04:40 AM	Main Vac valve opened
12/5/2011	5:04:40 AM	Helium MFC set to  0.000000
12/5/2011	5:04:40 AM	H2 MFC set to  0.000000
12/5/2011	5:04:40 AM	BCl3 MFC set to  0.000000
12/5/2011	5:04:40 AM	PHl3 MFC set to  0.000000
12/5/2011	5:04:40 AM	SiCl4 MFC set to  0.000000
12/5/2011	5:04:40 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	5:04:40 AM	Tube furnace set to 0
12/5/2011	6:04:40 AM	Run finished at 6:04 AM
12/5/2011	7:16:50 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/5/2011	7:16:51 AM	Recipe started at 7:16 AM
12/5/2011	7:16:51 AM	Helium valve closed
12/5/2011	7:16:51 AM	H2 valve closed
12/5/2011	7:16:51 AM	BCl3 valve closed
12/5/2011	7:16:51 AM	PH3 valve closed
12/5/2011	7:16:51 AM	SiCl4 pre valve closed
12/5/2011	7:16:51 AM	SiCl4 post valve closed
12/5/2011	7:16:51 AM	Main Vac valve closed
12/5/2011	7:16:51 AM	Bypass valve closed
12/5/2011	7:16:51 AM	Bubbler valve closed
12/5/2011	7:16:51 AM	Helium MFC set to  0.000000
12/5/2011	7:16:51 AM	H2 MFC set to  0.000000
12/5/2011	7:16:51 AM	BCl3 MFC set to  0.000000
12/5/2011	7:16:51 AM	PHl3 MFC set to  0.000000
12/5/2011	7:16:51 AM	SiCl4 MFC set to  0.000000
12/5/2011	7:16:51 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	7:16:51 AM	Tube furnace set to 0
12/5/2011	7:16:54 AM	H2 valve closed
12/5/2011	7:16:54 AM	BCl3 valve closed
12/5/2011	7:16:54 AM	PH3 valve closed
12/5/2011	7:16:54 AM	SiCl4 pre valve closed
12/5/2011	7:16:54 AM	SiCl4 post valve closed
12/5/2011	7:16:54 AM	Main Vac valve closed
12/5/2011	7:16:54 AM	Bypass valve closed
12/5/2011	7:16:54 AM	Bubbler valve closed
12/5/2011	7:16:54 AM	Helium valve opened
12/5/2011	7:16:54 AM	Helium MFC set to  500.000000
12/5/2011	7:16:54 AM	H2 MFC set to  0.000000
12/5/2011	7:16:54 AM	BCl3 MFC set to  0.000000
12/5/2011	7:16:54 AM	PHl3 MFC set to  0.000000
12/5/2011	7:16:54 AM	SiCl4 MFC set to  0.000000
12/5/2011	7:16:54 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	7:16:54 AM	Tube furnace set to 0
12/5/2011	7:17:57 AM	Helium valve closed
12/5/2011	7:17:57 AM	H2 valve closed
12/5/2011	7:17:57 AM	BCl3 valve closed
12/5/2011	7:17:57 AM	PH3 valve closed
12/5/2011	7:17:57 AM	SiCl4 pre valve closed
12/5/2011	7:17:57 AM	SiCl4 post valve closed
12/5/2011	7:17:57 AM	Main Vac valve closed
12/5/2011	7:17:57 AM	Bypass valve closed
12/5/2011	7:17:57 AM	Bubbler valve closed
12/5/2011	7:17:57 AM	Helium MFC set to  0.000000
12/5/2011	7:17:57 AM	H2 MFC set to  0.000000
12/5/2011	7:17:57 AM	BCl3 MFC set to  0.000000
12/5/2011	7:17:57 AM	PHl3 MFC set to  0.000000
12/5/2011	7:17:57 AM	SiCl4 MFC set to  0.000000
12/5/2011	7:17:57 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	7:17:57 AM	Tube furnace set to 0
12/5/2011	7:17:58 AM	Run finished at 7:17 AM
12/5/2011	7:17:58 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/5/2011	7:22:05 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/5/2011	7:22:06 AM	Recipe started at 7:22 AM
12/5/2011	7:22:06 AM	Helium valve closed
12/5/2011	7:22:06 AM	H2 valve closed
12/5/2011	7:22:06 AM	BCl3 valve closed
12/5/2011	7:22:06 AM	PH3 valve closed
12/5/2011	7:22:06 AM	SiCl4 pre valve closed
12/5/2011	7:22:06 AM	SiCl4 post valve closed
12/5/2011	7:22:06 AM	Main Vac valve closed
12/5/2011	7:22:06 AM	Bubbler valve closed
12/5/2011	7:22:06 AM	Bypass valve opened
12/5/2011	7:22:06 AM	Helium MFC set to  0.000000
12/5/2011	7:22:06 AM	H2 MFC set to  0.000000
12/5/2011	7:22:06 AM	BCl3 MFC set to  0.000000
12/5/2011	7:22:06 AM	PHl3 MFC set to  0.000000
12/5/2011	7:22:06 AM	SiCl4 MFC set to  0.000000
12/5/2011	7:22:06 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	7:22:06 AM	Tube furnace set to 0
12/5/2011	7:24:09 AM	Helium valve closed
12/5/2011	7:24:09 AM	H2 valve closed
12/5/2011	7:24:09 AM	BCl3 valve closed
12/5/2011	7:24:09 AM	PH3 valve closed
12/5/2011	7:24:09 AM	SiCl4 pre valve closed
12/5/2011	7:24:09 AM	SiCl4 post valve closed
12/5/2011	7:24:09 AM	Main Vac valve closed
12/5/2011	7:24:09 AM	Bubbler valve closed
12/5/2011	7:24:09 AM	Bypass valve opened
12/5/2011	7:24:09 AM	Helium MFC set to  0.000000
12/5/2011	7:24:09 AM	H2 MFC set to  0.000000
12/5/2011	7:24:09 AM	BCl3 MFC set to  0.000000
12/5/2011	7:24:09 AM	PHl3 MFC set to  0.000000
12/5/2011	7:24:09 AM	SiCl4 MFC set to  0.000000
12/5/2011	7:24:09 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	7:24:10 AM	Tube furnace set to 0
12/5/2011	7:25:10 AM	Helium valve closed
12/5/2011	7:25:10 AM	H2 valve closed
12/5/2011	7:25:10 AM	BCl3 valve closed
12/5/2011	7:25:10 AM	PH3 valve closed
12/5/2011	7:25:10 AM	SiCl4 pre valve closed
12/5/2011	7:25:10 AM	SiCl4 post valve closed
12/5/2011	7:25:10 AM	Bypass valve closed
12/5/2011	7:25:10 AM	Bubbler valve closed
12/5/2011	7:25:10 AM	Main Vac valve opened
12/5/2011	7:25:10 AM	Helium MFC set to  0.000000
12/5/2011	7:25:10 AM	H2 MFC set to  0.000000
12/5/2011	7:25:10 AM	BCl3 MFC set to  0.000000
12/5/2011	7:25:10 AM	PHl3 MFC set to  0.000000
12/5/2011	7:25:10 AM	SiCl4 MFC set to  0.000000
12/5/2011	7:25:10 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	7:25:10 AM	Tube furnace set to 0
12/5/2011	7:25:11 AM	Run finished at 7:25 AM
12/5/2011	7:25:11 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/5/2011	7:53:41 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/5/2011	7:53:42 AM	Recipe started at 7:53 AM
12/5/2011	7:53:42 AM	Helium valve closed
12/5/2011	7:53:42 AM	H2 valve closed
12/5/2011	7:53:42 AM	BCl3 valve closed
12/5/2011	7:53:42 AM	PH3 valve closed
12/5/2011	7:53:42 AM	SiCl4 pre valve closed
12/5/2011	7:53:42 AM	SiCl4 post valve closed
12/5/2011	7:53:42 AM	Main Vac valve closed
12/5/2011	7:53:42 AM	Bypass valve closed
12/5/2011	7:53:42 AM	Bubbler valve closed
12/5/2011	7:53:42 AM	Helium MFC set to  0.000000
12/5/2011	7:53:42 AM	H2 MFC set to  0.000000
12/5/2011	7:53:42 AM	BCl3 MFC set to  0.000000
12/5/2011	7:53:42 AM	PHl3 MFC set to  0.000000
12/5/2011	7:53:42 AM	SiCl4 MFC set to  0.000000
12/5/2011	7:53:42 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	7:53:42 AM	Tube furnace set to 0
12/5/2011	7:53:45 AM	H2 valve closed
12/5/2011	7:53:45 AM	BCl3 valve closed
12/5/2011	7:53:45 AM	PH3 valve closed
12/5/2011	7:53:45 AM	SiCl4 pre valve closed
12/5/2011	7:53:45 AM	SiCl4 post valve closed
12/5/2011	7:53:46 AM	Main Vac valve closed
12/5/2011	7:53:46 AM	Bypass valve closed
12/5/2011	7:53:46 AM	Bubbler valve closed
12/5/2011	7:53:46 AM	Helium valve opened
12/5/2011	7:53:46 AM	Helium MFC set to  500.000000
12/5/2011	7:53:46 AM	H2 MFC set to  0.000000
12/5/2011	7:53:46 AM	BCl3 MFC set to  0.000000
12/5/2011	7:53:46 AM	PHl3 MFC set to  0.000000
12/5/2011	7:53:46 AM	SiCl4 MFC set to  0.000000
12/5/2011	7:53:46 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	7:53:46 AM	Tube furnace set to 0
12/5/2011	7:54:50 AM	Helium valve closed
12/5/2011	7:54:50 AM	H2 valve closed
12/5/2011	7:54:50 AM	BCl3 valve closed
12/5/2011	7:54:50 AM	PH3 valve closed
12/5/2011	7:54:50 AM	SiCl4 pre valve closed
12/5/2011	7:54:50 AM	SiCl4 post valve closed
12/5/2011	7:54:50 AM	Main Vac valve closed
12/5/2011	7:54:50 AM	Bypass valve closed
12/5/2011	7:54:50 AM	Bubbler valve closed
12/5/2011	7:54:50 AM	Helium MFC set to  0.000000
12/5/2011	7:54:50 AM	H2 MFC set to  0.000000
12/5/2011	7:54:50 AM	BCl3 MFC set to  0.000000
12/5/2011	7:54:50 AM	PHl3 MFC set to  0.000000
12/5/2011	7:54:50 AM	SiCl4 MFC set to  0.000000
12/5/2011	7:54:50 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	7:54:50 AM	Tube furnace set to 0
12/5/2011	7:54:51 AM	Run finished at 7:54 AM
12/5/2011	7:54:51 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/5/2011	7:57:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/5/2011	7:57:35 AM	Recipe started at 7:57 AM
12/5/2011	7:57:35 AM	Helium valve closed
12/5/2011	7:57:35 AM	H2 valve closed
12/5/2011	7:57:35 AM	BCl3 valve closed
12/5/2011	7:57:35 AM	PH3 valve closed
12/5/2011	7:57:35 AM	SiCl4 pre valve closed
12/5/2011	7:57:35 AM	SiCl4 post valve closed
12/5/2011	7:57:35 AM	Main Vac valve closed
12/5/2011	7:57:35 AM	Bubbler valve closed
12/5/2011	7:57:35 AM	Bypass valve opened
12/5/2011	7:57:35 AM	Helium MFC set to  0.000000
12/5/2011	7:57:35 AM	H2 MFC set to  0.000000
12/5/2011	7:57:35 AM	BCl3 MFC set to  0.000000
12/5/2011	7:57:35 AM	PHl3 MFC set to  0.000000
12/5/2011	7:57:35 AM	SiCl4 MFC set to  0.000000
12/5/2011	7:57:35 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	7:57:35 AM	Tube furnace set to 0
12/5/2011	7:59:07 AM	Helium valve closed
12/5/2011	7:59:07 AM	H2 valve closed
12/5/2011	7:59:07 AM	BCl3 valve closed
12/5/2011	7:59:07 AM	PH3 valve closed
12/5/2011	7:59:07 AM	SiCl4 pre valve closed
12/5/2011	7:59:07 AM	SiCl4 post valve closed
12/5/2011	7:59:07 AM	Main Vac valve closed
12/5/2011	7:59:07 AM	Bubbler valve closed
12/5/2011	7:59:07 AM	Bypass valve opened
12/5/2011	7:59:07 AM	Helium MFC set to  0.000000
12/5/2011	7:59:07 AM	H2 MFC set to  0.000000
12/5/2011	7:59:07 AM	BCl3 MFC set to  0.000000
12/5/2011	7:59:07 AM	PHl3 MFC set to  0.000000
12/5/2011	7:59:07 AM	SiCl4 MFC set to  0.000000
12/5/2011	7:59:07 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	7:59:07 AM	Tube furnace set to 0
12/5/2011	7:59:11 AM	Helium valve closed
12/5/2011	7:59:11 AM	H2 valve closed
12/5/2011	7:59:11 AM	BCl3 valve closed
12/5/2011	7:59:11 AM	PH3 valve closed
12/5/2011	7:59:11 AM	SiCl4 pre valve closed
12/5/2011	7:59:11 AM	SiCl4 post valve closed
12/5/2011	7:59:11 AM	Bypass valve closed
12/5/2011	7:59:11 AM	Bubbler valve closed
12/5/2011	7:59:11 AM	Main Vac valve opened
12/5/2011	7:59:11 AM	Helium MFC set to  0.000000
12/5/2011	7:59:11 AM	H2 MFC set to  0.000000
12/5/2011	7:59:11 AM	BCl3 MFC set to  0.000000
12/5/2011	7:59:11 AM	PHl3 MFC set to  0.000000
12/5/2011	7:59:11 AM	SiCl4 MFC set to  0.000000
12/5/2011	7:59:11 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	7:59:11 AM	Tube furnace set to 0
12/5/2011	7:59:12 AM	Run finished at 7:59 AM
12/5/2011	7:59:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/5/2011	8:07:21 AM	Recipe started at 8:07 AM
12/5/2011	8:07:21 AM	Helium valve closed
12/5/2011	8:07:21 AM	H2 valve closed
12/5/2011	8:07:21 AM	BCl3 valve closed
12/5/2011	8:07:21 AM	PH3 valve closed
12/5/2011	8:07:21 AM	SiCl4 pre valve closed
12/5/2011	8:07:21 AM	SiCl4 post valve closed
12/5/2011	8:07:21 AM	Bypass valve closed
12/5/2011	8:07:21 AM	Bubbler valve closed
12/5/2011	8:07:21 AM	Main Vac valve opened
12/5/2011	8:07:21 AM	Helium MFC set to  0.000000
12/5/2011	8:07:21 AM	H2 MFC set to  0.000000
12/5/2011	8:07:21 AM	BCl3 MFC set to  0.000000
12/5/2011	8:07:21 AM	PHl3 MFC set to  0.000000
12/5/2011	8:07:21 AM	SiCl4 MFC set to  0.000000
12/5/2011	8:07:21 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	8:07:21 AM	Tube furnace set to 150
12/5/2011	8:07:26 AM	H2 valve closed
12/5/2011	8:07:26 AM	BCl3 valve closed
12/5/2011	8:07:26 AM	PH3 valve closed
12/5/2011	8:07:26 AM	SiCl4 pre valve closed
12/5/2011	8:07:26 AM	SiCl4 post valve closed
12/5/2011	8:07:26 AM	Bypass valve closed
12/5/2011	8:07:26 AM	Bubbler valve closed
12/5/2011	8:07:26 AM	Helium valve opened
12/5/2011	8:07:26 AM	Main Vac valve opened
12/5/2011	8:07:26 AM	Helium MFC set to  20.000000
12/5/2011	8:07:26 AM	H2 MFC set to  0.000000
12/5/2011	8:07:26 AM	BCl3 MFC set to  0.000000
12/5/2011	8:07:26 AM	PHl3 MFC set to  0.000000
12/5/2011	8:07:26 AM	SiCl4 MFC set to  0.000000
12/5/2011	8:07:26 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	8:07:26 AM	Tube furnace set to 150
12/5/2011	8:07:56 AM	Helium valve closed
12/5/2011	8:07:56 AM	H2 valve closed
12/5/2011	8:07:56 AM	BCl3 valve closed
12/5/2011	8:07:56 AM	PH3 valve closed
12/5/2011	8:07:56 AM	SiCl4 pre valve closed
12/5/2011	8:07:56 AM	SiCl4 post valve closed
12/5/2011	8:07:56 AM	Bypass valve closed
12/5/2011	8:07:56 AM	Bubbler valve closed
12/5/2011	8:07:56 AM	Main Vac valve opened
12/5/2011	8:07:56 AM	Helium MFC set to  0.000000
12/5/2011	8:07:56 AM	H2 MFC set to  0.000000
12/5/2011	8:07:56 AM	BCl3 MFC set to  0.000000
12/5/2011	8:07:56 AM	PHl3 MFC set to  0.000000
12/5/2011	8:07:56 AM	SiCl4 MFC set to  0.000000
12/5/2011	8:07:56 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	8:07:56 AM	Tube furnace set to 150
12/5/2011	8:08:26 AM	H2 valve closed
12/5/2011	8:08:26 AM	BCl3 valve closed
12/5/2011	8:08:26 AM	PH3 valve closed
12/5/2011	8:08:26 AM	SiCl4 pre valve closed
12/5/2011	8:08:26 AM	SiCl4 post valve closed
12/5/2011	8:08:26 AM	Bypass valve closed
12/5/2011	8:08:26 AM	Bubbler valve closed
12/5/2011	8:08:26 AM	Helium valve opened
12/5/2011	8:08:26 AM	Main Vac valve opened
12/5/2011	8:08:26 AM	Helium MFC set to  20.000000
12/5/2011	8:08:26 AM	H2 MFC set to  0.000000
12/5/2011	8:08:26 AM	BCl3 MFC set to  0.000000
12/5/2011	8:08:26 AM	PHl3 MFC set to  0.000000
12/5/2011	8:08:26 AM	SiCl4 MFC set to  0.000000
12/5/2011	8:08:26 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	8:08:27 AM	Tube furnace set to 150
12/5/2011	8:08:57 AM	Helium valve closed
12/5/2011	8:08:57 AM	H2 valve closed
12/5/2011	8:08:57 AM	BCl3 valve closed
12/5/2011	8:08:57 AM	PH3 valve closed
12/5/2011	8:08:57 AM	SiCl4 pre valve closed
12/5/2011	8:08:57 AM	SiCl4 post valve closed
12/5/2011	8:08:57 AM	Bypass valve closed
12/5/2011	8:08:57 AM	Bubbler valve closed
12/5/2011	8:08:57 AM	Main Vac valve opened
12/5/2011	8:08:57 AM	Helium MFC set to  0.000000
12/5/2011	8:08:57 AM	H2 MFC set to  0.000000
12/5/2011	8:08:57 AM	BCl3 MFC set to  0.000000
12/5/2011	8:08:57 AM	PHl3 MFC set to  0.000000
12/5/2011	8:08:57 AM	SiCl4 MFC set to  0.000000
12/5/2011	8:08:57 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	8:08:57 AM	Tube furnace set to 150
12/5/2011	8:09:27 AM	H2 valve closed
12/5/2011	8:09:27 AM	BCl3 valve closed
12/5/2011	8:09:27 AM	PH3 valve closed
12/5/2011	8:09:27 AM	SiCl4 pre valve closed
12/5/2011	8:09:27 AM	SiCl4 post valve closed
12/5/2011	8:09:27 AM	Bypass valve closed
12/5/2011	8:09:27 AM	Bubbler valve closed
12/5/2011	8:09:27 AM	Helium valve opened
12/5/2011	8:09:27 AM	Main Vac valve opened
12/5/2011	8:09:27 AM	Helium MFC set to  20.000000
12/5/2011	8:09:27 AM	H2 MFC set to  0.000000
12/5/2011	8:09:27 AM	BCl3 MFC set to  0.000000
12/5/2011	8:09:27 AM	PHl3 MFC set to  0.000000
12/5/2011	8:09:27 AM	SiCl4 MFC set to  0.000000
12/5/2011	8:09:27 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	8:09:27 AM	Tube furnace set to 150
12/5/2011	8:09:57 AM	Helium valve closed
12/5/2011	8:09:57 AM	H2 valve closed
12/5/2011	8:09:57 AM	BCl3 valve closed
12/5/2011	8:09:57 AM	PH3 valve closed
12/5/2011	8:09:57 AM	SiCl4 pre valve closed
12/5/2011	8:09:57 AM	SiCl4 post valve closed
12/5/2011	8:09:57 AM	Bypass valve closed
12/5/2011	8:09:57 AM	Bubbler valve closed
12/5/2011	8:09:57 AM	Main Vac valve opened
12/5/2011	8:09:57 AM	Helium MFC set to  0.000000
12/5/2011	8:09:57 AM	H2 MFC set to  0.000000
12/5/2011	8:09:57 AM	BCl3 MFC set to  0.000000
12/5/2011	8:09:57 AM	PHl3 MFC set to  0.000000
12/5/2011	8:09:57 AM	SiCl4 MFC set to  0.000000
12/5/2011	8:09:57 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	8:09:57 AM	Tube furnace set to 150
12/5/2011	8:10:27 AM	H2 valve closed
12/5/2011	8:10:27 AM	BCl3 valve closed
12/5/2011	8:10:27 AM	PH3 valve closed
12/5/2011	8:10:27 AM	SiCl4 pre valve closed
12/5/2011	8:10:27 AM	SiCl4 post valve closed
12/5/2011	8:10:27 AM	Bypass valve closed
12/5/2011	8:10:27 AM	Bubbler valve closed
12/5/2011	8:10:27 AM	Helium valve opened
12/5/2011	8:10:27 AM	Main Vac valve opened
12/5/2011	8:10:27 AM	Helium MFC set to  20.000000
12/5/2011	8:10:27 AM	H2 MFC set to  0.000000
12/5/2011	8:10:27 AM	BCl3 MFC set to  0.000000
12/5/2011	8:10:27 AM	PHl3 MFC set to  0.000000
12/5/2011	8:10:27 AM	SiCl4 MFC set to  0.000000
12/5/2011	8:10:27 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	8:10:27 AM	Tube furnace set to 150
12/5/2011	8:10:57 AM	Helium valve closed
12/5/2011	8:10:57 AM	H2 valve closed
12/5/2011	8:10:57 AM	BCl3 valve closed
12/5/2011	8:10:57 AM	PH3 valve closed
12/5/2011	8:10:57 AM	SiCl4 pre valve closed
12/5/2011	8:10:57 AM	SiCl4 post valve closed
12/5/2011	8:10:57 AM	Bypass valve closed
12/5/2011	8:10:57 AM	Bubbler valve closed
12/5/2011	8:10:57 AM	Main Vac valve opened
12/5/2011	8:10:57 AM	Helium MFC set to  0.000000
12/5/2011	8:10:57 AM	H2 MFC set to  0.000000
12/5/2011	8:10:57 AM	BCl3 MFC set to  0.000000
12/5/2011	8:10:57 AM	PHl3 MFC set to  0.000000
12/5/2011	8:10:57 AM	SiCl4 MFC set to  0.000000
12/5/2011	8:10:57 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	8:10:58 AM	Tube furnace set to 150
12/5/2011	8:11:28 AM	H2 valve closed
12/5/2011	8:11:28 AM	BCl3 valve closed
12/5/2011	8:11:28 AM	PH3 valve closed
12/5/2011	8:11:28 AM	SiCl4 pre valve closed
12/5/2011	8:11:28 AM	SiCl4 post valve closed
12/5/2011	8:11:28 AM	Bypass valve closed
12/5/2011	8:11:28 AM	Bubbler valve closed
12/5/2011	8:11:28 AM	Helium valve opened
12/5/2011	8:11:28 AM	Main Vac valve opened
12/5/2011	8:11:28 AM	Helium MFC set to  20.000000
12/5/2011	8:11:28 AM	H2 MFC set to  0.000000
12/5/2011	8:11:28 AM	BCl3 MFC set to  0.000000
12/5/2011	8:11:28 AM	PHl3 MFC set to  0.000000
12/5/2011	8:11:28 AM	SiCl4 MFC set to  0.000000
12/5/2011	8:11:28 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	8:11:28 AM	Tube furnace set to 150
12/5/2011	8:11:58 AM	Helium valve closed
12/5/2011	8:11:58 AM	H2 valve closed
12/5/2011	8:11:58 AM	BCl3 valve closed
12/5/2011	8:11:58 AM	PH3 valve closed
12/5/2011	8:11:58 AM	SiCl4 pre valve closed
12/5/2011	8:11:58 AM	SiCl4 post valve closed
12/5/2011	8:11:58 AM	Bypass valve closed
12/5/2011	8:11:58 AM	Bubbler valve closed
12/5/2011	8:11:58 AM	Main Vac valve opened
12/5/2011	8:11:58 AM	Helium MFC set to  0.000000
12/5/2011	8:11:58 AM	H2 MFC set to  0.000000
12/5/2011	8:11:58 AM	BCl3 MFC set to  0.000000
12/5/2011	8:11:58 AM	PHl3 MFC set to  0.000000
12/5/2011	8:11:58 AM	SiCl4 MFC set to  0.000000
12/5/2011	8:11:58 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	8:11:58 AM	Tube furnace set to 150
12/5/2011	8:12:28 AM	H2 valve closed
12/5/2011	8:12:28 AM	BCl3 valve closed
12/5/2011	8:12:28 AM	PH3 valve closed
12/5/2011	8:12:28 AM	SiCl4 pre valve closed
12/5/2011	8:12:28 AM	SiCl4 post valve closed
12/5/2011	8:12:28 AM	Bypass valve closed
12/5/2011	8:12:28 AM	Bubbler valve closed
12/5/2011	8:12:28 AM	Helium valve opened
12/5/2011	8:12:28 AM	Main Vac valve opened
12/5/2011	8:12:28 AM	Helium MFC set to  20.000000
12/5/2011	8:12:28 AM	H2 MFC set to  0.000000
12/5/2011	8:12:28 AM	BCl3 MFC set to  0.000000
12/5/2011	8:12:28 AM	PHl3 MFC set to  0.000000
12/5/2011	8:12:28 AM	SiCl4 MFC set to  0.000000
12/5/2011	8:12:28 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	8:12:28 AM	Tube furnace set to 150
12/5/2011	8:12:58 AM	Helium valve closed
12/5/2011	8:12:58 AM	H2 valve closed
12/5/2011	8:12:58 AM	BCl3 valve closed
12/5/2011	8:12:58 AM	PH3 valve closed
12/5/2011	8:12:58 AM	SiCl4 pre valve closed
12/5/2011	8:12:58 AM	SiCl4 post valve closed
12/5/2011	8:12:58 AM	Bypass valve closed
12/5/2011	8:12:58 AM	Bubbler valve closed
12/5/2011	8:12:58 AM	Main Vac valve opened
12/5/2011	8:12:58 AM	Helium MFC set to  0.000000
12/5/2011	8:12:58 AM	H2 MFC set to  0.000000
12/5/2011	8:12:58 AM	BCl3 MFC set to  0.000000
12/5/2011	8:12:58 AM	PHl3 MFC set to  0.000000
12/5/2011	8:12:58 AM	SiCl4 MFC set to  0.000000
12/5/2011	8:12:58 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	8:12:58 AM	Tube furnace set to 150
12/5/2011	8:13:28 AM	H2 valve closed
12/5/2011	8:13:28 AM	BCl3 valve closed
12/5/2011	8:13:28 AM	PH3 valve closed
12/5/2011	8:13:28 AM	SiCl4 pre valve closed
12/5/2011	8:13:28 AM	SiCl4 post valve closed
12/5/2011	8:13:28 AM	Bypass valve closed
12/5/2011	8:13:28 AM	Bubbler valve closed
12/5/2011	8:13:28 AM	Helium valve opened
12/5/2011	8:13:28 AM	Main Vac valve opened
12/5/2011	8:13:28 AM	Helium MFC set to  20.000000
12/5/2011	8:13:28 AM	H2 MFC set to  0.000000
12/5/2011	8:13:28 AM	BCl3 MFC set to  0.000000
12/5/2011	8:13:28 AM	PHl3 MFC set to  0.000000
12/5/2011	8:13:28 AM	SiCl4 MFC set to  0.000000
12/5/2011	8:13:28 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	8:13:29 AM	Tube furnace set to 150
12/5/2011	8:13:59 AM	Helium valve closed
12/5/2011	8:13:59 AM	H2 valve closed
12/5/2011	8:13:59 AM	BCl3 valve closed
12/5/2011	8:13:59 AM	PH3 valve closed
12/5/2011	8:13:59 AM	SiCl4 pre valve closed
12/5/2011	8:13:59 AM	SiCl4 post valve closed
12/5/2011	8:13:59 AM	Bypass valve closed
12/5/2011	8:13:59 AM	Bubbler valve closed
12/5/2011	8:13:59 AM	Main Vac valve opened
12/5/2011	8:13:59 AM	Helium MFC set to  0.000000
12/5/2011	8:13:59 AM	H2 MFC set to  0.000000
12/5/2011	8:13:59 AM	BCl3 MFC set to  0.000000
12/5/2011	8:13:59 AM	PHl3 MFC set to  0.000000
12/5/2011	8:13:59 AM	SiCl4 MFC set to  0.000000
12/5/2011	8:13:59 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	8:13:59 AM	Tube furnace set to 150
12/5/2011	8:14:29 AM	H2 valve closed
12/5/2011	8:14:29 AM	BCl3 valve closed
12/5/2011	8:14:29 AM	PH3 valve closed
12/5/2011	8:14:29 AM	SiCl4 pre valve closed
12/5/2011	8:14:29 AM	SiCl4 post valve closed
12/5/2011	8:14:29 AM	Bypass valve closed
12/5/2011	8:14:29 AM	Bubbler valve closed
12/5/2011	8:14:29 AM	Helium valve opened
12/5/2011	8:14:29 AM	Main Vac valve opened
12/5/2011	8:14:29 AM	Helium MFC set to  20.000000
12/5/2011	8:14:29 AM	H2 MFC set to  0.000000
12/5/2011	8:14:29 AM	BCl3 MFC set to  0.000000
12/5/2011	8:14:29 AM	PHl3 MFC set to  0.000000
12/5/2011	8:14:29 AM	SiCl4 MFC set to  0.000000
12/5/2011	8:14:29 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	8:14:29 AM	Tube furnace set to 150
12/5/2011	8:14:59 AM	Helium valve closed
12/5/2011	8:14:59 AM	H2 valve closed
12/5/2011	8:14:59 AM	BCl3 valve closed
12/5/2011	8:14:59 AM	PH3 valve closed
12/5/2011	8:14:59 AM	SiCl4 pre valve closed
12/5/2011	8:14:59 AM	SiCl4 post valve closed
12/5/2011	8:14:59 AM	Bypass valve closed
12/5/2011	8:14:59 AM	Bubbler valve closed
12/5/2011	8:14:59 AM	Main Vac valve opened
12/5/2011	8:14:59 AM	Helium MFC set to  0.000000
12/5/2011	8:14:59 AM	H2 MFC set to  0.000000
12/5/2011	8:14:59 AM	BCl3 MFC set to  0.000000
12/5/2011	8:14:59 AM	PHl3 MFC set to  0.000000
12/5/2011	8:14:59 AM	SiCl4 MFC set to  0.000000
12/5/2011	8:14:59 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	8:14:59 AM	Tube furnace set to 150
12/5/2011	8:15:29 AM	H2 valve closed
12/5/2011	8:15:29 AM	BCl3 valve closed
12/5/2011	8:15:29 AM	PH3 valve closed
12/5/2011	8:15:29 AM	SiCl4 pre valve closed
12/5/2011	8:15:29 AM	SiCl4 post valve closed
12/5/2011	8:15:29 AM	Bypass valve closed
12/5/2011	8:15:29 AM	Bubbler valve closed
12/5/2011	8:15:29 AM	Helium valve opened
12/5/2011	8:15:29 AM	Main Vac valve opened
12/5/2011	8:15:29 AM	Helium MFC set to  20.000000
12/5/2011	8:15:29 AM	H2 MFC set to  0.000000
12/5/2011	8:15:29 AM	BCl3 MFC set to  0.000000
12/5/2011	8:15:29 AM	PHl3 MFC set to  0.000000
12/5/2011	8:15:29 AM	SiCl4 MFC set to  0.000000
12/5/2011	8:15:29 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	8:15:29 AM	Tube furnace set to 150
12/5/2011	8:15:59 AM	Helium valve closed
12/5/2011	8:15:59 AM	H2 valve closed
12/5/2011	8:16:00 AM	BCl3 valve closed
12/5/2011	8:16:00 AM	PH3 valve closed
12/5/2011	8:16:00 AM	SiCl4 pre valve closed
12/5/2011	8:16:00 AM	SiCl4 post valve closed
12/5/2011	8:16:00 AM	Bypass valve closed
12/5/2011	8:16:00 AM	Bubbler valve closed
12/5/2011	8:16:00 AM	Main Vac valve opened
12/5/2011	8:16:00 AM	Helium MFC set to  0.000000
12/5/2011	8:16:00 AM	H2 MFC set to  0.000000
12/5/2011	8:16:00 AM	BCl3 MFC set to  0.000000
12/5/2011	8:16:00 AM	PHl3 MFC set to  0.000000
12/5/2011	8:16:00 AM	SiCl4 MFC set to  0.000000
12/5/2011	8:16:00 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	8:16:00 AM	Tube furnace set to 150
12/5/2011	8:16:30 AM	H2 valve closed
12/5/2011	8:16:30 AM	BCl3 valve closed
12/5/2011	8:16:30 AM	PH3 valve closed
12/5/2011	8:16:30 AM	SiCl4 pre valve closed
12/5/2011	8:16:30 AM	SiCl4 post valve closed
12/5/2011	8:16:30 AM	Bypass valve closed
12/5/2011	8:16:30 AM	Bubbler valve closed
12/5/2011	8:16:30 AM	Helium valve opened
12/5/2011	8:16:30 AM	Main Vac valve opened
12/5/2011	8:16:30 AM	Helium MFC set to  20.000000
12/5/2011	8:16:30 AM	H2 MFC set to  0.000000
12/5/2011	8:16:30 AM	BCl3 MFC set to  0.000000
12/5/2011	8:16:30 AM	PHl3 MFC set to  0.000000
12/5/2011	8:16:30 AM	SiCl4 MFC set to  0.000000
12/5/2011	8:16:30 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	8:16:30 AM	Tube furnace set to 150
12/5/2011	8:17:00 AM	Helium valve closed
12/5/2011	8:17:00 AM	H2 valve closed
12/5/2011	8:17:00 AM	BCl3 valve closed
12/5/2011	8:17:00 AM	PH3 valve closed
12/5/2011	8:17:00 AM	SiCl4 pre valve closed
12/5/2011	8:17:00 AM	SiCl4 post valve closed
12/5/2011	8:17:00 AM	Bypass valve closed
12/5/2011	8:17:00 AM	Bubbler valve closed
12/5/2011	8:17:00 AM	Main Vac valve opened
12/5/2011	8:17:00 AM	Helium MFC set to  0.000000
12/5/2011	8:17:00 AM	H2 MFC set to  0.000000
12/5/2011	8:17:00 AM	BCl3 MFC set to  0.000000
12/5/2011	8:17:00 AM	PHl3 MFC set to  0.000000
12/5/2011	8:17:00 AM	SiCl4 MFC set to  0.000000
12/5/2011	8:17:00 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	8:17:00 AM	Tube furnace set to 150
12/5/2011	8:17:01 AM	Run finished at 8:17 AM
12/5/2011	8:20:47 AM	Recipe started at 8:20 AM
12/5/2011	8:20:47 AM	Helium valve closed
12/5/2011	8:20:47 AM	H2 valve closed
12/5/2011	8:20:47 AM	BCl3 valve closed
12/5/2011	8:20:47 AM	PH3 valve closed
12/5/2011	8:20:47 AM	SiCl4 pre valve closed
12/5/2011	8:20:47 AM	SiCl4 post valve closed
12/5/2011	8:20:47 AM	Bypass valve closed
12/5/2011	8:20:47 AM	Bubbler valve closed
12/5/2011	8:20:47 AM	Main Vac valve opened
12/5/2011	8:20:47 AM	Helium MFC set to  0.000000
12/5/2011	8:20:47 AM	H2 MFC set to  0.000000
12/5/2011	8:20:47 AM	BCl3 MFC set to  0.000000
12/5/2011	8:20:47 AM	PHl3 MFC set to  0.000000
12/5/2011	8:20:47 AM	SiCl4 MFC set to  0.000000
12/5/2011	8:20:47 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	8:20:48 AM	Tube furnace set to 150
12/5/2011	8:21:18 AM	H2 valve closed
12/5/2011	8:21:18 AM	BCl3 valve closed
12/5/2011	8:21:18 AM	PH3 valve closed
12/5/2011	8:21:18 AM	SiCl4 pre valve closed
12/5/2011	8:21:18 AM	SiCl4 post valve closed
12/5/2011	8:21:18 AM	Bypass valve closed
12/5/2011	8:21:18 AM	Bubbler valve closed
12/5/2011	8:21:18 AM	Helium valve opened
12/5/2011	8:21:18 AM	Main Vac valve opened
12/5/2011	8:21:18 AM	Helium MFC set to  20.000000
12/5/2011	8:21:18 AM	H2 MFC set to  0.000000
12/5/2011	8:21:18 AM	BCl3 MFC set to  0.000000
12/5/2011	8:21:18 AM	PHl3 MFC set to  0.000000
12/5/2011	8:21:18 AM	SiCl4 MFC set to  0.000000
12/5/2011	8:21:18 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	8:21:18 AM	Tube furnace set to 150
12/5/2011	8:21:48 AM	Helium valve closed
12/5/2011	8:21:48 AM	H2 valve closed
12/5/2011	8:21:48 AM	BCl3 valve closed
12/5/2011	8:21:48 AM	PH3 valve closed
12/5/2011	8:21:48 AM	SiCl4 pre valve closed
12/5/2011	8:21:48 AM	SiCl4 post valve closed
12/5/2011	8:21:48 AM	Bypass valve closed
12/5/2011	8:21:48 AM	Bubbler valve closed
12/5/2011	8:21:48 AM	Main Vac valve opened
12/5/2011	8:21:48 AM	Helium MFC set to  0.000000
12/5/2011	8:21:48 AM	H2 MFC set to  0.000000
12/5/2011	8:21:48 AM	BCl3 MFC set to  0.000000
12/5/2011	8:21:48 AM	PHl3 MFC set to  0.000000
12/5/2011	8:21:48 AM	SiCl4 MFC set to  0.000000
12/5/2011	8:21:48 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	8:21:48 AM	Tube furnace set to 150
12/5/2011	8:22:18 AM	H2 valve closed
12/5/2011	8:22:18 AM	BCl3 valve closed
12/5/2011	8:22:18 AM	PH3 valve closed
12/5/2011	8:22:18 AM	SiCl4 pre valve closed
12/5/2011	8:22:18 AM	SiCl4 post valve closed
12/5/2011	8:22:18 AM	Bypass valve closed
12/5/2011	8:22:18 AM	Bubbler valve closed
12/5/2011	8:22:18 AM	Helium valve opened
12/5/2011	8:22:18 AM	Main Vac valve opened
12/5/2011	8:22:18 AM	Helium MFC set to  20.000000
12/5/2011	8:22:18 AM	H2 MFC set to  0.000000
12/5/2011	8:22:18 AM	BCl3 MFC set to  0.000000
12/5/2011	8:22:18 AM	PHl3 MFC set to  0.000000
12/5/2011	8:22:18 AM	SiCl4 MFC set to  0.000000
12/5/2011	8:22:18 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	8:22:18 AM	Tube furnace set to 150
12/5/2011	8:22:48 AM	Helium valve closed
12/5/2011	8:22:48 AM	H2 valve closed
12/5/2011	8:22:48 AM	BCl3 valve closed
12/5/2011	8:22:48 AM	PH3 valve closed
12/5/2011	8:22:48 AM	SiCl4 pre valve closed
12/5/2011	8:22:48 AM	SiCl4 post valve closed
12/5/2011	8:22:48 AM	Bypass valve closed
12/5/2011	8:22:48 AM	Bubbler valve closed
12/5/2011	8:22:48 AM	Main Vac valve opened
12/5/2011	8:22:48 AM	Helium MFC set to  0.000000
12/5/2011	8:22:48 AM	H2 MFC set to  0.000000
12/5/2011	8:22:48 AM	BCl3 MFC set to  0.000000
12/5/2011	8:22:48 AM	PHl3 MFC set to  0.000000
12/5/2011	8:22:48 AM	SiCl4 MFC set to  0.000000
12/5/2011	8:22:48 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	8:22:48 AM	Tube furnace set to 150
12/5/2011	8:23:18 AM	H2 valve closed
12/5/2011	8:23:18 AM	BCl3 valve closed
12/5/2011	8:23:18 AM	PH3 valve closed
12/5/2011	8:23:18 AM	SiCl4 pre valve closed
12/5/2011	8:23:18 AM	SiCl4 post valve closed
12/5/2011	8:23:18 AM	Bypass valve closed
12/5/2011	8:23:18 AM	Bubbler valve closed
12/5/2011	8:23:18 AM	Helium valve opened
12/5/2011	8:23:18 AM	Main Vac valve opened
12/5/2011	8:23:18 AM	Helium MFC set to  20.000000
12/5/2011	8:23:18 AM	H2 MFC set to  0.000000
12/5/2011	8:23:18 AM	BCl3 MFC set to  0.000000
12/5/2011	8:23:19 AM	PHl3 MFC set to  0.000000
12/5/2011	8:23:19 AM	SiCl4 MFC set to  0.000000
12/5/2011	8:23:19 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	8:23:19 AM	Tube furnace set to 150
12/5/2011	8:23:49 AM	Helium valve closed
12/5/2011	8:23:49 AM	H2 valve closed
12/5/2011	8:23:49 AM	BCl3 valve closed
12/5/2011	8:23:49 AM	PH3 valve closed
12/5/2011	8:23:49 AM	SiCl4 pre valve closed
12/5/2011	8:23:49 AM	SiCl4 post valve closed
12/5/2011	8:23:49 AM	Bypass valve closed
12/5/2011	8:23:49 AM	Bubbler valve closed
12/5/2011	8:23:49 AM	Main Vac valve opened
12/5/2011	8:23:49 AM	Helium MFC set to  0.000000
12/5/2011	8:23:49 AM	H2 MFC set to  0.000000
12/5/2011	8:23:49 AM	BCl3 MFC set to  0.000000
12/5/2011	8:23:49 AM	PHl3 MFC set to  0.000000
12/5/2011	8:23:49 AM	SiCl4 MFC set to  0.000000
12/5/2011	8:23:49 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	8:23:49 AM	Tube furnace set to 150
12/5/2011	8:24:19 AM	H2 valve closed
12/5/2011	8:24:19 AM	BCl3 valve closed
12/5/2011	8:24:19 AM	PH3 valve closed
12/5/2011	8:24:19 AM	SiCl4 pre valve closed
12/5/2011	8:24:19 AM	SiCl4 post valve closed
12/5/2011	8:24:19 AM	Bypass valve closed
12/5/2011	8:24:19 AM	Bubbler valve closed
12/5/2011	8:24:19 AM	Helium valve opened
12/5/2011	8:24:19 AM	Main Vac valve opened
12/5/2011	8:24:19 AM	Helium MFC set to  20.000000
12/5/2011	8:24:19 AM	H2 MFC set to  0.000000
12/5/2011	8:24:19 AM	BCl3 MFC set to  0.000000
12/5/2011	8:24:19 AM	PHl3 MFC set to  0.000000
12/5/2011	8:24:19 AM	SiCl4 MFC set to  0.000000
12/5/2011	8:24:19 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	8:24:19 AM	Tube furnace set to 150
12/5/2011	8:24:49 AM	Helium valve closed
12/5/2011	8:24:49 AM	H2 valve closed
12/5/2011	8:24:49 AM	BCl3 valve closed
12/5/2011	8:24:49 AM	PH3 valve closed
12/5/2011	8:24:49 AM	SiCl4 pre valve closed
12/5/2011	8:24:49 AM	SiCl4 post valve closed
12/5/2011	8:24:49 AM	Bypass valve closed
12/5/2011	8:24:49 AM	Bubbler valve closed
12/5/2011	8:24:49 AM	Main Vac valve opened
12/5/2011	8:24:49 AM	Helium MFC set to  0.000000
12/5/2011	8:24:49 AM	H2 MFC set to  0.000000
12/5/2011	8:24:49 AM	BCl3 MFC set to  0.000000
12/5/2011	8:24:49 AM	PHl3 MFC set to  0.000000
12/5/2011	8:24:49 AM	SiCl4 MFC set to  0.000000
12/5/2011	8:24:49 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	8:24:49 AM	Tube furnace set to 150
12/5/2011	8:25:19 AM	H2 valve closed
12/5/2011	8:25:19 AM	BCl3 valve closed
12/5/2011	8:25:19 AM	PH3 valve closed
12/5/2011	8:25:19 AM	SiCl4 pre valve closed
12/5/2011	8:25:19 AM	SiCl4 post valve closed
12/5/2011	8:25:19 AM	Bypass valve closed
12/5/2011	8:25:19 AM	Bubbler valve closed
12/5/2011	8:25:19 AM	Helium valve opened
12/5/2011	8:25:19 AM	Main Vac valve opened
12/5/2011	8:25:19 AM	Helium MFC set to  20.000000
12/5/2011	8:25:19 AM	H2 MFC set to  0.000000
12/5/2011	8:25:19 AM	BCl3 MFC set to  0.000000
12/5/2011	8:25:19 AM	PHl3 MFC set to  0.000000
12/5/2011	8:25:19 AM	SiCl4 MFC set to  0.000000
12/5/2011	8:25:19 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	8:25:19 AM	Tube furnace set to 150
12/5/2011	8:25:49 AM	Helium valve closed
12/5/2011	8:25:50 AM	H2 valve closed
12/5/2011	8:25:50 AM	BCl3 valve closed
12/5/2011	8:25:50 AM	PH3 valve closed
12/5/2011	8:25:50 AM	SiCl4 pre valve closed
12/5/2011	8:25:50 AM	SiCl4 post valve closed
12/5/2011	8:25:50 AM	Bypass valve closed
12/5/2011	8:25:50 AM	Bubbler valve closed
12/5/2011	8:25:50 AM	Main Vac valve opened
12/5/2011	8:25:50 AM	Helium MFC set to  0.000000
12/5/2011	8:25:50 AM	H2 MFC set to  0.000000
12/5/2011	8:25:50 AM	BCl3 MFC set to  0.000000
12/5/2011	8:25:50 AM	PHl3 MFC set to  0.000000
12/5/2011	8:25:50 AM	SiCl4 MFC set to  0.000000
12/5/2011	8:25:50 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	8:25:50 AM	Tube furnace set to 150
12/5/2011	8:26:20 AM	H2 valve closed
12/5/2011	8:26:20 AM	BCl3 valve closed
12/5/2011	8:26:20 AM	PH3 valve closed
12/5/2011	8:26:20 AM	SiCl4 pre valve closed
12/5/2011	8:26:20 AM	SiCl4 post valve closed
12/5/2011	8:26:20 AM	Bypass valve closed
12/5/2011	8:26:20 AM	Bubbler valve closed
12/5/2011	8:26:20 AM	Helium valve opened
12/5/2011	8:26:20 AM	Main Vac valve opened
12/5/2011	8:26:20 AM	Helium MFC set to  20.000000
12/5/2011	8:26:20 AM	H2 MFC set to  0.000000
12/5/2011	8:26:20 AM	BCl3 MFC set to  0.000000
12/5/2011	8:26:20 AM	PHl3 MFC set to  0.000000
12/5/2011	8:26:20 AM	SiCl4 MFC set to  0.000000
12/5/2011	8:26:20 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	8:26:20 AM	Tube furnace set to 150
12/5/2011	8:26:50 AM	Helium valve closed
12/5/2011	8:26:50 AM	H2 valve closed
12/5/2011	8:26:50 AM	BCl3 valve closed
12/5/2011	8:26:50 AM	PH3 valve closed
12/5/2011	8:26:50 AM	SiCl4 pre valve closed
12/5/2011	8:26:50 AM	SiCl4 post valve closed
12/5/2011	8:26:50 AM	Bypass valve closed
12/5/2011	8:26:50 AM	Bubbler valve closed
12/5/2011	8:26:50 AM	Main Vac valve opened
12/5/2011	8:26:50 AM	Helium MFC set to  0.000000
12/5/2011	8:26:50 AM	H2 MFC set to  0.000000
12/5/2011	8:26:50 AM	BCl3 MFC set to  0.000000
12/5/2011	8:26:50 AM	PHl3 MFC set to  0.000000
12/5/2011	8:26:50 AM	SiCl4 MFC set to  0.000000
12/5/2011	8:26:50 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	8:26:50 AM	Tube furnace set to 150
12/5/2011	8:27:20 AM	H2 valve closed
12/5/2011	8:27:20 AM	BCl3 valve closed
12/5/2011	8:27:20 AM	PH3 valve closed
12/5/2011	8:27:20 AM	SiCl4 pre valve closed
12/5/2011	8:27:20 AM	SiCl4 post valve closed
12/5/2011	8:27:20 AM	Bypass valve closed
12/5/2011	8:27:20 AM	Bubbler valve closed
12/5/2011	8:27:20 AM	Helium valve opened
12/5/2011	8:27:20 AM	Main Vac valve opened
12/5/2011	8:27:20 AM	Helium MFC set to  20.000000
12/5/2011	8:27:20 AM	H2 MFC set to  0.000000
12/5/2011	8:27:20 AM	BCl3 MFC set to  0.000000
12/5/2011	8:27:20 AM	PHl3 MFC set to  0.000000
12/5/2011	8:27:20 AM	SiCl4 MFC set to  0.000000
12/5/2011	8:27:20 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	8:27:20 AM	Tube furnace set to 150
12/5/2011	8:27:50 AM	Helium valve closed
12/5/2011	8:27:50 AM	H2 valve closed
12/5/2011	8:27:50 AM	BCl3 valve closed
12/5/2011	8:27:50 AM	PH3 valve closed
12/5/2011	8:27:50 AM	SiCl4 pre valve closed
12/5/2011	8:27:50 AM	SiCl4 post valve closed
12/5/2011	8:27:50 AM	Bypass valve closed
12/5/2011	8:27:50 AM	Bubbler valve closed
12/5/2011	8:27:50 AM	Main Vac valve opened
12/5/2011	8:27:50 AM	Helium MFC set to  0.000000
12/5/2011	8:27:50 AM	H2 MFC set to  0.000000
12/5/2011	8:27:50 AM	BCl3 MFC set to  0.000000
12/5/2011	8:27:50 AM	PHl3 MFC set to  0.000000
12/5/2011	8:27:50 AM	SiCl4 MFC set to  0.000000
12/5/2011	8:27:50 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	8:27:50 AM	Tube furnace set to 150
12/5/2011	8:28:21 AM	H2 valve closed
12/5/2011	8:28:21 AM	BCl3 valve closed
12/5/2011	8:28:21 AM	PH3 valve closed
12/5/2011	8:28:21 AM	SiCl4 pre valve closed
12/5/2011	8:28:21 AM	SiCl4 post valve closed
12/5/2011	8:28:21 AM	Bypass valve closed
12/5/2011	8:28:21 AM	Bubbler valve closed
12/5/2011	8:28:21 AM	Helium valve opened
12/5/2011	8:28:21 AM	Main Vac valve opened
12/5/2011	8:28:21 AM	Helium MFC set to  20.000000
12/5/2011	8:28:21 AM	H2 MFC set to  0.000000
12/5/2011	8:28:21 AM	BCl3 MFC set to  0.000000
12/5/2011	8:28:21 AM	PHl3 MFC set to  0.000000
12/5/2011	8:28:21 AM	SiCl4 MFC set to  0.000000
12/5/2011	8:28:21 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	8:28:21 AM	Tube furnace set to 150
12/5/2011	8:28:51 AM	Helium valve closed
12/5/2011	8:28:51 AM	H2 valve closed
12/5/2011	8:28:51 AM	BCl3 valve closed
12/5/2011	8:28:51 AM	PH3 valve closed
12/5/2011	8:28:51 AM	SiCl4 pre valve closed
12/5/2011	8:28:51 AM	SiCl4 post valve closed
12/5/2011	8:28:51 AM	Bypass valve closed
12/5/2011	8:28:51 AM	Bubbler valve closed
12/5/2011	8:28:51 AM	Main Vac valve opened
12/5/2011	8:28:51 AM	Helium MFC set to  0.000000
12/5/2011	8:28:51 AM	H2 MFC set to  0.000000
12/5/2011	8:28:51 AM	BCl3 MFC set to  0.000000
12/5/2011	8:28:51 AM	PHl3 MFC set to  0.000000
12/5/2011	8:28:51 AM	SiCl4 MFC set to  0.000000
12/5/2011	8:28:51 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	8:28:51 AM	Tube furnace set to 150
12/5/2011	8:29:21 AM	H2 valve closed
12/5/2011	8:29:21 AM	BCl3 valve closed
12/5/2011	8:29:21 AM	PH3 valve closed
12/5/2011	8:29:21 AM	SiCl4 pre valve closed
12/5/2011	8:29:21 AM	SiCl4 post valve closed
12/5/2011	8:29:21 AM	Bypass valve closed
12/5/2011	8:29:21 AM	Bubbler valve closed
12/5/2011	8:29:21 AM	Helium valve opened
12/5/2011	8:29:21 AM	Main Vac valve opened
12/5/2011	8:29:21 AM	Helium MFC set to  20.000000
12/5/2011	8:29:21 AM	H2 MFC set to  0.000000
12/5/2011	8:29:21 AM	BCl3 MFC set to  0.000000
12/5/2011	8:29:21 AM	PHl3 MFC set to  0.000000
12/5/2011	8:29:21 AM	SiCl4 MFC set to  0.000000
12/5/2011	8:29:21 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	8:29:21 AM	Tube furnace set to 150
12/5/2011	8:29:51 AM	Helium valve closed
12/5/2011	8:29:51 AM	H2 valve closed
12/5/2011	8:29:51 AM	BCl3 valve closed
12/5/2011	8:29:51 AM	PH3 valve closed
12/5/2011	8:29:51 AM	SiCl4 pre valve closed
12/5/2011	8:29:51 AM	SiCl4 post valve closed
12/5/2011	8:29:51 AM	Bypass valve closed
12/5/2011	8:29:51 AM	Bubbler valve closed
12/5/2011	8:29:51 AM	Main Vac valve opened
12/5/2011	8:29:51 AM	Helium MFC set to  0.000000
12/5/2011	8:29:51 AM	H2 MFC set to  0.000000
12/5/2011	8:29:51 AM	BCl3 MFC set to  0.000000
12/5/2011	8:29:51 AM	PHl3 MFC set to  0.000000
12/5/2011	8:29:51 AM	SiCl4 MFC set to  0.000000
12/5/2011	8:29:51 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	8:29:51 AM	Tube furnace set to 150
12/5/2011	8:30:21 AM	H2 valve closed
12/5/2011	8:30:21 AM	BCl3 valve closed
12/5/2011	8:30:21 AM	PH3 valve closed
12/5/2011	8:30:21 AM	SiCl4 pre valve closed
12/5/2011	8:30:21 AM	SiCl4 post valve closed
12/5/2011	8:30:21 AM	Bypass valve closed
12/5/2011	8:30:21 AM	Bubbler valve closed
12/5/2011	8:30:21 AM	Helium valve opened
12/5/2011	8:30:21 AM	Main Vac valve opened
12/5/2011	8:30:21 AM	Helium MFC set to  20.000000
12/5/2011	8:30:21 AM	H2 MFC set to  0.000000
12/5/2011	8:30:21 AM	BCl3 MFC set to  0.000000
12/5/2011	8:30:21 AM	PHl3 MFC set to  0.000000
12/5/2011	8:30:21 AM	SiCl4 MFC set to  0.000000
12/5/2011	8:30:21 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	8:30:22 AM	Tube furnace set to 150
12/5/2011	8:30:52 AM	Helium valve closed
12/5/2011	8:30:52 AM	H2 valve closed
12/5/2011	8:30:52 AM	BCl3 valve closed
12/5/2011	8:30:52 AM	PH3 valve closed
12/5/2011	8:30:52 AM	SiCl4 pre valve closed
12/5/2011	8:30:52 AM	SiCl4 post valve closed
12/5/2011	8:30:52 AM	Bypass valve closed
12/5/2011	8:30:52 AM	Bubbler valve closed
12/5/2011	8:30:52 AM	Main Vac valve opened
12/5/2011	8:30:52 AM	Helium MFC set to  0.000000
12/5/2011	8:30:52 AM	H2 MFC set to  0.000000
12/5/2011	8:30:52 AM	BCl3 MFC set to  0.000000
12/5/2011	8:30:52 AM	PHl3 MFC set to  0.000000
12/5/2011	8:30:52 AM	SiCl4 MFC set to  0.000000
12/5/2011	8:30:52 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	8:30:52 AM	Tube furnace set to 150
12/5/2011	8:30:53 AM	Run finished at 8:30 AM
12/5/2011	8:42:15 AM	Main Vac valve closed
12/5/2011	8:42:46 AM	Main Vac valve opened
12/5/2011	8:50:08 AM	Recipe started at 8:50 AM
12/5/2011	8:50:08 AM	Helium valve closed
12/5/2011	8:50:08 AM	H2 valve closed
12/5/2011	8:50:08 AM	BCl3 valve closed
12/5/2011	8:50:08 AM	PH3 valve closed
12/5/2011	8:50:08 AM	SiCl4 pre valve closed
12/5/2011	8:50:08 AM	SiCl4 post valve closed
12/5/2011	8:50:08 AM	Main Vac valve closed
12/5/2011	8:50:08 AM	Bypass valve closed
12/5/2011	8:50:08 AM	Bubbler valve closed
12/5/2011	8:50:08 AM	Helium MFC set to  0.000000
12/5/2011	8:50:08 AM	H2 MFC set to  0.000000
12/5/2011	8:50:08 AM	BCl3 MFC set to  0.000000
12/5/2011	8:50:08 AM	PHl3 MFC set to  0.000000
12/5/2011	8:50:08 AM	SiCl4 MFC set to  0.000000
12/5/2011	8:50:08 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	8:50:08 AM	Tube furnace set to 0
12/5/2011	8:50:11 AM	Helium valve closed
12/5/2011	8:50:11 AM	BCl3 valve closed
12/5/2011	8:50:11 AM	PH3 valve closed
12/5/2011	8:50:11 AM	SiCl4 pre valve closed
12/5/2011	8:50:11 AM	SiCl4 post valve closed
12/5/2011	8:50:11 AM	Main Vac valve closed
12/5/2011	8:50:11 AM	Bypass valve closed
12/5/2011	8:50:11 AM	Bubbler valve closed
12/5/2011	8:50:11 AM	H2 valve opened
12/5/2011	8:50:11 AM	Helium MFC set to  0.000000
12/5/2011	8:50:11 AM	H2 MFC set to  500.000000
12/5/2011	8:50:11 AM	BCl3 MFC set to  0.000000
12/5/2011	8:50:11 AM	PHl3 MFC set to  0.000000
12/5/2011	8:50:11 AM	SiCl4 MFC set to  0.000000
12/5/2011	8:50:11 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	8:50:11 AM	Tube furnace set to 0
12/5/2011	8:51:16 AM	Helium valve closed
12/5/2011	8:51:16 AM	BCl3 valve closed
12/5/2011	8:51:16 AM	PH3 valve closed
12/5/2011	8:51:16 AM	SiCl4 pre valve closed
12/5/2011	8:51:16 AM	SiCl4 post valve closed
12/5/2011	8:51:16 AM	Main Vac valve closed
12/5/2011	8:51:16 AM	Bypass valve closed
12/5/2011	8:51:16 AM	H2 valve opened
12/5/2011	8:51:16 AM	Bubbler valve opened
12/5/2011	8:51:16 AM	Helium MFC set to  0.000000
12/5/2011	8:51:16 AM	H2 MFC set to  500.000000
12/5/2011	8:51:16 AM	BCl3 MFC set to  0.000000
12/5/2011	8:51:16 AM	PHl3 MFC set to  0.000000
12/5/2011	8:51:16 AM	SiCl4 MFC set to  0.000000
12/5/2011	8:51:16 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	8:51:16 AM	Tube furnace set to 0
12/5/2011	8:51:17 AM	Helium valve closed
12/5/2011	8:51:17 AM	BCl3 valve closed
12/5/2011	8:51:17 AM	PH3 valve closed
12/5/2011	8:51:17 AM	SiCl4 pre valve closed
12/5/2011	8:51:17 AM	SiCl4 post valve closed
12/5/2011	8:51:17 AM	Main Vac valve closed
12/5/2011	8:51:17 AM	Bypass valve closed
12/5/2011	8:51:17 AM	H2 valve opened
12/5/2011	8:51:17 AM	Bubbler valve opened
12/5/2011	8:51:17 AM	Helium MFC set to  0.000000
12/5/2011	8:51:17 AM	H2 MFC set to  500.000000
12/5/2011	8:51:17 AM	BCl3 MFC set to  0.000000
12/5/2011	8:51:17 AM	PHl3 MFC set to  0.000000
12/5/2011	8:51:17 AM	SiCl4 MFC set to  0.000000
12/5/2011	8:51:17 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	8:51:17 AM	Tube furnace set to 1000
12/5/2011	9:16:17 AM	Helium valve closed
12/5/2011	9:16:17 AM	PH3 valve closed
12/5/2011	9:16:17 AM	Main Vac valve closed
12/5/2011	9:16:17 AM	Bypass valve closed
12/5/2011	9:16:17 AM	H2 valve opened
12/5/2011	9:16:17 AM	BCl3 valve opened
12/5/2011	9:16:17 AM	SiCl4 pre valve opened
12/5/2011	9:16:17 AM	SiCl4 post valve opened
12/5/2011	9:16:17 AM	Bubbler valve opened
12/5/2011	9:16:17 AM	Helium MFC set to  0.000000
12/5/2011	9:16:17 AM	H2 MFC set to  500.000000
12/5/2011	9:16:17 AM	BCl3 MFC set to  1.000000
12/5/2011	9:16:17 AM	PHl3 MFC set to  0.000000
12/5/2011	9:16:17 AM	SiCl4 MFC set to  26.000000
12/5/2011	9:16:17 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	9:16:17 AM	Tube furnace set to 1000
12/5/2011	9:36:17 AM	Helium valve closed
12/5/2011	9:36:17 AM	BCl3 valve closed
12/5/2011	9:36:17 AM	PH3 valve closed
12/5/2011	9:36:17 AM	SiCl4 pre valve closed
12/5/2011	9:36:17 AM	SiCl4 post valve closed
12/5/2011	9:36:17 AM	Main Vac valve closed
12/5/2011	9:36:17 AM	Bypass valve closed
12/5/2011	9:36:17 AM	H2 valve opened
12/5/2011	9:36:17 AM	Bubbler valve opened
12/5/2011	9:36:17 AM	Helium MFC set to  0.000000
12/5/2011	9:36:17 AM	H2 MFC set to  500.000000
12/5/2011	9:36:17 AM	BCl3 MFC set to  0.000000
12/5/2011	9:36:17 AM	PHl3 MFC set to  0.000000
12/5/2011	9:36:17 AM	SiCl4 MFC set to  0.000000
12/5/2011	9:36:17 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	9:36:18 AM	Tube furnace set to 750
12/5/2011	9:46:18 AM	H2 valve closed
12/5/2011	9:46:18 AM	BCl3 valve closed
12/5/2011	9:46:18 AM	PH3 valve closed
12/5/2011	9:46:18 AM	SiCl4 pre valve closed
12/5/2011	9:46:18 AM	SiCl4 post valve closed
12/5/2011	9:46:18 AM	Main Vac valve closed
12/5/2011	9:46:18 AM	Bypass valve closed
12/5/2011	9:46:18 AM	Helium valve opened
12/5/2011	9:46:18 AM	Bubbler valve opened
12/5/2011	9:46:18 AM	Helium MFC set to  500.000000
12/5/2011	9:46:18 AM	H2 MFC set to  0.000000
12/5/2011	9:46:18 AM	BCl3 MFC set to  0.000000
12/5/2011	9:46:18 AM	PHl3 MFC set to  0.000000
12/5/2011	9:46:18 AM	SiCl4 MFC set to  0.000000
12/5/2011	9:46:18 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	9:46:18 AM	Tube furnace set to 0
12/5/2011	10:06:18 AM	Helium valve closed
12/5/2011	10:06:18 AM	H2 valve closed
12/5/2011	10:06:18 AM	BCl3 valve closed
12/5/2011	10:06:18 AM	PH3 valve closed
12/5/2011	10:06:18 AM	SiCl4 pre valve closed
12/5/2011	10:06:18 AM	SiCl4 post valve closed
12/5/2011	10:06:18 AM	Main Vac valve closed
12/5/2011	10:06:18 AM	Bypass valve closed
12/5/2011	10:06:18 AM	Bubbler valve closed
12/5/2011	10:06:18 AM	Helium MFC set to  0.000000
12/5/2011	10:06:18 AM	H2 MFC set to  0.000000
12/5/2011	10:06:18 AM	BCl3 MFC set to  0.000000
12/5/2011	10:06:18 AM	PHl3 MFC set to  0.000000
12/5/2011	10:06:18 AM	SiCl4 MFC set to  0.000000
12/5/2011	10:06:18 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	10:06:18 AM	Tube furnace set to 0
12/5/2011	10:06:19 AM	Run finished at 10:06 AM
12/5/2011	10:20:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/5/2011	10:20:59 AM	Recipe started at 10:20 AM
12/5/2011	10:20:59 AM	Helium valve closed
12/5/2011	10:20:59 AM	H2 valve closed
12/5/2011	10:20:59 AM	BCl3 valve closed
12/5/2011	10:20:59 AM	PH3 valve closed
12/5/2011	10:20:59 AM	SiCl4 pre valve closed
12/5/2011	10:20:59 AM	SiCl4 post valve closed
12/5/2011	10:20:59 AM	Main Vac valve closed
12/5/2011	10:20:59 AM	Bubbler valve closed
12/5/2011	10:20:59 AM	Bypass valve opened
12/5/2011	10:20:59 AM	Helium MFC set to  0.000000
12/5/2011	10:20:59 AM	H2 MFC set to  0.000000
12/5/2011	10:20:59 AM	BCl3 MFC set to  0.000000
12/5/2011	10:20:59 AM	PHl3 MFC set to  0.000000
12/5/2011	10:20:59 AM	SiCl4 MFC set to  0.000000
12/5/2011	10:20:59 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	10:20:59 AM	Tube furnace set to 0
12/5/2011	10:22:17 AM	Helium valve closed
12/5/2011	10:22:17 AM	H2 valve closed
12/5/2011	10:22:17 AM	BCl3 valve closed
12/5/2011	10:22:17 AM	PH3 valve closed
12/5/2011	10:22:17 AM	SiCl4 pre valve closed
12/5/2011	10:22:17 AM	SiCl4 post valve closed
12/5/2011	10:22:17 AM	Main Vac valve closed
12/5/2011	10:22:17 AM	Bubbler valve closed
12/5/2011	10:22:17 AM	Bypass valve opened
12/5/2011	10:22:17 AM	Helium MFC set to  0.000000
12/5/2011	10:22:17 AM	H2 MFC set to  0.000000
12/5/2011	10:22:17 AM	BCl3 MFC set to  0.000000
12/5/2011	10:22:17 AM	PHl3 MFC set to  0.000000
12/5/2011	10:22:17 AM	SiCl4 MFC set to  0.000000
12/5/2011	10:22:17 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	10:22:17 AM	Tube furnace set to 0
12/5/2011	10:22:26 AM	Helium valve closed
12/5/2011	10:22:26 AM	H2 valve closed
12/5/2011	10:22:26 AM	BCl3 valve closed
12/5/2011	10:22:26 AM	PH3 valve closed
12/5/2011	10:22:26 AM	SiCl4 pre valve closed
12/5/2011	10:22:26 AM	SiCl4 post valve closed
12/5/2011	10:22:26 AM	Bypass valve closed
12/5/2011	10:22:26 AM	Bubbler valve closed
12/5/2011	10:22:26 AM	Main Vac valve opened
12/5/2011	10:22:26 AM	Helium MFC set to  0.000000
12/5/2011	10:22:26 AM	H2 MFC set to  0.000000
12/5/2011	10:22:26 AM	BCl3 MFC set to  0.000000
12/5/2011	10:22:26 AM	PHl3 MFC set to  0.000000
12/5/2011	10:22:26 AM	SiCl4 MFC set to  0.000000
12/5/2011	10:22:26 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	10:22:26 AM	Tube furnace set to 0
12/5/2011	10:22:27 AM	Run finished at 10:22 AM
12/5/2011	10:22:27 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/5/2011	10:41:47 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/5/2011	10:42:00 AM	Recipe started at 10:41 AM
12/5/2011	10:42:00 AM	Helium valve closed
12/5/2011	10:42:00 AM	H2 valve closed
12/5/2011	10:42:00 AM	BCl3 valve closed
12/5/2011	10:42:00 AM	PH3 valve closed
12/5/2011	10:42:00 AM	SiCl4 pre valve closed
12/5/2011	10:42:00 AM	SiCl4 post valve closed
12/5/2011	10:42:00 AM	Main Vac valve closed
12/5/2011	10:42:00 AM	Bubbler valve closed
12/5/2011	10:42:00 AM	Bypass valve opened
12/5/2011	10:42:00 AM	Helium MFC set to  0.000000
12/5/2011	10:42:00 AM	H2 MFC set to  0.000000
12/5/2011	10:42:00 AM	BCl3 MFC set to  0.000000
12/5/2011	10:42:00 AM	PHl3 MFC set to  0.000000
12/5/2011	10:42:00 AM	SiCl4 MFC set to  0.000000
12/5/2011	10:42:00 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	10:42:00 AM	Tube furnace set to 0
12/5/2011	10:42:02 AM	Helium valve closed
12/5/2011	10:42:02 AM	H2 valve closed
12/5/2011	10:42:02 AM	BCl3 valve closed
12/5/2011	10:42:02 AM	PH3 valve closed
12/5/2011	10:42:02 AM	SiCl4 pre valve closed
12/5/2011	10:42:02 AM	SiCl4 post valve closed
12/5/2011	10:42:02 AM	Main Vac valve closed
12/5/2011	10:42:02 AM	Bubbler valve closed
12/5/2011	10:42:02 AM	Bypass valve opened
12/5/2011	10:42:02 AM	Helium MFC set to  0.000000
12/5/2011	10:42:02 AM	H2 MFC set to  0.000000
12/5/2011	10:42:02 AM	BCl3 MFC set to  0.000000
12/5/2011	10:42:02 AM	PHl3 MFC set to  0.000000
12/5/2011	10:42:02 AM	SiCl4 MFC set to  0.000000
12/5/2011	10:42:02 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	10:42:02 AM	Tube furnace set to 0
12/5/2011	10:42:08 AM	Helium valve closed
12/5/2011	10:42:08 AM	H2 valve closed
12/5/2011	10:42:09 AM	BCl3 valve closed
12/5/2011	10:42:09 AM	PH3 valve closed
12/5/2011	10:42:09 AM	SiCl4 pre valve closed
12/5/2011	10:42:09 AM	SiCl4 post valve closed
12/5/2011	10:42:09 AM	Bypass valve closed
12/5/2011	10:42:09 AM	Bubbler valve closed
12/5/2011	10:42:09 AM	Main Vac valve opened
12/5/2011	10:42:09 AM	Helium MFC set to  0.000000
12/5/2011	10:42:09 AM	H2 MFC set to  0.000000
12/5/2011	10:42:09 AM	BCl3 MFC set to  0.000000
12/5/2011	10:42:09 AM	PHl3 MFC set to  0.000000
12/5/2011	10:42:09 AM	SiCl4 MFC set to  0.000000
12/5/2011	10:42:09 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	10:42:09 AM	Tube furnace set to 0
12/5/2011	10:42:16 AM	H2 valve closed
12/5/2011	10:42:16 AM	BCl3 valve closed
12/5/2011	10:42:16 AM	PH3 valve closed
12/5/2011	10:42:16 AM	SiCl4 pre valve closed
12/5/2011	10:42:16 AM	SiCl4 post valve closed
12/5/2011	10:42:16 AM	Bypass valve closed
12/5/2011	10:42:16 AM	Bubbler valve closed
12/5/2011	10:42:16 AM	Helium valve opened
12/5/2011	10:42:16 AM	Main Vac valve opened
12/5/2011	10:42:16 AM	Helium MFC set to  20.000000
12/5/2011	10:42:16 AM	H2 MFC set to  0.000000
12/5/2011	10:42:16 AM	BCl3 MFC set to  0.000000
12/5/2011	10:42:16 AM	PHl3 MFC set to  0.000000
12/5/2011	10:42:16 AM	SiCl4 MFC set to  0.000000
12/5/2011	10:42:16 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	10:42:16 AM	Tube furnace set to 0
12/5/2011	10:42:46 AM	Helium valve closed
12/5/2011	10:42:46 AM	H2 valve closed
12/5/2011	10:42:46 AM	BCl3 valve closed
12/5/2011	10:42:46 AM	PH3 valve closed
12/5/2011	10:42:46 AM	SiCl4 pre valve closed
12/5/2011	10:42:46 AM	SiCl4 post valve closed
12/5/2011	10:42:46 AM	Bypass valve closed
12/5/2011	10:42:46 AM	Bubbler valve closed
12/5/2011	10:42:46 AM	Main Vac valve opened
12/5/2011	10:42:46 AM	Helium MFC set to  0.000000
12/5/2011	10:42:46 AM	H2 MFC set to  0.000000
12/5/2011	10:42:46 AM	BCl3 MFC set to  0.000000
12/5/2011	10:42:46 AM	PHl3 MFC set to  0.000000
12/5/2011	10:42:46 AM	SiCl4 MFC set to  0.000000
12/5/2011	10:42:46 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	10:42:46 AM	Tube furnace set to 0
12/5/2011	10:43:16 AM	H2 valve closed
12/5/2011	10:43:16 AM	BCl3 valve closed
12/5/2011	10:43:16 AM	PH3 valve closed
12/5/2011	10:43:16 AM	SiCl4 pre valve closed
12/5/2011	10:43:16 AM	SiCl4 post valve closed
12/5/2011	10:43:16 AM	Bypass valve closed
12/5/2011	10:43:16 AM	Bubbler valve closed
12/5/2011	10:43:16 AM	Helium valve opened
12/5/2011	10:43:16 AM	Main Vac valve opened
12/5/2011	10:43:16 AM	Helium MFC set to  20.000000
12/5/2011	10:43:16 AM	H2 MFC set to  0.000000
12/5/2011	10:43:16 AM	BCl3 MFC set to  0.000000
12/5/2011	10:43:16 AM	PHl3 MFC set to  0.000000
12/5/2011	10:43:16 AM	SiCl4 MFC set to  0.000000
12/5/2011	10:43:16 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	10:43:16 AM	Tube furnace set to 0
12/5/2011	10:43:46 AM	Helium valve closed
12/5/2011	10:43:46 AM	H2 valve closed
12/5/2011	10:43:46 AM	BCl3 valve closed
12/5/2011	10:43:46 AM	PH3 valve closed
12/5/2011	10:43:46 AM	SiCl4 pre valve closed
12/5/2011	10:43:46 AM	SiCl4 post valve closed
12/5/2011	10:43:46 AM	Bypass valve closed
12/5/2011	10:43:46 AM	Bubbler valve closed
12/5/2011	10:43:46 AM	Main Vac valve opened
12/5/2011	10:43:46 AM	Helium MFC set to  0.000000
12/5/2011	10:43:46 AM	H2 MFC set to  0.000000
12/5/2011	10:43:46 AM	BCl3 MFC set to  0.000000
12/5/2011	10:43:46 AM	PHl3 MFC set to  0.000000
12/5/2011	10:43:46 AM	SiCl4 MFC set to  0.000000
12/5/2011	10:43:46 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	10:43:47 AM	Tube furnace set to 0
12/5/2011	10:44:17 AM	H2 valve closed
12/5/2011	10:44:17 AM	BCl3 valve closed
12/5/2011	10:44:17 AM	PH3 valve closed
12/5/2011	10:44:17 AM	SiCl4 pre valve closed
12/5/2011	10:44:17 AM	SiCl4 post valve closed
12/5/2011	10:44:17 AM	Bypass valve closed
12/5/2011	10:44:17 AM	Bubbler valve closed
12/5/2011	10:44:17 AM	Helium valve opened
12/5/2011	10:44:17 AM	Main Vac valve opened
12/5/2011	10:44:17 AM	Helium MFC set to  20.000000
12/5/2011	10:44:17 AM	H2 MFC set to  0.000000
12/5/2011	10:44:17 AM	BCl3 MFC set to  0.000000
12/5/2011	10:44:17 AM	PHl3 MFC set to  0.000000
12/5/2011	10:44:17 AM	SiCl4 MFC set to  0.000000
12/5/2011	10:44:17 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	10:44:17 AM	Tube furnace set to 0
12/5/2011	10:44:47 AM	Helium valve closed
12/5/2011	10:44:47 AM	H2 valve closed
12/5/2011	10:44:47 AM	BCl3 valve closed
12/5/2011	10:44:47 AM	PH3 valve closed
12/5/2011	10:44:47 AM	SiCl4 pre valve closed
12/5/2011	10:44:47 AM	SiCl4 post valve closed
12/5/2011	10:44:47 AM	Bypass valve closed
12/5/2011	10:44:47 AM	Bubbler valve closed
12/5/2011	10:44:47 AM	Main Vac valve opened
12/5/2011	10:44:47 AM	Helium MFC set to  0.000000
12/5/2011	10:44:47 AM	H2 MFC set to  0.000000
12/5/2011	10:44:47 AM	BCl3 MFC set to  0.000000
12/5/2011	10:44:47 AM	PHl3 MFC set to  0.000000
12/5/2011	10:44:47 AM	SiCl4 MFC set to  0.000000
12/5/2011	10:44:47 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	10:44:47 AM	Tube furnace set to 0
12/5/2011	10:45:17 AM	H2 valve closed
12/5/2011	10:45:17 AM	BCl3 valve closed
12/5/2011	10:45:17 AM	PH3 valve closed
12/5/2011	10:45:17 AM	SiCl4 pre valve closed
12/5/2011	10:45:17 AM	SiCl4 post valve closed
12/5/2011	10:45:17 AM	Bypass valve closed
12/5/2011	10:45:17 AM	Bubbler valve closed
12/5/2011	10:45:17 AM	Helium valve opened
12/5/2011	10:45:17 AM	Main Vac valve opened
12/5/2011	10:45:17 AM	Helium MFC set to  20.000000
12/5/2011	10:45:17 AM	H2 MFC set to  0.000000
12/5/2011	10:45:17 AM	BCl3 MFC set to  0.000000
12/5/2011	10:45:17 AM	PHl3 MFC set to  0.000000
12/5/2011	10:45:17 AM	SiCl4 MFC set to  0.000000
12/5/2011	10:45:17 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	10:45:17 AM	Tube furnace set to 0
12/5/2011	10:45:47 AM	Helium valve closed
12/5/2011	10:45:47 AM	H2 valve closed
12/5/2011	10:45:47 AM	BCl3 valve closed
12/5/2011	10:45:47 AM	PH3 valve closed
12/5/2011	10:45:47 AM	SiCl4 pre valve closed
12/5/2011	10:45:47 AM	SiCl4 post valve closed
12/5/2011	10:45:47 AM	Bypass valve closed
12/5/2011	10:45:47 AM	Bubbler valve closed
12/5/2011	10:45:47 AM	Main Vac valve opened
12/5/2011	10:45:47 AM	Helium MFC set to  0.000000
12/5/2011	10:45:47 AM	H2 MFC set to  0.000000
12/5/2011	10:45:47 AM	BCl3 MFC set to  0.000000
12/5/2011	10:45:47 AM	PHl3 MFC set to  0.000000
12/5/2011	10:45:47 AM	SiCl4 MFC set to  0.000000
12/5/2011	10:45:47 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	10:45:47 AM	Tube furnace set to 0
12/5/2011	10:46:17 AM	H2 valve closed
12/5/2011	10:46:17 AM	BCl3 valve closed
12/5/2011	10:46:17 AM	PH3 valve closed
12/5/2011	10:46:17 AM	SiCl4 pre valve closed
12/5/2011	10:46:17 AM	SiCl4 post valve closed
12/5/2011	10:46:17 AM	Bypass valve closed
12/5/2011	10:46:17 AM	Bubbler valve closed
12/5/2011	10:46:17 AM	Helium valve opened
12/5/2011	10:46:17 AM	Main Vac valve opened
12/5/2011	10:46:17 AM	Helium MFC set to  20.000000
12/5/2011	10:46:17 AM	H2 MFC set to  0.000000
12/5/2011	10:46:17 AM	BCl3 MFC set to  0.000000
12/5/2011	10:46:17 AM	PHl3 MFC set to  0.000000
12/5/2011	10:46:17 AM	SiCl4 MFC set to  0.000000
12/5/2011	10:46:17 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	10:46:18 AM	Tube furnace set to 0
12/5/2011	10:46:48 AM	Helium valve closed
12/5/2011	10:46:48 AM	H2 valve closed
12/5/2011	10:46:48 AM	BCl3 valve closed
12/5/2011	10:46:48 AM	PH3 valve closed
12/5/2011	10:46:48 AM	SiCl4 pre valve closed
12/5/2011	10:46:48 AM	SiCl4 post valve closed
12/5/2011	10:46:48 AM	Bypass valve closed
12/5/2011	10:46:48 AM	Bubbler valve closed
12/5/2011	10:46:48 AM	Main Vac valve opened
12/5/2011	10:46:48 AM	Helium MFC set to  0.000000
12/5/2011	10:46:48 AM	H2 MFC set to  0.000000
12/5/2011	10:46:48 AM	BCl3 MFC set to  0.000000
12/5/2011	10:46:48 AM	PHl3 MFC set to  0.000000
12/5/2011	10:46:48 AM	SiCl4 MFC set to  0.000000
12/5/2011	10:46:48 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	10:46:48 AM	Tube furnace set to 0
12/5/2011	10:47:18 AM	H2 valve closed
12/5/2011	10:47:18 AM	BCl3 valve closed
12/5/2011	10:47:18 AM	PH3 valve closed
12/5/2011	10:47:18 AM	SiCl4 pre valve closed
12/5/2011	10:47:18 AM	SiCl4 post valve closed
12/5/2011	10:47:18 AM	Bypass valve closed
12/5/2011	10:47:18 AM	Bubbler valve closed
12/5/2011	10:47:18 AM	Helium valve opened
12/5/2011	10:47:18 AM	Main Vac valve opened
12/5/2011	10:47:18 AM	Helium MFC set to  20.000000
12/5/2011	10:47:18 AM	H2 MFC set to  0.000000
12/5/2011	10:47:18 AM	BCl3 MFC set to  0.000000
12/5/2011	10:47:18 AM	PHl3 MFC set to  0.000000
12/5/2011	10:47:18 AM	SiCl4 MFC set to  0.000000
12/5/2011	10:47:18 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	10:47:18 AM	Tube furnace set to 0
12/5/2011	10:47:48 AM	Helium valve closed
12/5/2011	10:47:48 AM	H2 valve closed
12/5/2011	10:47:48 AM	BCl3 valve closed
12/5/2011	10:47:48 AM	PH3 valve closed
12/5/2011	10:47:48 AM	SiCl4 pre valve closed
12/5/2011	10:47:48 AM	SiCl4 post valve closed
12/5/2011	10:47:48 AM	Bypass valve closed
12/5/2011	10:47:48 AM	Bubbler valve closed
12/5/2011	10:47:48 AM	Main Vac valve opened
12/5/2011	10:47:48 AM	Helium MFC set to  0.000000
12/5/2011	10:47:48 AM	H2 MFC set to  0.000000
12/5/2011	10:47:48 AM	BCl3 MFC set to  0.000000
12/5/2011	10:47:48 AM	PHl3 MFC set to  0.000000
12/5/2011	10:47:48 AM	SiCl4 MFC set to  0.000000
12/5/2011	10:47:48 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	10:47:48 AM	Tube furnace set to 0
12/5/2011	10:48:18 AM	H2 valve closed
12/5/2011	10:48:18 AM	BCl3 valve closed
12/5/2011	10:48:18 AM	PH3 valve closed
12/5/2011	10:48:18 AM	SiCl4 pre valve closed
12/5/2011	10:48:18 AM	SiCl4 post valve closed
12/5/2011	10:48:18 AM	Bypass valve closed
12/5/2011	10:48:18 AM	Bubbler valve closed
12/5/2011	10:48:18 AM	Helium valve opened
12/5/2011	10:48:18 AM	Main Vac valve opened
12/5/2011	10:48:18 AM	Helium MFC set to  20.000000
12/5/2011	10:48:18 AM	H2 MFC set to  0.000000
12/5/2011	10:48:18 AM	BCl3 MFC set to  0.000000
12/5/2011	10:48:18 AM	PHl3 MFC set to  0.000000
12/5/2011	10:48:18 AM	SiCl4 MFC set to  0.000000
12/5/2011	10:48:18 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	10:48:18 AM	Tube furnace set to 0
12/5/2011	10:48:48 AM	Helium valve closed
12/5/2011	10:48:48 AM	H2 valve closed
12/5/2011	10:48:48 AM	BCl3 valve closed
12/5/2011	10:48:48 AM	PH3 valve closed
12/5/2011	10:48:48 AM	SiCl4 pre valve closed
12/5/2011	10:48:48 AM	SiCl4 post valve closed
12/5/2011	10:48:48 AM	Bypass valve closed
12/5/2011	10:48:48 AM	Bubbler valve closed
12/5/2011	10:48:48 AM	Main Vac valve opened
12/5/2011	10:48:48 AM	Helium MFC set to  0.000000
12/5/2011	10:48:48 AM	H2 MFC set to  0.000000
12/5/2011	10:48:48 AM	BCl3 MFC set to  0.000000
12/5/2011	10:48:48 AM	PHl3 MFC set to  0.000000
12/5/2011	10:48:48 AM	SiCl4 MFC set to  0.000000
12/5/2011	10:48:48 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	10:48:49 AM	Tube furnace set to 0
12/5/2011	10:49:19 AM	H2 valve closed
12/5/2011	10:49:19 AM	BCl3 valve closed
12/5/2011	10:49:19 AM	PH3 valve closed
12/5/2011	10:49:19 AM	SiCl4 pre valve closed
12/5/2011	10:49:19 AM	SiCl4 post valve closed
12/5/2011	10:49:19 AM	Bypass valve closed
12/5/2011	10:49:19 AM	Bubbler valve closed
12/5/2011	10:49:19 AM	Helium valve opened
12/5/2011	10:49:19 AM	Main Vac valve opened
12/5/2011	10:49:19 AM	Helium MFC set to  20.000000
12/5/2011	10:49:19 AM	H2 MFC set to  0.000000
12/5/2011	10:49:19 AM	BCl3 MFC set to  0.000000
12/5/2011	10:49:19 AM	PHl3 MFC set to  0.000000
12/5/2011	10:49:19 AM	SiCl4 MFC set to  0.000000
12/5/2011	10:49:19 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	10:49:19 AM	Tube furnace set to 0
12/5/2011	10:49:49 AM	Helium valve closed
12/5/2011	10:49:49 AM	H2 valve closed
12/5/2011	10:49:49 AM	BCl3 valve closed
12/5/2011	10:49:49 AM	PH3 valve closed
12/5/2011	10:49:49 AM	SiCl4 pre valve closed
12/5/2011	10:49:49 AM	SiCl4 post valve closed
12/5/2011	10:49:49 AM	Bypass valve closed
12/5/2011	10:49:49 AM	Bubbler valve closed
12/5/2011	10:49:49 AM	Main Vac valve opened
12/5/2011	10:49:49 AM	Helium MFC set to  0.000000
12/5/2011	10:49:49 AM	H2 MFC set to  0.000000
12/5/2011	10:49:49 AM	BCl3 MFC set to  0.000000
12/5/2011	10:49:49 AM	PHl3 MFC set to  0.000000
12/5/2011	10:49:49 AM	SiCl4 MFC set to  0.000000
12/5/2011	10:49:49 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	10:49:49 AM	Tube furnace set to 0
12/5/2011	10:50:19 AM	H2 valve closed
12/5/2011	10:50:19 AM	BCl3 valve closed
12/5/2011	10:50:19 AM	PH3 valve closed
12/5/2011	10:50:19 AM	SiCl4 pre valve closed
12/5/2011	10:50:19 AM	SiCl4 post valve closed
12/5/2011	10:50:19 AM	Bypass valve closed
12/5/2011	10:50:19 AM	Bubbler valve closed
12/5/2011	10:50:19 AM	Helium valve opened
12/5/2011	10:50:19 AM	Main Vac valve opened
12/5/2011	10:50:19 AM	Helium MFC set to  20.000000
12/5/2011	10:50:19 AM	H2 MFC set to  0.000000
12/5/2011	10:50:19 AM	BCl3 MFC set to  0.000000
12/5/2011	10:50:19 AM	PHl3 MFC set to  0.000000
12/5/2011	10:50:19 AM	SiCl4 MFC set to  0.000000
12/5/2011	10:50:19 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	10:50:19 AM	Tube furnace set to 0
12/5/2011	10:50:49 AM	Helium valve closed
12/5/2011	10:50:49 AM	H2 valve closed
12/5/2011	10:50:49 AM	BCl3 valve closed
12/5/2011	10:50:49 AM	PH3 valve closed
12/5/2011	10:50:49 AM	SiCl4 pre valve closed
12/5/2011	10:50:49 AM	SiCl4 post valve closed
12/5/2011	10:50:49 AM	Bypass valve closed
12/5/2011	10:50:49 AM	Bubbler valve closed
12/5/2011	10:50:49 AM	Main Vac valve opened
12/5/2011	10:50:49 AM	Helium MFC set to  0.000000
12/5/2011	10:50:49 AM	H2 MFC set to  0.000000
12/5/2011	10:50:49 AM	BCl3 MFC set to  0.000000
12/5/2011	10:50:49 AM	PHl3 MFC set to  0.000000
12/5/2011	10:50:49 AM	SiCl4 MFC set to  0.000000
12/5/2011	10:50:49 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	10:50:49 AM	Tube furnace set to 0
12/5/2011	10:51:19 AM	H2 valve closed
12/5/2011	10:51:19 AM	BCl3 valve closed
12/5/2011	10:51:19 AM	PH3 valve closed
12/5/2011	10:51:19 AM	SiCl4 pre valve closed
12/5/2011	10:51:19 AM	SiCl4 post valve closed
12/5/2011	10:51:19 AM	Bypass valve closed
12/5/2011	10:51:19 AM	Bubbler valve closed
12/5/2011	10:51:19 AM	Helium valve opened
12/5/2011	10:51:19 AM	Main Vac valve opened
12/5/2011	10:51:19 AM	Helium MFC set to  20.000000
12/5/2011	10:51:19 AM	H2 MFC set to  0.000000
12/5/2011	10:51:19 AM	BCl3 MFC set to  0.000000
12/5/2011	10:51:19 AM	PHl3 MFC set to  0.000000
12/5/2011	10:51:19 AM	SiCl4 MFC set to  0.000000
12/5/2011	10:51:19 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	10:51:20 AM	Tube furnace set to 0
12/5/2011	10:51:50 AM	Helium valve closed
12/5/2011	10:51:50 AM	H2 valve closed
12/5/2011	10:51:50 AM	BCl3 valve closed
12/5/2011	10:51:50 AM	PH3 valve closed
12/5/2011	10:51:50 AM	SiCl4 pre valve closed
12/5/2011	10:51:50 AM	SiCl4 post valve closed
12/5/2011	10:51:50 AM	Bypass valve closed
12/5/2011	10:51:50 AM	Bubbler valve closed
12/5/2011	10:51:50 AM	Main Vac valve opened
12/5/2011	10:51:50 AM	Helium MFC set to  0.000000
12/5/2011	10:51:50 AM	H2 MFC set to  0.000000
12/5/2011	10:51:50 AM	BCl3 MFC set to  0.000000
12/5/2011	10:51:50 AM	PHl3 MFC set to  0.000000
12/5/2011	10:51:50 AM	SiCl4 MFC set to  0.000000
12/5/2011	10:51:50 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	10:51:50 AM	Tube furnace set to 0
12/5/2011	10:51:51 AM	Run finished at 10:51 AM
12/5/2011	10:51:51 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/5/2011	11:01:54 AM	Main Vac valve closed
12/5/2011	11:02:13 AM	Main Vac valve opened
12/5/2011	11:03:18 AM	Recipe started at 11:03 AM
12/5/2011	11:03:18 AM	Helium valve closed
12/5/2011	11:03:18 AM	H2 valve closed
12/5/2011	11:03:18 AM	BCl3 valve closed
12/5/2011	11:03:18 AM	PH3 valve closed
12/5/2011	11:03:18 AM	SiCl4 pre valve closed
12/5/2011	11:03:18 AM	SiCl4 post valve closed
12/5/2011	11:03:18 AM	Main Vac valve closed
12/5/2011	11:03:18 AM	Bypass valve closed
12/5/2011	11:03:18 AM	Bubbler valve closed
12/5/2011	11:03:18 AM	Helium MFC set to  0.000000
12/5/2011	11:03:18 AM	H2 MFC set to  0.000000
12/5/2011	11:03:18 AM	BCl3 MFC set to  0.000000
12/5/2011	11:03:18 AM	PHl3 MFC set to  0.000000
12/5/2011	11:03:18 AM	SiCl4 MFC set to  0.000000
12/5/2011	11:03:18 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	11:03:18 AM	Tube furnace set to 0
12/5/2011	11:03:21 AM	Helium valve closed
12/5/2011	11:03:21 AM	BCl3 valve closed
12/5/2011	11:03:21 AM	PH3 valve closed
12/5/2011	11:03:21 AM	SiCl4 pre valve closed
12/5/2011	11:03:21 AM	SiCl4 post valve closed
12/5/2011	11:03:21 AM	Main Vac valve closed
12/5/2011	11:03:21 AM	Bypass valve closed
12/5/2011	11:03:21 AM	Bubbler valve closed
12/5/2011	11:03:21 AM	H2 valve opened
12/5/2011	11:03:21 AM	Helium MFC set to  0.000000
12/5/2011	11:03:21 AM	H2 MFC set to  500.000000
12/5/2011	11:03:21 AM	BCl3 MFC set to  0.000000
12/5/2011	11:03:21 AM	PHl3 MFC set to  0.000000
12/5/2011	11:03:21 AM	SiCl4 MFC set to  0.000000
12/5/2011	11:03:21 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	11:03:21 AM	Tube furnace set to 0
12/5/2011	11:04:27 AM	Helium valve closed
12/5/2011	11:04:27 AM	BCl3 valve closed
12/5/2011	11:04:27 AM	PH3 valve closed
12/5/2011	11:04:27 AM	SiCl4 pre valve closed
12/5/2011	11:04:27 AM	SiCl4 post valve closed
12/5/2011	11:04:27 AM	Main Vac valve closed
12/5/2011	11:04:27 AM	Bypass valve closed
12/5/2011	11:04:27 AM	H2 valve opened
12/5/2011	11:04:27 AM	Bubbler valve opened
12/5/2011	11:04:27 AM	Helium MFC set to  0.000000
12/5/2011	11:04:27 AM	H2 MFC set to  500.000000
12/5/2011	11:04:27 AM	BCl3 MFC set to  0.000000
12/5/2011	11:04:27 AM	PHl3 MFC set to  0.000000
12/5/2011	11:04:27 AM	SiCl4 MFC set to  0.000000
12/5/2011	11:04:27 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	11:04:27 AM	Tube furnace set to 0
12/5/2011	11:04:28 AM	Helium valve closed
12/5/2011	11:04:28 AM	BCl3 valve closed
12/5/2011	11:04:28 AM	PH3 valve closed
12/5/2011	11:04:28 AM	SiCl4 pre valve closed
12/5/2011	11:04:28 AM	SiCl4 post valve closed
12/5/2011	11:04:28 AM	Main Vac valve closed
12/5/2011	11:04:28 AM	Bypass valve closed
12/5/2011	11:04:28 AM	H2 valve opened
12/5/2011	11:04:28 AM	Bubbler valve opened
12/5/2011	11:04:28 AM	Helium MFC set to  0.000000
12/5/2011	11:04:28 AM	H2 MFC set to  500.000000
12/5/2011	11:04:28 AM	BCl3 MFC set to  0.000000
12/5/2011	11:04:28 AM	PHl3 MFC set to  0.000000
12/5/2011	11:04:28 AM	SiCl4 MFC set to  0.000000
12/5/2011	11:04:28 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	11:04:28 AM	Tube furnace set to 1000
12/5/2011	11:29:28 AM	Helium valve closed
12/5/2011	11:29:28 AM	PH3 valve closed
12/5/2011	11:29:28 AM	Main Vac valve closed
12/5/2011	11:29:28 AM	Bypass valve closed
12/5/2011	11:29:28 AM	H2 valve opened
12/5/2011	11:29:28 AM	BCl3 valve opened
12/5/2011	11:29:28 AM	SiCl4 pre valve opened
12/5/2011	11:29:28 AM	SiCl4 post valve opened
12/5/2011	11:29:28 AM	Bubbler valve opened
12/5/2011	11:29:28 AM	Helium MFC set to  0.000000
12/5/2011	11:29:28 AM	H2 MFC set to  500.000000
12/5/2011	11:29:28 AM	BCl3 MFC set to  1.000000
12/5/2011	11:29:28 AM	PHl3 MFC set to  0.000000
12/5/2011	11:29:28 AM	SiCl4 MFC set to  26.000000
12/5/2011	11:29:28 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	11:29:28 AM	Tube furnace set to 1000
12/5/2011	11:44:28 AM	Helium valve closed
12/5/2011	11:44:28 AM	BCl3 valve closed
12/5/2011	11:44:28 AM	PH3 valve closed
12/5/2011	11:44:28 AM	SiCl4 pre valve closed
12/5/2011	11:44:28 AM	SiCl4 post valve closed
12/5/2011	11:44:28 AM	Main Vac valve closed
12/5/2011	11:44:28 AM	Bypass valve closed
12/5/2011	11:44:28 AM	H2 valve opened
12/5/2011	11:44:28 AM	Bubbler valve opened
12/5/2011	11:44:28 AM	Helium MFC set to  0.000000
12/5/2011	11:44:28 AM	H2 MFC set to  500.000000
12/5/2011	11:44:28 AM	BCl3 MFC set to  0.000000
12/5/2011	11:44:28 AM	PHl3 MFC set to  0.000000
12/5/2011	11:44:28 AM	SiCl4 MFC set to  0.000000
12/5/2011	11:44:28 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	11:44:29 AM	Tube furnace set to 750
12/5/2011	11:54:29 AM	H2 valve closed
12/5/2011	11:54:29 AM	BCl3 valve closed
12/5/2011	11:54:29 AM	PH3 valve closed
12/5/2011	11:54:29 AM	SiCl4 pre valve closed
12/5/2011	11:54:29 AM	SiCl4 post valve closed
12/5/2011	11:54:29 AM	Main Vac valve closed
12/5/2011	11:54:29 AM	Bypass valve closed
12/5/2011	11:54:29 AM	Helium valve opened
12/5/2011	11:54:29 AM	Bubbler valve opened
12/5/2011	11:54:29 AM	Helium MFC set to  500.000000
12/5/2011	11:54:29 AM	H2 MFC set to  0.000000
12/5/2011	11:54:29 AM	BCl3 MFC set to  0.000000
12/5/2011	11:54:29 AM	PHl3 MFC set to  0.000000
12/5/2011	11:54:29 AM	SiCl4 MFC set to  0.000000
12/5/2011	11:54:29 AM	Bypass solenoid MFC set to  0.000000
12/5/2011	11:54:29 AM	Tube furnace set to 0
12/5/2011	12:12:06 PM	Helium valve closed
12/5/2011	12:12:06 PM	H2 valve closed
12/5/2011	12:12:06 PM	BCl3 valve closed
12/5/2011	12:12:06 PM	PH3 valve closed
12/5/2011	12:12:06 PM	SiCl4 pre valve closed
12/5/2011	12:12:06 PM	SiCl4 post valve closed
12/5/2011	12:12:06 PM	Main Vac valve closed
12/5/2011	12:12:06 PM	Bypass valve closed
12/5/2011	12:12:06 PM	Bubbler valve closed
12/5/2011	12:12:06 PM	Helium MFC set to  0.000000
12/5/2011	12:12:06 PM	H2 MFC set to  0.000000
12/5/2011	12:12:06 PM	BCl3 MFC set to  0.000000
12/5/2011	12:12:06 PM	PHl3 MFC set to  0.000000
12/5/2011	12:12:06 PM	SiCl4 MFC set to  0.000000
12/5/2011	12:12:06 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	12:12:06 PM	Tube furnace set to 0
12/5/2011	12:12:07 PM	Run finished at 12:12 PM
12/5/2011	12:12:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/5/2011	12:12:20 PM	Recipe started at 12:12 PM
12/5/2011	12:12:20 PM	Helium valve closed
12/5/2011	12:12:20 PM	H2 valve closed
12/5/2011	12:12:20 PM	BCl3 valve closed
12/5/2011	12:12:20 PM	PH3 valve closed
12/5/2011	12:12:20 PM	SiCl4 pre valve closed
12/5/2011	12:12:20 PM	SiCl4 post valve closed
12/5/2011	12:12:20 PM	Main Vac valve closed
12/5/2011	12:12:20 PM	Bubbler valve closed
12/5/2011	12:12:20 PM	Bypass valve opened
12/5/2011	12:12:20 PM	Helium MFC set to  0.000000
12/5/2011	12:12:20 PM	H2 MFC set to  0.000000
12/5/2011	12:12:20 PM	BCl3 MFC set to  0.000000
12/5/2011	12:12:20 PM	PHl3 MFC set to  0.000000
12/5/2011	12:12:20 PM	SiCl4 MFC set to  0.000000
12/5/2011	12:12:20 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	12:12:20 PM	Tube furnace set to 0
12/5/2011	12:14:31 PM	Helium valve closed
12/5/2011	12:14:31 PM	H2 valve closed
12/5/2011	12:14:31 PM	BCl3 valve closed
12/5/2011	12:14:31 PM	PH3 valve closed
12/5/2011	12:14:31 PM	SiCl4 pre valve closed
12/5/2011	12:14:31 PM	SiCl4 post valve closed
12/5/2011	12:14:31 PM	Main Vac valve closed
12/5/2011	12:14:31 PM	Bubbler valve closed
12/5/2011	12:14:31 PM	Bypass valve opened
12/5/2011	12:14:31 PM	Helium MFC set to  0.000000
12/5/2011	12:14:31 PM	H2 MFC set to  0.000000
12/5/2011	12:14:31 PM	BCl3 MFC set to  0.000000
12/5/2011	12:14:31 PM	PHl3 MFC set to  0.000000
12/5/2011	12:14:31 PM	SiCl4 MFC set to  0.000000
12/5/2011	12:14:31 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	12:14:31 PM	Tube furnace set to 0
12/5/2011	12:15:31 PM	Helium valve closed
12/5/2011	12:15:31 PM	H2 valve closed
12/5/2011	12:15:31 PM	BCl3 valve closed
12/5/2011	12:15:31 PM	PH3 valve closed
12/5/2011	12:15:31 PM	SiCl4 pre valve closed
12/5/2011	12:15:31 PM	SiCl4 post valve closed
12/5/2011	12:15:31 PM	Bypass valve closed
12/5/2011	12:15:31 PM	Bubbler valve closed
12/5/2011	12:15:31 PM	Main Vac valve opened
12/5/2011	12:15:31 PM	Helium MFC set to  0.000000
12/5/2011	12:15:31 PM	H2 MFC set to  0.000000
12/5/2011	12:15:31 PM	BCl3 MFC set to  0.000000
12/5/2011	12:15:31 PM	PHl3 MFC set to  0.000000
12/5/2011	12:15:31 PM	SiCl4 MFC set to  0.000000
12/5/2011	12:15:31 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	12:15:31 PM	Tube furnace set to 0
12/5/2011	12:15:32 PM	Run finished at 12:15 PM
12/5/2011	12:15:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/5/2011	1:28:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/5/2011	1:28:48 PM	Recipe started at 1:28 PM
12/5/2011	1:28:48 PM	Helium valve closed
12/5/2011	1:28:48 PM	H2 valve closed
12/5/2011	1:28:48 PM	BCl3 valve closed
12/5/2011	1:28:48 PM	PH3 valve closed
12/5/2011	1:28:48 PM	SiCl4 pre valve closed
12/5/2011	1:28:48 PM	SiCl4 post valve closed
12/5/2011	1:28:48 PM	Main Vac valve closed
12/5/2011	1:28:48 PM	Bubbler valve closed
12/5/2011	1:28:48 PM	Bypass valve opened
12/5/2011	1:28:48 PM	Helium MFC set to  0.000000
12/5/2011	1:28:48 PM	H2 MFC set to  0.000000
12/5/2011	1:28:48 PM	BCl3 MFC set to  0.000000
12/5/2011	1:28:48 PM	PHl3 MFC set to  0.000000
12/5/2011	1:28:48 PM	SiCl4 MFC set to  0.000000
12/5/2011	1:28:48 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	1:28:48 PM	Tube furnace set to 0
12/5/2011	1:28:49 PM	Helium valve closed
12/5/2011	1:28:49 PM	H2 valve closed
12/5/2011	1:28:49 PM	BCl3 valve closed
12/5/2011	1:28:49 PM	PH3 valve closed
12/5/2011	1:28:49 PM	SiCl4 pre valve closed
12/5/2011	1:28:49 PM	SiCl4 post valve closed
12/5/2011	1:28:49 PM	Main Vac valve closed
12/5/2011	1:28:49 PM	Bubbler valve closed
12/5/2011	1:28:49 PM	Bypass valve opened
12/5/2011	1:28:49 PM	Helium MFC set to  0.000000
12/5/2011	1:28:49 PM	H2 MFC set to  0.000000
12/5/2011	1:28:49 PM	BCl3 MFC set to  0.000000
12/5/2011	1:28:49 PM	PHl3 MFC set to  0.000000
12/5/2011	1:28:49 PM	SiCl4 MFC set to  0.000000
12/5/2011	1:28:49 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	1:28:49 PM	Tube furnace set to 0
12/5/2011	1:28:49 PM	Helium valve closed
12/5/2011	1:28:50 PM	H2 valve closed
12/5/2011	1:28:50 PM	BCl3 valve closed
12/5/2011	1:28:50 PM	PH3 valve closed
12/5/2011	1:28:50 PM	SiCl4 pre valve closed
12/5/2011	1:28:50 PM	SiCl4 post valve closed
12/5/2011	1:28:50 PM	Bypass valve closed
12/5/2011	1:28:50 PM	Bubbler valve closed
12/5/2011	1:28:50 PM	Main Vac valve opened
12/5/2011	1:28:50 PM	Helium MFC set to  0.000000
12/5/2011	1:28:50 PM	H2 MFC set to  0.000000
12/5/2011	1:28:50 PM	BCl3 MFC set to  0.000000
12/5/2011	1:28:50 PM	PHl3 MFC set to  0.000000
12/5/2011	1:28:50 PM	SiCl4 MFC set to  0.000000
12/5/2011	1:28:50 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	1:28:50 PM	Tube furnace set to 0
12/5/2011	1:28:51 PM	H2 valve closed
12/5/2011	1:28:51 PM	BCl3 valve closed
12/5/2011	1:28:51 PM	PH3 valve closed
12/5/2011	1:28:51 PM	SiCl4 pre valve closed
12/5/2011	1:28:51 PM	SiCl4 post valve closed
12/5/2011	1:28:51 PM	Bypass valve closed
12/5/2011	1:28:51 PM	Bubbler valve closed
12/5/2011	1:28:51 PM	Helium valve opened
12/5/2011	1:28:51 PM	Main Vac valve opened
12/5/2011	1:28:51 PM	Helium MFC set to  20.000000
12/5/2011	1:28:51 PM	H2 MFC set to  0.000000
12/5/2011	1:28:51 PM	BCl3 MFC set to  0.000000
12/5/2011	1:28:51 PM	PHl3 MFC set to  0.000000
12/5/2011	1:28:51 PM	SiCl4 MFC set to  0.000000
12/5/2011	1:28:51 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	1:28:51 PM	Tube furnace set to 0
12/5/2011	1:29:21 PM	Helium valve closed
12/5/2011	1:29:21 PM	H2 valve closed
12/5/2011	1:29:21 PM	BCl3 valve closed
12/5/2011	1:29:21 PM	PH3 valve closed
12/5/2011	1:29:21 PM	SiCl4 pre valve closed
12/5/2011	1:29:21 PM	SiCl4 post valve closed
12/5/2011	1:29:21 PM	Bypass valve closed
12/5/2011	1:29:21 PM	Bubbler valve closed
12/5/2011	1:29:21 PM	Main Vac valve opened
12/5/2011	1:29:21 PM	Helium MFC set to  0.000000
12/5/2011	1:29:21 PM	H2 MFC set to  0.000000
12/5/2011	1:29:21 PM	BCl3 MFC set to  0.000000
12/5/2011	1:29:21 PM	PHl3 MFC set to  0.000000
12/5/2011	1:29:21 PM	SiCl4 MFC set to  0.000000
12/5/2011	1:29:21 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	1:29:21 PM	Tube furnace set to 0
12/5/2011	1:29:51 PM	H2 valve closed
12/5/2011	1:29:51 PM	BCl3 valve closed
12/5/2011	1:29:51 PM	PH3 valve closed
12/5/2011	1:29:51 PM	SiCl4 pre valve closed
12/5/2011	1:29:51 PM	SiCl4 post valve closed
12/5/2011	1:29:51 PM	Bypass valve closed
12/5/2011	1:29:51 PM	Bubbler valve closed
12/5/2011	1:29:51 PM	Helium valve opened
12/5/2011	1:29:51 PM	Main Vac valve opened
12/5/2011	1:29:51 PM	Helium MFC set to  20.000000
12/5/2011	1:29:51 PM	H2 MFC set to  0.000000
12/5/2011	1:29:51 PM	BCl3 MFC set to  0.000000
12/5/2011	1:29:51 PM	PHl3 MFC set to  0.000000
12/5/2011	1:29:51 PM	SiCl4 MFC set to  0.000000
12/5/2011	1:29:51 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	1:29:52 PM	Tube furnace set to 0
12/5/2011	1:30:22 PM	Helium valve closed
12/5/2011	1:30:22 PM	H2 valve closed
12/5/2011	1:30:22 PM	BCl3 valve closed
12/5/2011	1:30:22 PM	PH3 valve closed
12/5/2011	1:30:22 PM	SiCl4 pre valve closed
12/5/2011	1:30:22 PM	SiCl4 post valve closed
12/5/2011	1:30:22 PM	Bypass valve closed
12/5/2011	1:30:22 PM	Bubbler valve closed
12/5/2011	1:30:22 PM	Main Vac valve opened
12/5/2011	1:30:22 PM	Helium MFC set to  0.000000
12/5/2011	1:30:22 PM	H2 MFC set to  0.000000
12/5/2011	1:30:22 PM	BCl3 MFC set to  0.000000
12/5/2011	1:30:22 PM	PHl3 MFC set to  0.000000
12/5/2011	1:30:22 PM	SiCl4 MFC set to  0.000000
12/5/2011	1:30:22 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	1:30:22 PM	Tube furnace set to 0
12/5/2011	1:30:52 PM	H2 valve closed
12/5/2011	1:30:52 PM	BCl3 valve closed
12/5/2011	1:30:52 PM	PH3 valve closed
12/5/2011	1:30:52 PM	SiCl4 pre valve closed
12/5/2011	1:30:52 PM	SiCl4 post valve closed
12/5/2011	1:30:52 PM	Bypass valve closed
12/5/2011	1:30:52 PM	Bubbler valve closed
12/5/2011	1:30:52 PM	Helium valve opened
12/5/2011	1:30:52 PM	Main Vac valve opened
12/5/2011	1:30:52 PM	Helium MFC set to  20.000000
12/5/2011	1:30:52 PM	H2 MFC set to  0.000000
12/5/2011	1:30:52 PM	BCl3 MFC set to  0.000000
12/5/2011	1:30:52 PM	PHl3 MFC set to  0.000000
12/5/2011	1:30:52 PM	SiCl4 MFC set to  0.000000
12/5/2011	1:30:52 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	1:30:52 PM	Tube furnace set to 0
12/5/2011	1:31:22 PM	Helium valve closed
12/5/2011	1:31:22 PM	H2 valve closed
12/5/2011	1:31:22 PM	BCl3 valve closed
12/5/2011	1:31:22 PM	PH3 valve closed
12/5/2011	1:31:22 PM	SiCl4 pre valve closed
12/5/2011	1:31:22 PM	SiCl4 post valve closed
12/5/2011	1:31:22 PM	Bypass valve closed
12/5/2011	1:31:22 PM	Bubbler valve closed
12/5/2011	1:31:22 PM	Main Vac valve opened
12/5/2011	1:31:22 PM	Helium MFC set to  0.000000
12/5/2011	1:31:22 PM	H2 MFC set to  0.000000
12/5/2011	1:31:22 PM	BCl3 MFC set to  0.000000
12/5/2011	1:31:22 PM	PHl3 MFC set to  0.000000
12/5/2011	1:31:22 PM	SiCl4 MFC set to  0.000000
12/5/2011	1:31:22 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	1:31:22 PM	Tube furnace set to 0
12/5/2011	1:31:52 PM	H2 valve closed
12/5/2011	1:31:52 PM	BCl3 valve closed
12/5/2011	1:31:52 PM	PH3 valve closed
12/5/2011	1:31:52 PM	SiCl4 pre valve closed
12/5/2011	1:31:52 PM	SiCl4 post valve closed
12/5/2011	1:31:52 PM	Bypass valve closed
12/5/2011	1:31:52 PM	Bubbler valve closed
12/5/2011	1:31:52 PM	Helium valve opened
12/5/2011	1:31:52 PM	Main Vac valve opened
12/5/2011	1:31:52 PM	Helium MFC set to  20.000000
12/5/2011	1:31:52 PM	H2 MFC set to  0.000000
12/5/2011	1:31:52 PM	BCl3 MFC set to  0.000000
12/5/2011	1:31:52 PM	PHl3 MFC set to  0.000000
12/5/2011	1:31:52 PM	SiCl4 MFC set to  0.000000
12/5/2011	1:31:52 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	1:31:52 PM	Tube furnace set to 0
12/5/2011	1:32:22 PM	Helium valve closed
12/5/2011	1:32:22 PM	H2 valve closed
12/5/2011	1:32:22 PM	BCl3 valve closed
12/5/2011	1:32:22 PM	PH3 valve closed
12/5/2011	1:32:23 PM	SiCl4 pre valve closed
12/5/2011	1:32:23 PM	SiCl4 post valve closed
12/5/2011	1:32:23 PM	Bypass valve closed
12/5/2011	1:32:23 PM	Bubbler valve closed
12/5/2011	1:32:23 PM	Main Vac valve opened
12/5/2011	1:32:23 PM	Helium MFC set to  0.000000
12/5/2011	1:32:23 PM	H2 MFC set to  0.000000
12/5/2011	1:32:23 PM	BCl3 MFC set to  0.000000
12/5/2011	1:32:23 PM	PHl3 MFC set to  0.000000
12/5/2011	1:32:23 PM	SiCl4 MFC set to  0.000000
12/5/2011	1:32:23 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	1:32:23 PM	Tube furnace set to 0
12/5/2011	1:32:53 PM	H2 valve closed
12/5/2011	1:32:53 PM	BCl3 valve closed
12/5/2011	1:32:53 PM	PH3 valve closed
12/5/2011	1:32:53 PM	SiCl4 pre valve closed
12/5/2011	1:32:53 PM	SiCl4 post valve closed
12/5/2011	1:32:53 PM	Bypass valve closed
12/5/2011	1:32:53 PM	Bubbler valve closed
12/5/2011	1:32:53 PM	Helium valve opened
12/5/2011	1:32:53 PM	Main Vac valve opened
12/5/2011	1:32:53 PM	Helium MFC set to  20.000000
12/5/2011	1:32:53 PM	H2 MFC set to  0.000000
12/5/2011	1:32:53 PM	BCl3 MFC set to  0.000000
12/5/2011	1:32:53 PM	PHl3 MFC set to  0.000000
12/5/2011	1:32:53 PM	SiCl4 MFC set to  0.000000
12/5/2011	1:32:53 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	1:32:53 PM	Tube furnace set to 0
12/5/2011	1:33:23 PM	Helium valve closed
12/5/2011	1:33:23 PM	H2 valve closed
12/5/2011	1:33:23 PM	BCl3 valve closed
12/5/2011	1:33:23 PM	PH3 valve closed
12/5/2011	1:33:23 PM	SiCl4 pre valve closed
12/5/2011	1:33:23 PM	SiCl4 post valve closed
12/5/2011	1:33:23 PM	Bypass valve closed
12/5/2011	1:33:23 PM	Bubbler valve closed
12/5/2011	1:33:23 PM	Main Vac valve opened
12/5/2011	1:33:23 PM	Helium MFC set to  0.000000
12/5/2011	1:33:23 PM	H2 MFC set to  0.000000
12/5/2011	1:33:23 PM	BCl3 MFC set to  0.000000
12/5/2011	1:33:23 PM	PHl3 MFC set to  0.000000
12/5/2011	1:33:23 PM	SiCl4 MFC set to  0.000000
12/5/2011	1:33:23 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	1:33:23 PM	Tube furnace set to 0
12/5/2011	1:33:53 PM	H2 valve closed
12/5/2011	1:33:53 PM	BCl3 valve closed
12/5/2011	1:33:53 PM	PH3 valve closed
12/5/2011	1:33:53 PM	SiCl4 pre valve closed
12/5/2011	1:33:53 PM	SiCl4 post valve closed
12/5/2011	1:33:53 PM	Bypass valve closed
12/5/2011	1:33:53 PM	Bubbler valve closed
12/5/2011	1:33:53 PM	Helium valve opened
12/5/2011	1:33:53 PM	Main Vac valve opened
12/5/2011	1:33:53 PM	Helium MFC set to  20.000000
12/5/2011	1:33:53 PM	H2 MFC set to  0.000000
12/5/2011	1:33:53 PM	BCl3 MFC set to  0.000000
12/5/2011	1:33:53 PM	PHl3 MFC set to  0.000000
12/5/2011	1:33:53 PM	SiCl4 MFC set to  0.000000
12/5/2011	1:33:53 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	1:33:53 PM	Tube furnace set to 0
12/5/2011	1:34:23 PM	Helium valve closed
12/5/2011	1:34:23 PM	H2 valve closed
12/5/2011	1:34:23 PM	BCl3 valve closed
12/5/2011	1:34:23 PM	PH3 valve closed
12/5/2011	1:34:23 PM	SiCl4 pre valve closed
12/5/2011	1:34:23 PM	SiCl4 post valve closed
12/5/2011	1:34:23 PM	Bypass valve closed
12/5/2011	1:34:23 PM	Bubbler valve closed
12/5/2011	1:34:23 PM	Main Vac valve opened
12/5/2011	1:34:23 PM	Helium MFC set to  0.000000
12/5/2011	1:34:23 PM	H2 MFC set to  0.000000
12/5/2011	1:34:23 PM	BCl3 MFC set to  0.000000
12/5/2011	1:34:23 PM	PHl3 MFC set to  0.000000
12/5/2011	1:34:23 PM	SiCl4 MFC set to  0.000000
12/5/2011	1:34:23 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	1:34:24 PM	Tube furnace set to 0
12/5/2011	1:34:54 PM	H2 valve closed
12/5/2011	1:34:54 PM	BCl3 valve closed
12/5/2011	1:34:54 PM	PH3 valve closed
12/5/2011	1:34:54 PM	SiCl4 pre valve closed
12/5/2011	1:34:54 PM	SiCl4 post valve closed
12/5/2011	1:34:54 PM	Bypass valve closed
12/5/2011	1:34:54 PM	Bubbler valve closed
12/5/2011	1:34:54 PM	Helium valve opened
12/5/2011	1:34:54 PM	Main Vac valve opened
12/5/2011	1:34:54 PM	Helium MFC set to  20.000000
12/5/2011	1:34:54 PM	H2 MFC set to  0.000000
12/5/2011	1:34:54 PM	BCl3 MFC set to  0.000000
12/5/2011	1:34:54 PM	PHl3 MFC set to  0.000000
12/5/2011	1:34:54 PM	SiCl4 MFC set to  0.000000
12/5/2011	1:34:54 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	1:34:54 PM	Tube furnace set to 0
12/5/2011	1:35:24 PM	Helium valve closed
12/5/2011	1:35:24 PM	H2 valve closed
12/5/2011	1:35:24 PM	BCl3 valve closed
12/5/2011	1:35:24 PM	PH3 valve closed
12/5/2011	1:35:24 PM	SiCl4 pre valve closed
12/5/2011	1:35:24 PM	SiCl4 post valve closed
12/5/2011	1:35:24 PM	Bypass valve closed
12/5/2011	1:35:24 PM	Bubbler valve closed
12/5/2011	1:35:24 PM	Main Vac valve opened
12/5/2011	1:35:24 PM	Helium MFC set to  0.000000
12/5/2011	1:35:24 PM	H2 MFC set to  0.000000
12/5/2011	1:35:24 PM	BCl3 MFC set to  0.000000
12/5/2011	1:35:24 PM	PHl3 MFC set to  0.000000
12/5/2011	1:35:24 PM	SiCl4 MFC set to  0.000000
12/5/2011	1:35:24 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	1:35:24 PM	Tube furnace set to 0
12/5/2011	1:35:54 PM	H2 valve closed
12/5/2011	1:35:54 PM	BCl3 valve closed
12/5/2011	1:35:54 PM	PH3 valve closed
12/5/2011	1:35:54 PM	SiCl4 pre valve closed
12/5/2011	1:35:54 PM	SiCl4 post valve closed
12/5/2011	1:35:54 PM	Bypass valve closed
12/5/2011	1:35:54 PM	Bubbler valve closed
12/5/2011	1:35:54 PM	Helium valve opened
12/5/2011	1:35:54 PM	Main Vac valve opened
12/5/2011	1:35:54 PM	Helium MFC set to  20.000000
12/5/2011	1:35:54 PM	H2 MFC set to  0.000000
12/5/2011	1:35:54 PM	BCl3 MFC set to  0.000000
12/5/2011	1:35:54 PM	PHl3 MFC set to  0.000000
12/5/2011	1:35:54 PM	SiCl4 MFC set to  0.000000
12/5/2011	1:35:54 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	1:35:54 PM	Tube furnace set to 0
12/5/2011	1:36:24 PM	Helium valve closed
12/5/2011	1:36:24 PM	H2 valve closed
12/5/2011	1:36:24 PM	BCl3 valve closed
12/5/2011	1:36:24 PM	PH3 valve closed
12/5/2011	1:36:24 PM	SiCl4 pre valve closed
12/5/2011	1:36:24 PM	SiCl4 post valve closed
12/5/2011	1:36:24 PM	Bypass valve closed
12/5/2011	1:36:24 PM	Bubbler valve closed
12/5/2011	1:36:24 PM	Main Vac valve opened
12/5/2011	1:36:24 PM	Helium MFC set to  0.000000
12/5/2011	1:36:24 PM	H2 MFC set to  0.000000
12/5/2011	1:36:24 PM	BCl3 MFC set to  0.000000
12/5/2011	1:36:24 PM	PHl3 MFC set to  0.000000
12/5/2011	1:36:24 PM	SiCl4 MFC set to  0.000000
12/5/2011	1:36:24 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	1:36:24 PM	Tube furnace set to 0
12/5/2011	1:36:54 PM	H2 valve closed
12/5/2011	1:36:54 PM	BCl3 valve closed
12/5/2011	1:36:54 PM	PH3 valve closed
12/5/2011	1:36:54 PM	SiCl4 pre valve closed
12/5/2011	1:36:54 PM	SiCl4 post valve closed
12/5/2011	1:36:54 PM	Bypass valve closed
12/5/2011	1:36:54 PM	Bubbler valve closed
12/5/2011	1:36:54 PM	Helium valve opened
12/5/2011	1:36:54 PM	Main Vac valve opened
12/5/2011	1:36:54 PM	Helium MFC set to  20.000000
12/5/2011	1:36:54 PM	H2 MFC set to  0.000000
12/5/2011	1:36:54 PM	BCl3 MFC set to  0.000000
12/5/2011	1:36:54 PM	PHl3 MFC set to  0.000000
12/5/2011	1:36:54 PM	SiCl4 MFC set to  0.000000
12/5/2011	1:36:54 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	1:36:55 PM	Tube furnace set to 0
12/5/2011	1:37:25 PM	Helium valve closed
12/5/2011	1:37:25 PM	H2 valve closed
12/5/2011	1:37:25 PM	BCl3 valve closed
12/5/2011	1:37:25 PM	PH3 valve closed
12/5/2011	1:37:25 PM	SiCl4 pre valve closed
12/5/2011	1:37:25 PM	SiCl4 post valve closed
12/5/2011	1:37:25 PM	Bypass valve closed
12/5/2011	1:37:25 PM	Bubbler valve closed
12/5/2011	1:37:25 PM	Main Vac valve opened
12/5/2011	1:37:25 PM	Helium MFC set to  0.000000
12/5/2011	1:37:25 PM	H2 MFC set to  0.000000
12/5/2011	1:37:25 PM	BCl3 MFC set to  0.000000
12/5/2011	1:37:25 PM	PHl3 MFC set to  0.000000
12/5/2011	1:37:25 PM	SiCl4 MFC set to  0.000000
12/5/2011	1:37:25 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	1:37:25 PM	Tube furnace set to 0
12/5/2011	1:37:55 PM	H2 valve closed
12/5/2011	1:37:55 PM	BCl3 valve closed
12/5/2011	1:37:55 PM	PH3 valve closed
12/5/2011	1:37:55 PM	SiCl4 pre valve closed
12/5/2011	1:37:55 PM	SiCl4 post valve closed
12/5/2011	1:37:55 PM	Bypass valve closed
12/5/2011	1:37:55 PM	Bubbler valve closed
12/5/2011	1:37:55 PM	Helium valve opened
12/5/2011	1:37:55 PM	Main Vac valve opened
12/5/2011	1:37:55 PM	Helium MFC set to  20.000000
12/5/2011	1:37:55 PM	H2 MFC set to  0.000000
12/5/2011	1:37:55 PM	BCl3 MFC set to  0.000000
12/5/2011	1:37:55 PM	PHl3 MFC set to  0.000000
12/5/2011	1:37:55 PM	SiCl4 MFC set to  0.000000
12/5/2011	1:37:55 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	1:37:55 PM	Tube furnace set to 0
12/5/2011	1:38:25 PM	Helium valve closed
12/5/2011	1:38:25 PM	H2 valve closed
12/5/2011	1:38:25 PM	BCl3 valve closed
12/5/2011	1:38:25 PM	PH3 valve closed
12/5/2011	1:38:25 PM	SiCl4 pre valve closed
12/5/2011	1:38:25 PM	SiCl4 post valve closed
12/5/2011	1:38:25 PM	Bypass valve closed
12/5/2011	1:38:25 PM	Bubbler valve closed
12/5/2011	1:38:25 PM	Main Vac valve opened
12/5/2011	1:38:25 PM	Helium MFC set to  0.000000
12/5/2011	1:38:25 PM	H2 MFC set to  0.000000
12/5/2011	1:38:25 PM	BCl3 MFC set to  0.000000
12/5/2011	1:38:25 PM	PHl3 MFC set to  0.000000
12/5/2011	1:38:25 PM	SiCl4 MFC set to  0.000000
12/5/2011	1:38:25 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	1:38:25 PM	Tube furnace set to 0
12/5/2011	1:38:26 PM	Run finished at 1:38 PM
12/5/2011	1:38:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/5/2011	1:39:29 PM	Main Vac valve closed
12/5/2011	1:39:49 PM	Main Vac valve opened
12/5/2011	1:40:37 PM	Recipe started at 1:40 PM
12/5/2011	1:40:37 PM	Helium valve closed
12/5/2011	1:40:37 PM	H2 valve closed
12/5/2011	1:40:37 PM	BCl3 valve closed
12/5/2011	1:40:37 PM	PH3 valve closed
12/5/2011	1:40:37 PM	SiCl4 pre valve closed
12/5/2011	1:40:37 PM	SiCl4 post valve closed
12/5/2011	1:40:37 PM	Main Vac valve closed
12/5/2011	1:40:37 PM	Bypass valve closed
12/5/2011	1:40:37 PM	Bubbler valve closed
12/5/2011	1:40:37 PM	Helium MFC set to  0.000000
12/5/2011	1:40:37 PM	H2 MFC set to  0.000000
12/5/2011	1:40:37 PM	BCl3 MFC set to  0.000000
12/5/2011	1:40:37 PM	PHl3 MFC set to  0.000000
12/5/2011	1:40:37 PM	SiCl4 MFC set to  0.000000
12/5/2011	1:40:37 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	1:40:37 PM	Tube furnace set to 0
12/5/2011	1:40:40 PM	Helium valve closed
12/5/2011	1:40:40 PM	BCl3 valve closed
12/5/2011	1:40:40 PM	PH3 valve closed
12/5/2011	1:40:41 PM	SiCl4 pre valve closed
12/5/2011	1:40:41 PM	SiCl4 post valve closed
12/5/2011	1:40:41 PM	Main Vac valve closed
12/5/2011	1:40:41 PM	Bypass valve closed
12/5/2011	1:40:41 PM	Bubbler valve closed
12/5/2011	1:40:41 PM	H2 valve opened
12/5/2011	1:40:41 PM	Helium MFC set to  0.000000
12/5/2011	1:40:41 PM	H2 MFC set to  500.000000
12/5/2011	1:40:41 PM	BCl3 MFC set to  0.000000
12/5/2011	1:40:41 PM	PHl3 MFC set to  0.000000
12/5/2011	1:40:41 PM	SiCl4 MFC set to  0.000000
12/5/2011	1:40:41 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	1:40:41 PM	Tube furnace set to 0
12/5/2011	1:41:46 PM	Helium valve closed
12/5/2011	1:41:46 PM	BCl3 valve closed
12/5/2011	1:41:46 PM	PH3 valve closed
12/5/2011	1:41:46 PM	SiCl4 pre valve closed
12/5/2011	1:41:46 PM	SiCl4 post valve closed
12/5/2011	1:41:46 PM	Main Vac valve closed
12/5/2011	1:41:46 PM	Bypass valve closed
12/5/2011	1:41:46 PM	H2 valve opened
12/5/2011	1:41:46 PM	Bubbler valve opened
12/5/2011	1:41:46 PM	Helium MFC set to  0.000000
12/5/2011	1:41:46 PM	H2 MFC set to  500.000000
12/5/2011	1:41:46 PM	BCl3 MFC set to  0.000000
12/5/2011	1:41:46 PM	PHl3 MFC set to  0.000000
12/5/2011	1:41:46 PM	SiCl4 MFC set to  0.000000
12/5/2011	1:41:46 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	1:41:46 PM	Tube furnace set to 0
12/5/2011	1:41:47 PM	Helium valve closed
12/5/2011	1:41:47 PM	BCl3 valve closed
12/5/2011	1:41:47 PM	PH3 valve closed
12/5/2011	1:41:47 PM	SiCl4 pre valve closed
12/5/2011	1:41:47 PM	SiCl4 post valve closed
12/5/2011	1:41:47 PM	Main Vac valve closed
12/5/2011	1:41:47 PM	Bypass valve closed
12/5/2011	1:41:47 PM	H2 valve opened
12/5/2011	1:41:47 PM	Bubbler valve opened
12/5/2011	1:41:47 PM	Helium MFC set to  0.000000
12/5/2011	1:41:47 PM	H2 MFC set to  500.000000
12/5/2011	1:41:47 PM	BCl3 MFC set to  0.000000
12/5/2011	1:41:47 PM	PHl3 MFC set to  0.000000
12/5/2011	1:41:47 PM	SiCl4 MFC set to  0.000000
12/5/2011	1:41:47 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	1:41:47 PM	Tube furnace set to 1000
12/5/2011	2:06:47 PM	Helium valve closed
12/5/2011	2:06:47 PM	PH3 valve closed
12/5/2011	2:06:47 PM	Main Vac valve closed
12/5/2011	2:06:47 PM	Bypass valve closed
12/5/2011	2:06:47 PM	H2 valve opened
12/5/2011	2:06:47 PM	BCl3 valve opened
12/5/2011	2:06:47 PM	SiCl4 pre valve opened
12/5/2011	2:06:47 PM	SiCl4 post valve opened
12/5/2011	2:06:47 PM	Bubbler valve opened
12/5/2011	2:06:47 PM	Helium MFC set to  0.000000
12/5/2011	2:06:47 PM	H2 MFC set to  500.000000
12/5/2011	2:06:47 PM	BCl3 MFC set to  1.000000
12/5/2011	2:06:47 PM	PHl3 MFC set to  0.000000
12/5/2011	2:06:47 PM	SiCl4 MFC set to  26.000000
12/5/2011	2:06:47 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	2:06:47 PM	Tube furnace set to 1000
12/5/2011	2:21:47 PM	Helium valve closed
12/5/2011	2:21:47 PM	BCl3 valve closed
12/5/2011	2:21:47 PM	PH3 valve closed
12/5/2011	2:21:47 PM	SiCl4 pre valve closed
12/5/2011	2:21:47 PM	SiCl4 post valve closed
12/5/2011	2:21:47 PM	Main Vac valve closed
12/5/2011	2:21:47 PM	Bypass valve closed
12/5/2011	2:21:47 PM	H2 valve opened
12/5/2011	2:21:47 PM	Bubbler valve opened
12/5/2011	2:21:47 PM	Helium MFC set to  0.000000
12/5/2011	2:21:47 PM	H2 MFC set to  500.000000
12/5/2011	2:21:47 PM	BCl3 MFC set to  0.000000
12/5/2011	2:21:47 PM	PHl3 MFC set to  0.000000
12/5/2011	2:21:47 PM	SiCl4 MFC set to  0.000000
12/5/2011	2:21:47 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	2:21:48 PM	Tube furnace set to 750
12/5/2011	2:31:48 PM	H2 valve closed
12/5/2011	2:31:48 PM	BCl3 valve closed
12/5/2011	2:31:48 PM	PH3 valve closed
12/5/2011	2:31:48 PM	SiCl4 pre valve closed
12/5/2011	2:31:48 PM	SiCl4 post valve closed
12/5/2011	2:31:48 PM	Main Vac valve closed
12/5/2011	2:31:48 PM	Bypass valve closed
12/5/2011	2:31:48 PM	Helium valve opened
12/5/2011	2:31:48 PM	Bubbler valve opened
12/5/2011	2:31:48 PM	Helium MFC set to  500.000000
12/5/2011	2:31:48 PM	H2 MFC set to  0.000000
12/5/2011	2:31:48 PM	BCl3 MFC set to  0.000000
12/5/2011	2:31:48 PM	PHl3 MFC set to  0.000000
12/5/2011	2:31:48 PM	SiCl4 MFC set to  0.000000
12/5/2011	2:31:48 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	2:31:48 PM	Tube furnace set to 0
12/5/2011	2:51:48 PM	Helium valve closed
12/5/2011	2:51:48 PM	H2 valve closed
12/5/2011	2:51:48 PM	BCl3 valve closed
12/5/2011	2:51:48 PM	PH3 valve closed
12/5/2011	2:51:48 PM	SiCl4 pre valve closed
12/5/2011	2:51:48 PM	SiCl4 post valve closed
12/5/2011	2:51:48 PM	Main Vac valve closed
12/5/2011	2:51:48 PM	Bypass valve closed
12/5/2011	2:51:48 PM	Bubbler valve closed
12/5/2011	2:51:48 PM	Helium MFC set to  0.000000
12/5/2011	2:51:48 PM	H2 MFC set to  0.000000
12/5/2011	2:51:48 PM	BCl3 MFC set to  0.000000
12/5/2011	2:51:48 PM	PHl3 MFC set to  0.000000
12/5/2011	2:51:48 PM	SiCl4 MFC set to  0.000000
12/5/2011	2:51:48 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	2:51:48 PM	Tube furnace set to 0
12/5/2011	2:51:49 PM	Run finished at 2:51 PM
12/5/2011	2:57:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/5/2011	2:57:51 PM	Recipe started at 2:57 PM
12/5/2011	2:57:51 PM	Helium valve closed
12/5/2011	2:57:51 PM	H2 valve closed
12/5/2011	2:57:51 PM	BCl3 valve closed
12/5/2011	2:57:51 PM	PH3 valve closed
12/5/2011	2:57:51 PM	SiCl4 pre valve closed
12/5/2011	2:57:51 PM	SiCl4 post valve closed
12/5/2011	2:57:51 PM	Main Vac valve closed
12/5/2011	2:57:51 PM	Bypass valve closed
12/5/2011	2:57:51 PM	Bubbler valve closed
12/5/2011	2:57:51 PM	Helium MFC set to  0.000000
12/5/2011	2:57:51 PM	H2 MFC set to  0.000000
12/5/2011	2:57:51 PM	BCl3 MFC set to  0.000000
12/5/2011	2:57:51 PM	PHl3 MFC set to  0.000000
12/5/2011	2:57:51 PM	SiCl4 MFC set to  0.000000
12/5/2011	2:57:51 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	2:57:51 PM	Tube furnace set to 0
12/5/2011	2:57:54 PM	H2 valve closed
12/5/2011	2:57:54 PM	BCl3 valve closed
12/5/2011	2:57:54 PM	PH3 valve closed
12/5/2011	2:57:54 PM	SiCl4 pre valve closed
12/5/2011	2:57:54 PM	SiCl4 post valve closed
12/5/2011	2:57:54 PM	Main Vac valve closed
12/5/2011	2:57:54 PM	Bypass valve closed
12/5/2011	2:57:54 PM	Bubbler valve closed
12/5/2011	2:57:54 PM	Helium valve opened
12/5/2011	2:57:54 PM	Helium MFC set to  500.000000
12/5/2011	2:57:54 PM	H2 MFC set to  0.000000
12/5/2011	2:57:54 PM	BCl3 MFC set to  0.000000
12/5/2011	2:57:54 PM	PHl3 MFC set to  0.000000
12/5/2011	2:57:54 PM	SiCl4 MFC set to  0.000000
12/5/2011	2:57:54 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	2:57:54 PM	Tube furnace set to 0
12/5/2011	2:57:57 PM	Helium valve closed
12/5/2011	2:57:57 PM	H2 valve closed
12/5/2011	2:57:57 PM	BCl3 valve closed
12/5/2011	2:57:57 PM	PH3 valve closed
12/5/2011	2:57:57 PM	SiCl4 pre valve closed
12/5/2011	2:57:57 PM	SiCl4 post valve closed
12/5/2011	2:57:57 PM	Main Vac valve closed
12/5/2011	2:57:57 PM	Bypass valve closed
12/5/2011	2:57:57 PM	Bubbler valve closed
12/5/2011	2:57:57 PM	Helium MFC set to  0.000000
12/5/2011	2:57:57 PM	H2 MFC set to  0.000000
12/5/2011	2:57:57 PM	BCl3 MFC set to  0.000000
12/5/2011	2:57:57 PM	PHl3 MFC set to  0.000000
12/5/2011	2:57:57 PM	SiCl4 MFC set to  0.000000
12/5/2011	2:57:57 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	2:57:57 PM	Tube furnace set to 0
12/5/2011	2:57:58 PM	Run finished at 2:57 PM
12/5/2011	2:57:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/5/2011	3:00:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/5/2011	3:00:53 PM	Recipe started at 3:00 PM
12/5/2011	3:00:53 PM	Helium valve closed
12/5/2011	3:00:53 PM	H2 valve closed
12/5/2011	3:00:53 PM	BCl3 valve closed
12/5/2011	3:00:53 PM	PH3 valve closed
12/5/2011	3:00:53 PM	SiCl4 pre valve closed
12/5/2011	3:00:53 PM	SiCl4 post valve closed
12/5/2011	3:00:53 PM	Main Vac valve closed
12/5/2011	3:00:53 PM	Bubbler valve closed
12/5/2011	3:00:53 PM	Bypass valve opened
12/5/2011	3:00:53 PM	Helium MFC set to  0.000000
12/5/2011	3:00:53 PM	H2 MFC set to  0.000000
12/5/2011	3:00:53 PM	BCl3 MFC set to  0.000000
12/5/2011	3:00:53 PM	PHl3 MFC set to  0.000000
12/5/2011	3:00:53 PM	SiCl4 MFC set to  0.000000
12/5/2011	3:00:53 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	3:00:53 PM	Tube furnace set to 0
12/5/2011	3:03:10 PM	Helium valve closed
12/5/2011	3:03:10 PM	H2 valve closed
12/5/2011	3:03:10 PM	BCl3 valve closed
12/5/2011	3:03:10 PM	PH3 valve closed
12/5/2011	3:03:10 PM	SiCl4 pre valve closed
12/5/2011	3:03:10 PM	SiCl4 post valve closed
12/5/2011	3:03:10 PM	Main Vac valve closed
12/5/2011	3:03:10 PM	Bubbler valve closed
12/5/2011	3:03:10 PM	Bypass valve opened
12/5/2011	3:03:10 PM	Helium MFC set to  0.000000
12/5/2011	3:03:10 PM	H2 MFC set to  0.000000
12/5/2011	3:03:10 PM	BCl3 MFC set to  0.000000
12/5/2011	3:03:10 PM	PHl3 MFC set to  0.000000
12/5/2011	3:03:10 PM	SiCl4 MFC set to  0.000000
12/5/2011	3:03:10 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	3:03:10 PM	Tube furnace set to 0
12/5/2011	3:04:10 PM	Helium valve closed
12/5/2011	3:04:10 PM	H2 valve closed
12/5/2011	3:04:10 PM	BCl3 valve closed
12/5/2011	3:04:10 PM	PH3 valve closed
12/5/2011	3:04:10 PM	SiCl4 pre valve closed
12/5/2011	3:04:10 PM	SiCl4 post valve closed
12/5/2011	3:04:10 PM	Bypass valve closed
12/5/2011	3:04:10 PM	Bubbler valve closed
12/5/2011	3:04:10 PM	Main Vac valve opened
12/5/2011	3:04:10 PM	Helium MFC set to  0.000000
12/5/2011	3:04:10 PM	H2 MFC set to  0.000000
12/5/2011	3:04:10 PM	BCl3 MFC set to  0.000000
12/5/2011	3:04:10 PM	PHl3 MFC set to  0.000000
12/5/2011	3:04:10 PM	SiCl4 MFC set to  0.000000
12/5/2011	3:04:10 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	3:04:11 PM	Tube furnace set to 0
12/5/2011	3:04:12 PM	Run finished at 3:04 PM
12/5/2011	3:04:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/5/2011	3:38:32 PM	Main Vac valve closed
12/5/2011	3:38:35 PM	H2 MFC set to  500.000000
12/5/2011	3:38:36 PM	H2 valve opened
12/5/2011	3:39:17 PM	H2 valve closed
12/5/2011	3:39:18 PM	Bypass valve opened
12/5/2011	3:48:27 PM	Bypass valve closed
12/5/2011	3:48:27 PM	Main Vac valve opened
12/5/2011	3:48:34 PM	Main Vac valve closed
12/5/2011	3:48:35 PM	H2 valve opened
12/5/2011	3:49:37 PM	H2 valve closed
12/5/2011	3:49:38 PM	Bypass valve opened
12/5/2011	3:50:24 PM	Bypass valve closed
12/5/2011	3:50:25 PM	Main Vac valve opened
12/5/2011	5:25:20 PM	Main Vac valve closed
12/5/2011	5:25:20 PM	H2 valve opened
12/5/2011	5:26:30 PM	H2 valve closed
12/5/2011	5:26:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/5/2011	5:26:32 PM	Recipe started at 5:26 PM
12/5/2011	5:26:32 PM	Helium valve closed
12/5/2011	5:26:32 PM	H2 valve closed
12/5/2011	5:26:32 PM	BCl3 valve closed
12/5/2011	5:26:32 PM	PH3 valve closed
12/5/2011	5:26:32 PM	SiCl4 pre valve closed
12/5/2011	5:26:32 PM	SiCl4 post valve closed
12/5/2011	5:26:32 PM	Main Vac valve closed
12/5/2011	5:26:32 PM	Bubbler valve closed
12/5/2011	5:26:32 PM	Bypass valve opened
12/5/2011	5:26:32 PM	Helium MFC set to  0.000000
12/5/2011	5:26:32 PM	H2 MFC set to  0.000000
12/5/2011	5:26:32 PM	BCl3 MFC set to  0.000000
12/5/2011	5:26:32 PM	PHl3 MFC set to  0.000000
12/5/2011	5:26:32 PM	SiCl4 MFC set to  0.000000
12/5/2011	5:26:32 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	5:26:32 PM	Tube furnace set to 0
12/5/2011	5:27:08 PM	Helium valve closed
12/5/2011	5:27:08 PM	H2 valve closed
12/5/2011	5:27:08 PM	BCl3 valve closed
12/5/2011	5:27:08 PM	PH3 valve closed
12/5/2011	5:27:08 PM	SiCl4 pre valve closed
12/5/2011	5:27:08 PM	SiCl4 post valve closed
12/5/2011	5:27:08 PM	Main Vac valve closed
12/5/2011	5:27:08 PM	Bubbler valve closed
12/5/2011	5:27:08 PM	Bypass valve opened
12/5/2011	5:27:08 PM	Helium MFC set to  0.000000
12/5/2011	5:27:08 PM	H2 MFC set to  0.000000
12/5/2011	5:27:08 PM	BCl3 MFC set to  0.000000
12/5/2011	5:27:08 PM	PHl3 MFC set to  0.000000
12/5/2011	5:27:08 PM	SiCl4 MFC set to  0.000000
12/5/2011	5:27:08 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	5:27:08 PM	Tube furnace set to 0
12/5/2011	5:27:46 PM	Helium valve closed
12/5/2011	5:27:46 PM	H2 valve closed
12/5/2011	5:27:46 PM	BCl3 valve closed
12/5/2011	5:27:46 PM	PH3 valve closed
12/5/2011	5:27:46 PM	SiCl4 pre valve closed
12/5/2011	5:27:46 PM	SiCl4 post valve closed
12/5/2011	5:27:46 PM	Bypass valve closed
12/5/2011	5:27:46 PM	Bubbler valve closed
12/5/2011	5:27:46 PM	Main Vac valve opened
12/5/2011	5:27:46 PM	Helium MFC set to  0.000000
12/5/2011	5:27:46 PM	H2 MFC set to  0.000000
12/5/2011	5:27:46 PM	BCl3 MFC set to  0.000000
12/5/2011	5:27:46 PM	PHl3 MFC set to  0.000000
12/5/2011	5:27:46 PM	SiCl4 MFC set to  0.000000
12/5/2011	5:27:46 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	5:27:46 PM	Tube furnace set to 0
12/5/2011	5:27:47 PM	Run finished at 5:27 PM
12/5/2011	5:27:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/5/2011	5:34:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/5/2011	5:34:48 PM	Recipe started at 5:34 PM
12/5/2011	5:34:48 PM	Helium valve closed
12/5/2011	5:34:48 PM	H2 valve closed
12/5/2011	5:34:48 PM	BCl3 valve closed
12/5/2011	5:34:48 PM	PH3 valve closed
12/5/2011	5:34:48 PM	SiCl4 pre valve closed
12/5/2011	5:34:48 PM	SiCl4 post valve closed
12/5/2011	5:34:48 PM	Main Vac valve closed
12/5/2011	5:34:48 PM	Bubbler valve closed
12/5/2011	5:34:48 PM	Bypass valve opened
12/5/2011	5:34:48 PM	Helium MFC set to  0.000000
12/5/2011	5:34:48 PM	H2 MFC set to  0.000000
12/5/2011	5:34:48 PM	BCl3 MFC set to  0.000000
12/5/2011	5:34:48 PM	PHl3 MFC set to  0.000000
12/5/2011	5:34:48 PM	SiCl4 MFC set to  0.000000
12/5/2011	5:34:48 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	5:34:48 PM	Tube furnace set to 0
12/5/2011	5:34:49 PM	Helium valve closed
12/5/2011	5:34:49 PM	H2 valve closed
12/5/2011	5:34:49 PM	BCl3 valve closed
12/5/2011	5:34:49 PM	PH3 valve closed
12/5/2011	5:34:49 PM	SiCl4 pre valve closed
12/5/2011	5:34:49 PM	SiCl4 post valve closed
12/5/2011	5:34:49 PM	Main Vac valve closed
12/5/2011	5:34:49 PM	Bubbler valve closed
12/5/2011	5:34:49 PM	Bypass valve opened
12/5/2011	5:34:49 PM	Helium MFC set to  0.000000
12/5/2011	5:34:49 PM	H2 MFC set to  0.000000
12/5/2011	5:34:49 PM	BCl3 MFC set to  0.000000
12/5/2011	5:34:49 PM	PHl3 MFC set to  0.000000
12/5/2011	5:34:49 PM	SiCl4 MFC set to  0.000000
12/5/2011	5:34:49 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	5:34:49 PM	Tube furnace set to 0
12/5/2011	5:34:49 PM	Helium valve closed
12/5/2011	5:34:49 PM	H2 valve closed
12/5/2011	5:34:49 PM	BCl3 valve closed
12/5/2011	5:34:49 PM	PH3 valve closed
12/5/2011	5:34:49 PM	SiCl4 pre valve closed
12/5/2011	5:34:49 PM	SiCl4 post valve closed
12/5/2011	5:34:49 PM	Bypass valve closed
12/5/2011	5:34:49 PM	Bubbler valve closed
12/5/2011	5:34:49 PM	Main Vac valve opened
12/5/2011	5:34:49 PM	Helium MFC set to  0.000000
12/5/2011	5:34:49 PM	H2 MFC set to  0.000000
12/5/2011	5:34:49 PM	BCl3 MFC set to  0.000000
12/5/2011	5:34:49 PM	PHl3 MFC set to  0.000000
12/5/2011	5:34:49 PM	SiCl4 MFC set to  0.000000
12/5/2011	5:34:49 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	5:34:49 PM	Tube furnace set to 0
12/5/2011	5:34:50 PM	H2 valve closed
12/5/2011	5:34:50 PM	BCl3 valve closed
12/5/2011	5:34:50 PM	PH3 valve closed
12/5/2011	5:34:50 PM	SiCl4 pre valve closed
12/5/2011	5:34:50 PM	SiCl4 post valve closed
12/5/2011	5:34:50 PM	Bypass valve closed
12/5/2011	5:34:50 PM	Bubbler valve closed
12/5/2011	5:34:50 PM	Helium valve opened
12/5/2011	5:34:50 PM	Main Vac valve opened
12/5/2011	5:34:50 PM	Helium MFC set to  20.000000
12/5/2011	5:34:50 PM	H2 MFC set to  0.000000
12/5/2011	5:34:50 PM	BCl3 MFC set to  0.000000
12/5/2011	5:34:50 PM	PHl3 MFC set to  0.000000
12/5/2011	5:34:50 PM	SiCl4 MFC set to  0.000000
12/5/2011	5:34:50 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	5:34:50 PM	Tube furnace set to 0
12/5/2011	5:35:20 PM	Helium valve closed
12/5/2011	5:35:20 PM	H2 valve closed
12/5/2011	5:35:20 PM	BCl3 valve closed
12/5/2011	5:35:20 PM	PH3 valve closed
12/5/2011	5:35:20 PM	SiCl4 pre valve closed
12/5/2011	5:35:20 PM	SiCl4 post valve closed
12/5/2011	5:35:20 PM	Bypass valve closed
12/5/2011	5:35:20 PM	Bubbler valve closed
12/5/2011	5:35:20 PM	Main Vac valve opened
12/5/2011	5:35:20 PM	Helium MFC set to  0.000000
12/5/2011	5:35:20 PM	H2 MFC set to  0.000000
12/5/2011	5:35:20 PM	BCl3 MFC set to  0.000000
12/5/2011	5:35:20 PM	PHl3 MFC set to  0.000000
12/5/2011	5:35:20 PM	SiCl4 MFC set to  0.000000
12/5/2011	5:35:20 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	5:35:20 PM	Tube furnace set to 0
12/5/2011	5:35:50 PM	H2 valve closed
12/5/2011	5:35:50 PM	BCl3 valve closed
12/5/2011	5:35:50 PM	PH3 valve closed
12/5/2011	5:35:50 PM	SiCl4 pre valve closed
12/5/2011	5:35:50 PM	SiCl4 post valve closed
12/5/2011	5:35:50 PM	Bypass valve closed
12/5/2011	5:35:50 PM	Bubbler valve closed
12/5/2011	5:35:50 PM	Helium valve opened
12/5/2011	5:35:50 PM	Main Vac valve opened
12/5/2011	5:35:50 PM	Helium MFC set to  20.000000
12/5/2011	5:35:50 PM	H2 MFC set to  0.000000
12/5/2011	5:35:50 PM	BCl3 MFC set to  0.000000
12/5/2011	5:35:50 PM	PHl3 MFC set to  0.000000
12/5/2011	5:35:50 PM	SiCl4 MFC set to  0.000000
12/5/2011	5:35:50 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	5:35:50 PM	Tube furnace set to 0
12/5/2011	5:36:20 PM	Helium valve closed
12/5/2011	5:36:20 PM	H2 valve closed
12/5/2011	5:36:20 PM	BCl3 valve closed
12/5/2011	5:36:20 PM	PH3 valve closed
12/5/2011	5:36:20 PM	SiCl4 pre valve closed
12/5/2011	5:36:20 PM	SiCl4 post valve closed
12/5/2011	5:36:20 PM	Bypass valve closed
12/5/2011	5:36:20 PM	Bubbler valve closed
12/5/2011	5:36:20 PM	Main Vac valve opened
12/5/2011	5:36:20 PM	Helium MFC set to  0.000000
12/5/2011	5:36:20 PM	H2 MFC set to  0.000000
12/5/2011	5:36:20 PM	BCl3 MFC set to  0.000000
12/5/2011	5:36:20 PM	PHl3 MFC set to  0.000000
12/5/2011	5:36:20 PM	SiCl4 MFC set to  0.000000
12/5/2011	5:36:20 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	5:36:20 PM	Tube furnace set to 0
12/5/2011	5:36:50 PM	H2 valve closed
12/5/2011	5:36:50 PM	BCl3 valve closed
12/5/2011	5:36:50 PM	PH3 valve closed
12/5/2011	5:36:50 PM	SiCl4 pre valve closed
12/5/2011	5:36:51 PM	SiCl4 post valve closed
12/5/2011	5:36:51 PM	Bypass valve closed
12/5/2011	5:36:51 PM	Bubbler valve closed
12/5/2011	5:36:51 PM	Helium valve opened
12/5/2011	5:36:51 PM	Main Vac valve opened
12/5/2011	5:36:51 PM	Helium MFC set to  20.000000
12/5/2011	5:36:51 PM	H2 MFC set to  0.000000
12/5/2011	5:36:51 PM	BCl3 MFC set to  0.000000
12/5/2011	5:36:51 PM	PHl3 MFC set to  0.000000
12/5/2011	5:36:51 PM	SiCl4 MFC set to  0.000000
12/5/2011	5:36:51 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	5:36:51 PM	Tube furnace set to 0
12/5/2011	5:37:21 PM	Helium valve closed
12/5/2011	5:37:21 PM	H2 valve closed
12/5/2011	5:37:21 PM	BCl3 valve closed
12/5/2011	5:37:21 PM	PH3 valve closed
12/5/2011	5:37:21 PM	SiCl4 pre valve closed
12/5/2011	5:37:21 PM	SiCl4 post valve closed
12/5/2011	5:37:21 PM	Bypass valve closed
12/5/2011	5:37:21 PM	Bubbler valve closed
12/5/2011	5:37:21 PM	Main Vac valve opened
12/5/2011	5:37:21 PM	Helium MFC set to  0.000000
12/5/2011	5:37:21 PM	H2 MFC set to  0.000000
12/5/2011	5:37:21 PM	BCl3 MFC set to  0.000000
12/5/2011	5:37:21 PM	PHl3 MFC set to  0.000000
12/5/2011	5:37:21 PM	SiCl4 MFC set to  0.000000
12/5/2011	5:37:21 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	5:37:21 PM	Tube furnace set to 0
12/5/2011	5:37:51 PM	H2 valve closed
12/5/2011	5:37:51 PM	BCl3 valve closed
12/5/2011	5:37:51 PM	PH3 valve closed
12/5/2011	5:37:51 PM	SiCl4 pre valve closed
12/5/2011	5:37:51 PM	SiCl4 post valve closed
12/5/2011	5:37:51 PM	Bypass valve closed
12/5/2011	5:37:51 PM	Bubbler valve closed
12/5/2011	5:37:51 PM	Helium valve opened
12/5/2011	5:37:51 PM	Main Vac valve opened
12/5/2011	5:37:51 PM	Helium MFC set to  20.000000
12/5/2011	5:37:51 PM	H2 MFC set to  0.000000
12/5/2011	5:37:51 PM	BCl3 MFC set to  0.000000
12/5/2011	5:37:51 PM	PHl3 MFC set to  0.000000
12/5/2011	5:37:51 PM	SiCl4 MFC set to  0.000000
12/5/2011	5:37:51 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	5:37:51 PM	Tube furnace set to 0
12/5/2011	5:38:21 PM	Helium valve closed
12/5/2011	5:38:21 PM	H2 valve closed
12/5/2011	5:38:21 PM	BCl3 valve closed
12/5/2011	5:38:21 PM	PH3 valve closed
12/5/2011	5:38:21 PM	SiCl4 pre valve closed
12/5/2011	5:38:21 PM	SiCl4 post valve closed
12/5/2011	5:38:21 PM	Bypass valve closed
12/5/2011	5:38:21 PM	Bubbler valve closed
12/5/2011	5:38:21 PM	Main Vac valve opened
12/5/2011	5:38:21 PM	Helium MFC set to  0.000000
12/5/2011	5:38:21 PM	H2 MFC set to  0.000000
12/5/2011	5:38:21 PM	BCl3 MFC set to  0.000000
12/5/2011	5:38:21 PM	PHl3 MFC set to  0.000000
12/5/2011	5:38:21 PM	SiCl4 MFC set to  0.000000
12/5/2011	5:38:21 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	5:38:21 PM	Tube furnace set to 0
12/5/2011	5:38:51 PM	H2 valve closed
12/5/2011	5:38:51 PM	BCl3 valve closed
12/5/2011	5:38:51 PM	PH3 valve closed
12/5/2011	5:38:51 PM	SiCl4 pre valve closed
12/5/2011	5:38:51 PM	SiCl4 post valve closed
12/5/2011	5:38:51 PM	Bypass valve closed
12/5/2011	5:38:51 PM	Bubbler valve closed
12/5/2011	5:38:51 PM	Helium valve opened
12/5/2011	5:38:51 PM	Main Vac valve opened
12/5/2011	5:38:51 PM	Helium MFC set to  20.000000
12/5/2011	5:38:51 PM	H2 MFC set to  0.000000
12/5/2011	5:38:51 PM	BCl3 MFC set to  0.000000
12/5/2011	5:38:51 PM	PHl3 MFC set to  0.000000
12/5/2011	5:38:51 PM	SiCl4 MFC set to  0.000000
12/5/2011	5:38:51 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	5:38:52 PM	Tube furnace set to 0
12/5/2011	5:39:22 PM	Helium valve closed
12/5/2011	5:39:22 PM	H2 valve closed
12/5/2011	5:39:22 PM	BCl3 valve closed
12/5/2011	5:39:22 PM	PH3 valve closed
12/5/2011	5:39:22 PM	SiCl4 pre valve closed
12/5/2011	5:39:22 PM	SiCl4 post valve closed
12/5/2011	5:39:22 PM	Bypass valve closed
12/5/2011	5:39:22 PM	Bubbler valve closed
12/5/2011	5:39:22 PM	Main Vac valve opened
12/5/2011	5:39:22 PM	Helium MFC set to  0.000000
12/5/2011	5:39:22 PM	H2 MFC set to  0.000000
12/5/2011	5:39:22 PM	BCl3 MFC set to  0.000000
12/5/2011	5:39:22 PM	PHl3 MFC set to  0.000000
12/5/2011	5:39:22 PM	SiCl4 MFC set to  0.000000
12/5/2011	5:39:22 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	5:39:22 PM	Tube furnace set to 0
12/5/2011	5:39:52 PM	H2 valve closed
12/5/2011	5:39:52 PM	BCl3 valve closed
12/5/2011	5:39:52 PM	PH3 valve closed
12/5/2011	5:39:52 PM	SiCl4 pre valve closed
12/5/2011	5:39:52 PM	SiCl4 post valve closed
12/5/2011	5:39:52 PM	Bypass valve closed
12/5/2011	5:39:52 PM	Bubbler valve closed
12/5/2011	5:39:52 PM	Helium valve opened
12/5/2011	5:39:52 PM	Main Vac valve opened
12/5/2011	5:39:52 PM	Helium MFC set to  20.000000
12/5/2011	5:39:52 PM	H2 MFC set to  0.000000
12/5/2011	5:39:52 PM	BCl3 MFC set to  0.000000
12/5/2011	5:39:52 PM	PHl3 MFC set to  0.000000
12/5/2011	5:39:52 PM	SiCl4 MFC set to  0.000000
12/5/2011	5:39:52 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	5:39:52 PM	Tube furnace set to 0
12/5/2011	5:40:22 PM	Helium valve closed
12/5/2011	5:40:22 PM	H2 valve closed
12/5/2011	5:40:22 PM	BCl3 valve closed
12/5/2011	5:40:22 PM	PH3 valve closed
12/5/2011	5:40:22 PM	SiCl4 pre valve closed
12/5/2011	5:40:22 PM	SiCl4 post valve closed
12/5/2011	5:40:22 PM	Bypass valve closed
12/5/2011	5:40:22 PM	Bubbler valve closed
12/5/2011	5:40:22 PM	Main Vac valve opened
12/5/2011	5:40:22 PM	Helium MFC set to  0.000000
12/5/2011	5:40:22 PM	H2 MFC set to  0.000000
12/5/2011	5:40:22 PM	BCl3 MFC set to  0.000000
12/5/2011	5:40:22 PM	PHl3 MFC set to  0.000000
12/5/2011	5:40:22 PM	SiCl4 MFC set to  0.000000
12/5/2011	5:40:22 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	5:40:22 PM	Tube furnace set to 0
12/5/2011	5:40:52 PM	H2 valve closed
12/5/2011	5:40:52 PM	BCl3 valve closed
12/5/2011	5:40:52 PM	PH3 valve closed
12/5/2011	5:40:52 PM	SiCl4 pre valve closed
12/5/2011	5:40:52 PM	SiCl4 post valve closed
12/5/2011	5:40:52 PM	Bypass valve closed
12/5/2011	5:40:52 PM	Bubbler valve closed
12/5/2011	5:40:52 PM	Helium valve opened
12/5/2011	5:40:52 PM	Main Vac valve opened
12/5/2011	5:40:52 PM	Helium MFC set to  20.000000
12/5/2011	5:40:52 PM	H2 MFC set to  0.000000
12/5/2011	5:40:52 PM	BCl3 MFC set to  0.000000
12/5/2011	5:40:52 PM	PHl3 MFC set to  0.000000
12/5/2011	5:40:52 PM	SiCl4 MFC set to  0.000000
12/5/2011	5:40:52 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	5:40:52 PM	Tube furnace set to 0
12/5/2011	5:41:22 PM	Helium valve closed
12/5/2011	5:41:22 PM	H2 valve closed
12/5/2011	5:41:22 PM	BCl3 valve closed
12/5/2011	5:41:22 PM	PH3 valve closed
12/5/2011	5:41:22 PM	SiCl4 pre valve closed
12/5/2011	5:41:22 PM	SiCl4 post valve closed
12/5/2011	5:41:22 PM	Bypass valve closed
12/5/2011	5:41:22 PM	Bubbler valve closed
12/5/2011	5:41:22 PM	Main Vac valve opened
12/5/2011	5:41:22 PM	Helium MFC set to  0.000000
12/5/2011	5:41:22 PM	H2 MFC set to  0.000000
12/5/2011	5:41:22 PM	BCl3 MFC set to  0.000000
12/5/2011	5:41:22 PM	PHl3 MFC set to  0.000000
12/5/2011	5:41:22 PM	SiCl4 MFC set to  0.000000
12/5/2011	5:41:22 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	5:41:23 PM	Tube furnace set to 0
12/5/2011	5:41:53 PM	H2 valve closed
12/5/2011	5:41:53 PM	BCl3 valve closed
12/5/2011	5:41:53 PM	PH3 valve closed
12/5/2011	5:41:53 PM	SiCl4 pre valve closed
12/5/2011	5:41:53 PM	SiCl4 post valve closed
12/5/2011	5:41:53 PM	Bypass valve closed
12/5/2011	5:41:53 PM	Bubbler valve closed
12/5/2011	5:41:53 PM	Helium valve opened
12/5/2011	5:41:53 PM	Main Vac valve opened
12/5/2011	5:41:53 PM	Helium MFC set to  20.000000
12/5/2011	5:41:53 PM	H2 MFC set to  0.000000
12/5/2011	5:41:53 PM	BCl3 MFC set to  0.000000
12/5/2011	5:41:53 PM	PHl3 MFC set to  0.000000
12/5/2011	5:41:53 PM	SiCl4 MFC set to  0.000000
12/5/2011	5:41:53 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	5:41:53 PM	Tube furnace set to 0
12/5/2011	5:42:23 PM	Helium valve closed
12/5/2011	5:42:23 PM	H2 valve closed
12/5/2011	5:42:23 PM	BCl3 valve closed
12/5/2011	5:42:23 PM	PH3 valve closed
12/5/2011	5:42:23 PM	SiCl4 pre valve closed
12/5/2011	5:42:23 PM	SiCl4 post valve closed
12/5/2011	5:42:23 PM	Bypass valve closed
12/5/2011	5:42:23 PM	Bubbler valve closed
12/5/2011	5:42:23 PM	Main Vac valve opened
12/5/2011	5:42:23 PM	Helium MFC set to  0.000000
12/5/2011	5:42:23 PM	H2 MFC set to  0.000000
12/5/2011	5:42:23 PM	BCl3 MFC set to  0.000000
12/5/2011	5:42:23 PM	PHl3 MFC set to  0.000000
12/5/2011	5:42:23 PM	SiCl4 MFC set to  0.000000
12/5/2011	5:42:23 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	5:42:23 PM	Tube furnace set to 0
12/5/2011	5:42:53 PM	H2 valve closed
12/5/2011	5:42:53 PM	BCl3 valve closed
12/5/2011	5:42:53 PM	PH3 valve closed
12/5/2011	5:42:53 PM	SiCl4 pre valve closed
12/5/2011	5:42:53 PM	SiCl4 post valve closed
12/5/2011	5:42:53 PM	Bypass valve closed
12/5/2011	5:42:53 PM	Bubbler valve closed
12/5/2011	5:42:53 PM	Helium valve opened
12/5/2011	5:42:53 PM	Main Vac valve opened
12/5/2011	5:42:53 PM	Helium MFC set to  20.000000
12/5/2011	5:42:53 PM	H2 MFC set to  0.000000
12/5/2011	5:42:53 PM	BCl3 MFC set to  0.000000
12/5/2011	5:42:53 PM	PHl3 MFC set to  0.000000
12/5/2011	5:42:53 PM	SiCl4 MFC set to  0.000000
12/5/2011	5:42:53 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	5:42:53 PM	Tube furnace set to 0
12/5/2011	5:43:23 PM	Helium valve closed
12/5/2011	5:43:23 PM	H2 valve closed
12/5/2011	5:43:23 PM	BCl3 valve closed
12/5/2011	5:43:23 PM	PH3 valve closed
12/5/2011	5:43:23 PM	SiCl4 pre valve closed
12/5/2011	5:43:23 PM	SiCl4 post valve closed
12/5/2011	5:43:23 PM	Bypass valve closed
12/5/2011	5:43:23 PM	Bubbler valve closed
12/5/2011	5:43:23 PM	Main Vac valve opened
12/5/2011	5:43:23 PM	Helium MFC set to  0.000000
12/5/2011	5:43:23 PM	H2 MFC set to  0.000000
12/5/2011	5:43:23 PM	BCl3 MFC set to  0.000000
12/5/2011	5:43:23 PM	PHl3 MFC set to  0.000000
12/5/2011	5:43:23 PM	SiCl4 MFC set to  0.000000
12/5/2011	5:43:23 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	5:43:23 PM	Tube furnace set to 0
12/5/2011	5:43:53 PM	H2 valve closed
12/5/2011	5:43:53 PM	BCl3 valve closed
12/5/2011	5:43:53 PM	PH3 valve closed
12/5/2011	5:43:53 PM	SiCl4 pre valve closed
12/5/2011	5:43:53 PM	SiCl4 post valve closed
12/5/2011	5:43:53 PM	Bypass valve closed
12/5/2011	5:43:53 PM	Bubbler valve closed
12/5/2011	5:43:53 PM	Helium valve opened
12/5/2011	5:43:53 PM	Main Vac valve opened
12/5/2011	5:43:53 PM	Helium MFC set to  20.000000
12/5/2011	5:43:53 PM	H2 MFC set to  0.000000
12/5/2011	5:43:54 PM	BCl3 MFC set to  0.000000
12/5/2011	5:43:54 PM	PHl3 MFC set to  0.000000
12/5/2011	5:43:54 PM	SiCl4 MFC set to  0.000000
12/5/2011	5:43:54 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	5:43:54 PM	Tube furnace set to 0
12/5/2011	5:44:24 PM	Helium valve closed
12/5/2011	5:44:24 PM	H2 valve closed
12/5/2011	5:44:24 PM	BCl3 valve closed
12/5/2011	5:44:24 PM	PH3 valve closed
12/5/2011	5:44:24 PM	SiCl4 pre valve closed
12/5/2011	5:44:24 PM	SiCl4 post valve closed
12/5/2011	5:44:24 PM	Bypass valve closed
12/5/2011	5:44:24 PM	Bubbler valve closed
12/5/2011	5:44:24 PM	Main Vac valve opened
12/5/2011	5:44:24 PM	Helium MFC set to  0.000000
12/5/2011	5:44:24 PM	H2 MFC set to  0.000000
12/5/2011	5:44:24 PM	BCl3 MFC set to  0.000000
12/5/2011	5:44:24 PM	PHl3 MFC set to  0.000000
12/5/2011	5:44:24 PM	SiCl4 MFC set to  0.000000
12/5/2011	5:44:24 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	5:44:24 PM	Tube furnace set to 0
12/5/2011	5:44:25 PM	Run finished at 5:44 PM
12/5/2011	5:44:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/5/2011	5:47:29 PM	Main Vac valve closed
12/5/2011	5:48:21 PM	Main Vac valve opened
12/5/2011	5:49:47 PM	Recipe started at 5:49 PM
12/5/2011	5:49:47 PM	Helium valve closed
12/5/2011	5:49:47 PM	H2 valve closed
12/5/2011	5:49:47 PM	BCl3 valve closed
12/5/2011	5:49:47 PM	PH3 valve closed
12/5/2011	5:49:47 PM	SiCl4 pre valve closed
12/5/2011	5:49:47 PM	SiCl4 post valve closed
12/5/2011	5:49:47 PM	Main Vac valve closed
12/5/2011	5:49:47 PM	Bypass valve closed
12/5/2011	5:49:47 PM	Bubbler valve closed
12/5/2011	5:49:47 PM	Helium MFC set to  0.000000
12/5/2011	5:49:47 PM	H2 MFC set to  0.000000
12/5/2011	5:49:47 PM	BCl3 MFC set to  0.000000
12/5/2011	5:49:47 PM	PHl3 MFC set to  0.000000
12/5/2011	5:49:47 PM	SiCl4 MFC set to  0.000000
12/5/2011	5:49:47 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	5:49:47 PM	Tube furnace set to 0
12/5/2011	5:49:50 PM	Helium valve closed
12/5/2011	5:49:50 PM	BCl3 valve closed
12/5/2011	5:49:50 PM	PH3 valve closed
12/5/2011	5:49:50 PM	SiCl4 pre valve closed
12/5/2011	5:49:50 PM	SiCl4 post valve closed
12/5/2011	5:49:50 PM	Main Vac valve closed
12/5/2011	5:49:50 PM	Bypass valve closed
12/5/2011	5:49:50 PM	Bubbler valve closed
12/5/2011	5:49:50 PM	H2 valve opened
12/5/2011	5:49:50 PM	Helium MFC set to  0.000000
12/5/2011	5:49:50 PM	H2 MFC set to  500.000000
12/5/2011	5:49:50 PM	BCl3 MFC set to  0.000000
12/5/2011	5:49:50 PM	PHl3 MFC set to  0.000000
12/5/2011	5:49:50 PM	SiCl4 MFC set to  0.000000
12/5/2011	5:49:50 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	5:49:50 PM	Tube furnace set to 0
12/5/2011	5:50:59 PM	Helium valve closed
12/5/2011	5:50:59 PM	BCl3 valve closed
12/5/2011	5:50:59 PM	PH3 valve closed
12/5/2011	5:50:59 PM	SiCl4 pre valve closed
12/5/2011	5:50:59 PM	SiCl4 post valve closed
12/5/2011	5:50:59 PM	Main Vac valve closed
12/5/2011	5:50:59 PM	Bypass valve closed
12/5/2011	5:50:59 PM	H2 valve opened
12/5/2011	5:50:59 PM	Bubbler valve opened
12/5/2011	5:50:59 PM	Helium MFC set to  0.000000
12/5/2011	5:50:59 PM	H2 MFC set to  500.000000
12/5/2011	5:50:59 PM	BCl3 MFC set to  0.000000
12/5/2011	5:50:59 PM	PHl3 MFC set to  0.000000
12/5/2011	5:50:59 PM	SiCl4 MFC set to  0.000000
12/5/2011	5:50:59 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	5:50:59 PM	Tube furnace set to 0
12/5/2011	5:51:00 PM	Helium valve closed
12/5/2011	5:51:00 PM	BCl3 valve closed
12/5/2011	5:51:00 PM	PH3 valve closed
12/5/2011	5:51:00 PM	SiCl4 pre valve closed
12/5/2011	5:51:00 PM	SiCl4 post valve closed
12/5/2011	5:51:00 PM	Main Vac valve closed
12/5/2011	5:51:00 PM	Bypass valve closed
12/5/2011	5:51:00 PM	H2 valve opened
12/5/2011	5:51:00 PM	Bubbler valve opened
12/5/2011	5:51:00 PM	Helium MFC set to  0.000000
12/5/2011	5:51:00 PM	H2 MFC set to  500.000000
12/5/2011	5:51:00 PM	BCl3 MFC set to  0.000000
12/5/2011	5:51:00 PM	PHl3 MFC set to  0.000000
12/5/2011	5:51:00 PM	SiCl4 MFC set to  0.000000
12/5/2011	5:51:00 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	5:51:00 PM	Tube furnace set to 1000
12/5/2011	6:16:00 PM	Helium valve closed
12/5/2011	6:16:00 PM	PH3 valve closed
12/5/2011	6:16:00 PM	Main Vac valve closed
12/5/2011	6:16:00 PM	Bypass valve closed
12/5/2011	6:16:00 PM	H2 valve opened
12/5/2011	6:16:00 PM	BCl3 valve opened
12/5/2011	6:16:00 PM	SiCl4 pre valve opened
12/5/2011	6:16:00 PM	SiCl4 post valve opened
12/5/2011	6:16:00 PM	Bubbler valve opened
12/5/2011	6:16:00 PM	Helium MFC set to  0.000000
12/5/2011	6:16:00 PM	H2 MFC set to  500.000000
12/5/2011	6:16:00 PM	BCl3 MFC set to  1.000000
12/5/2011	6:16:00 PM	PHl3 MFC set to  0.000000
12/5/2011	6:16:00 PM	SiCl4 MFC set to  26.000000
12/5/2011	6:16:00 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	6:16:00 PM	Tube furnace set to 1000
12/5/2011	6:31:00 PM	Helium valve closed
12/5/2011	6:31:00 PM	BCl3 valve closed
12/5/2011	6:31:00 PM	PH3 valve closed
12/5/2011	6:31:00 PM	SiCl4 pre valve closed
12/5/2011	6:31:00 PM	SiCl4 post valve closed
12/5/2011	6:31:00 PM	Main Vac valve closed
12/5/2011	6:31:00 PM	Bypass valve closed
12/5/2011	6:31:00 PM	H2 valve opened
12/5/2011	6:31:00 PM	Bubbler valve opened
12/5/2011	6:31:00 PM	Helium MFC set to  0.000000
12/5/2011	6:31:00 PM	H2 MFC set to  500.000000
12/5/2011	6:31:00 PM	BCl3 MFC set to  0.000000
12/5/2011	6:31:00 PM	PHl3 MFC set to  0.000000
12/5/2011	6:31:00 PM	SiCl4 MFC set to  0.000000
12/5/2011	6:31:00 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	6:31:01 PM	Tube furnace set to 750
12/5/2011	6:41:01 PM	H2 valve closed
12/5/2011	6:41:01 PM	BCl3 valve closed
12/5/2011	6:41:01 PM	PH3 valve closed
12/5/2011	6:41:01 PM	SiCl4 pre valve closed
12/5/2011	6:41:01 PM	SiCl4 post valve closed
12/5/2011	6:41:01 PM	Main Vac valve closed
12/5/2011	6:41:01 PM	Bypass valve closed
12/5/2011	6:41:01 PM	Helium valve opened
12/5/2011	6:41:01 PM	Bubbler valve opened
12/5/2011	6:41:01 PM	Helium MFC set to  500.000000
12/5/2011	6:41:01 PM	H2 MFC set to  0.000000
12/5/2011	6:41:01 PM	BCl3 MFC set to  0.000000
12/5/2011	6:41:01 PM	PHl3 MFC set to  0.000000
12/5/2011	6:41:01 PM	SiCl4 MFC set to  0.000000
12/5/2011	6:41:01 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	6:41:01 PM	Tube furnace set to 0
12/5/2011	7:01:01 PM	Helium valve closed
12/5/2011	7:01:01 PM	H2 valve closed
12/5/2011	7:01:01 PM	BCl3 valve closed
12/5/2011	7:01:01 PM	PH3 valve closed
12/5/2011	7:01:01 PM	SiCl4 pre valve closed
12/5/2011	7:01:01 PM	SiCl4 post valve closed
12/5/2011	7:01:01 PM	Main Vac valve closed
12/5/2011	7:01:01 PM	Bypass valve closed
12/5/2011	7:01:01 PM	Bubbler valve closed
12/5/2011	7:01:01 PM	Helium MFC set to  0.000000
12/5/2011	7:01:01 PM	H2 MFC set to  0.000000
12/5/2011	7:01:01 PM	BCl3 MFC set to  0.000000
12/5/2011	7:01:01 PM	PHl3 MFC set to  0.000000
12/5/2011	7:01:01 PM	SiCl4 MFC set to  0.000000
12/5/2011	7:01:01 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	7:01:01 PM	Tube furnace set to 0
12/5/2011	7:01:02 PM	Run finished at 7:01 PM
12/5/2011	7:49:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/5/2011	7:49:59 PM	Recipe started at 7:49 PM
12/5/2011	7:49:59 PM	Helium valve closed
12/5/2011	7:49:59 PM	H2 valve closed
12/5/2011	7:49:59 PM	BCl3 valve closed
12/5/2011	7:49:59 PM	PH3 valve closed
12/5/2011	7:49:59 PM	SiCl4 pre valve closed
12/5/2011	7:49:59 PM	SiCl4 post valve closed
12/5/2011	7:49:59 PM	Main Vac valve closed
12/5/2011	7:49:59 PM	Bypass valve closed
12/5/2011	7:49:59 PM	Bubbler valve closed
12/5/2011	7:49:59 PM	Helium MFC set to  0.000000
12/5/2011	7:49:59 PM	H2 MFC set to  0.000000
12/5/2011	7:49:59 PM	BCl3 MFC set to  0.000000
12/5/2011	7:49:59 PM	PHl3 MFC set to  0.000000
12/5/2011	7:49:59 PM	SiCl4 MFC set to  0.000000
12/5/2011	7:49:59 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	7:49:59 PM	Tube furnace set to 0
12/5/2011	7:50:02 PM	H2 valve closed
12/5/2011	7:50:02 PM	BCl3 valve closed
12/5/2011	7:50:02 PM	PH3 valve closed
12/5/2011	7:50:02 PM	SiCl4 pre valve closed
12/5/2011	7:50:02 PM	SiCl4 post valve closed
12/5/2011	7:50:02 PM	Main Vac valve closed
12/5/2011	7:50:02 PM	Bypass valve closed
12/5/2011	7:50:02 PM	Bubbler valve closed
12/5/2011	7:50:02 PM	Helium valve opened
12/5/2011	7:50:02 PM	Helium MFC set to  500.000000
12/5/2011	7:50:02 PM	H2 MFC set to  0.000000
12/5/2011	7:50:02 PM	BCl3 MFC set to  0.000000
12/5/2011	7:50:02 PM	PHl3 MFC set to  0.000000
12/5/2011	7:50:02 PM	SiCl4 MFC set to  0.000000
12/5/2011	7:50:02 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	7:50:02 PM	Tube furnace set to 0
12/5/2011	7:50:04 PM	Helium valve closed
12/5/2011	7:50:04 PM	H2 valve closed
12/5/2011	7:50:04 PM	BCl3 valve closed
12/5/2011	7:50:04 PM	PH3 valve closed
12/5/2011	7:50:04 PM	SiCl4 pre valve closed
12/5/2011	7:50:04 PM	SiCl4 post valve closed
12/5/2011	7:50:04 PM	Main Vac valve closed
12/5/2011	7:50:04 PM	Bypass valve closed
12/5/2011	7:50:04 PM	Bubbler valve closed
12/5/2011	7:50:04 PM	Helium MFC set to  0.000000
12/5/2011	7:50:04 PM	H2 MFC set to  0.000000
12/5/2011	7:50:04 PM	BCl3 MFC set to  0.000000
12/5/2011	7:50:04 PM	PHl3 MFC set to  0.000000
12/5/2011	7:50:04 PM	SiCl4 MFC set to  0.000000
12/5/2011	7:50:04 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	7:50:05 PM	Tube furnace set to 0
12/5/2011	7:50:06 PM	Run finished at 7:50 PM
12/5/2011	7:50:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/5/2011	7:56:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/5/2011	7:56:28 PM	Recipe started at 7:56 PM
12/5/2011	7:56:28 PM	Helium valve closed
12/5/2011	7:56:28 PM	H2 valve closed
12/5/2011	7:56:28 PM	BCl3 valve closed
12/5/2011	7:56:28 PM	PH3 valve closed
12/5/2011	7:56:28 PM	SiCl4 pre valve closed
12/5/2011	7:56:28 PM	SiCl4 post valve closed
12/5/2011	7:56:28 PM	Main Vac valve closed
12/5/2011	7:56:28 PM	Bubbler valve closed
12/5/2011	7:56:28 PM	Bypass valve opened
12/5/2011	7:56:28 PM	Helium MFC set to  0.000000
12/5/2011	7:56:28 PM	H2 MFC set to  0.000000
12/5/2011	7:56:28 PM	BCl3 MFC set to  0.000000
12/5/2011	7:56:28 PM	PHl3 MFC set to  0.000000
12/5/2011	7:56:28 PM	SiCl4 MFC set to  0.000000
12/5/2011	7:56:28 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	7:56:28 PM	Tube furnace set to 0
12/5/2011	7:57:36 PM	Helium valve closed
12/5/2011	7:57:36 PM	H2 valve closed
12/5/2011	7:57:36 PM	BCl3 valve closed
12/5/2011	7:57:36 PM	PH3 valve closed
12/5/2011	7:57:36 PM	SiCl4 pre valve closed
12/5/2011	7:57:36 PM	SiCl4 post valve closed
12/5/2011	7:57:36 PM	Main Vac valve closed
12/5/2011	7:57:36 PM	Bubbler valve closed
12/5/2011	7:57:36 PM	Bypass valve opened
12/5/2011	7:57:36 PM	Helium MFC set to  0.000000
12/5/2011	7:57:36 PM	H2 MFC set to  0.000000
12/5/2011	7:57:36 PM	BCl3 MFC set to  0.000000
12/5/2011	7:57:36 PM	PHl3 MFC set to  0.000000
12/5/2011	7:57:36 PM	SiCl4 MFC set to  0.000000
12/5/2011	7:57:36 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	7:57:36 PM	Tube furnace set to 0
12/5/2011	7:58:36 PM	Helium valve closed
12/5/2011	7:58:36 PM	H2 valve closed
12/5/2011	7:58:36 PM	BCl3 valve closed
12/5/2011	7:58:36 PM	PH3 valve closed
12/5/2011	7:58:36 PM	SiCl4 pre valve closed
12/5/2011	7:58:36 PM	SiCl4 post valve closed
12/5/2011	7:58:36 PM	Bypass valve closed
12/5/2011	7:58:36 PM	Bubbler valve closed
12/5/2011	7:58:36 PM	Main Vac valve opened
12/5/2011	7:58:36 PM	Helium MFC set to  0.000000
12/5/2011	7:58:36 PM	H2 MFC set to  0.000000
12/5/2011	7:58:36 PM	BCl3 MFC set to  0.000000
12/5/2011	7:58:36 PM	PHl3 MFC set to  0.000000
12/5/2011	7:58:36 PM	SiCl4 MFC set to  0.000000
12/5/2011	7:58:36 PM	Bypass solenoid MFC set to  0.000000
12/5/2011	7:58:37 PM	Tube furnace set to 0
12/5/2011	7:58:38 PM	Run finished at 7:58 PM
12/5/2011	7:58:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
